Methods of forming connector pad structures, interconnect structures, and structures thereof
Methods of forming connector pad structures, interconnect structures, and structures thereof are disclosed. In some embodiments, a method of forming a connector pad structure includes forming an underball metallization (UBM) pad, and increasing a surface roughness of the UBM pad by exposing the UBM pad to a plasma treatment. A polymer material is formed over a first portion of the UBM pad, leaving a second portion of the UBM pad exposed.
1. A package comprising:
a die encapsulated by a molding compound;
a redistribution structure over the die and the molding compound, the redistribution structure comprises a conductive line electrically connected to the die;
a contact pad on the conducive line, wherein a surface of the contact pad opposite the die has an average surface roughness in a range of 0.18 μm to 0.25 μm;
a polymer layer on an edge portion of the contact pad;
a solder region on a center portion of the contact pad, wherein the polymer layer surrounds the solder region in a top-down view; and
an intermetallic compound between the solder region and the surface of the contact pad opposite the die.
2. The package of claim 1 , further comprising a flux residue between the intermetallic compound and the surface of the contact pad opposite the die.
3. The package of claim 2 , wherein the flux residue comprises a low activity flux residue.
4. The package of claim 1 , wherein the polymer layer contacts the surface of the contact pad opposite the die.
5. The package of claim 1 , wherein the intermetallic compound is not formed between the polymer layer and the contact pad.
6. The package of claim 1 , wherein the polymer layer extends along sidewalls of the contact pad.
7. The package of claim 1 , wherein the contact pad extends below a bottommost surface of the polymer layer.
8. The package of claim 1 further comprising an insulating material around the polymer layer and the contact pad, wherein the polymer layer is between the insulating material and the contact pad.
9. A device comprising:
a conductive line in a first insulating layer;
an underbump metallization (UBM) extending through a second insulating layer to the conductive line, wherein a surface of the UBM opposite the conductive line has a surface roughness in a range of 0.18 μm to 0.25 μm;
an intermetallic compound (IMC) on the surface of the UBM opposite the conductive line;
a solder region on the IMC; and
a polymer layer on the surface of the UBM opposite the conductive line, the IMC is not formed between the polymer layer and the UBM.
10. The device of claim 9 , wherein the polymer layer surrounds a perimeter of the solder region in a top down view.
11. The device of claim 9 , wherein the conductive line is electrically connected to a semiconductor die.
12. The device of claim 9 , wherein the polymer layer extends below a top surface of the second insulating layer.
13. The device of claim 9 , wherein the polymer layer surrounds a perimeter of the UBM in a top down view.
14. The device of claim 9 further comprising a flux residue between the IMC and the surface of the UBM opposite the conductive line.
15. A method comprising:
plating a contact pad over a conductive line, wherein a surface of the contact pad has an average surface roughness of less than 0.18 μm;
treating the surface of the contact pad to increase the average surface roughness of the surface of the contact pad to be in a range of 0.18 μm to 0.25 μm;
depositing a polymer layer on edge portions of the surface of the contact pad; and
forming a solder ball on a center portion of the contact pad, wherein the polymer layer surrounds a perimeter of the solder ball in a top down view.
16. The method of claim 15 , wherein treating the surface of the contact pad to increase the average surface roughness of the surface of the contact pad comprises a plasma treatment.
17. The method of claim 16 , wherein the plasma treatment is performed in the presence of nitrogen.
18. The method of claim 15 further comprising prior to forming the solder ball, forming a flux on the surface of the contact pad, wherein the flux is a low activity flux.
19. The method of claim 15 wherein forming the solder ball comprises a reflow process that forms an intermetallic compound between the solder ball and the contact pad.
20. The method of claim 19 , wherein the intermetallic compound is not formed between the polymer layer and the contact pad.