Resistor for dynamic random access memory
View Patent ↗A resistor for dynamic random access memory includes a substrate with a memory cell region and a peripheral region defined thereon, and a resistor formed on a shallow trench isolation of the substrate, wherein the resistor is provided with a winding portion and terminal portions at two ends of the winding portion. The winding portion is electrically connected with an overlying metal layer through contacts, and the terminal portion includes a polysilicon layer and a metal multilayer from the bottom up.
1. A resistor for dynamic random access memory, comprising:
a substrate with a memory cell region and a peripheral region defined thereon; and
a resistor on a shallow trench isolation in said substrate, wherein said shallow trench isolation has a resistor recess, and said resistor comprises a winding portion in said resistor recess and two terminal portions upwardly-extending at two ends of said winding portion respectively, and said upwardly-extending terminal portion electrically connects to a metal layer through a contact, and said upwardly-extending terminal portion comprises a polysilicon layer formed and integrated with said winding portion and upwardly-protruding higher than said winding portion and a metal multilayer from the bottom up; and
a bit line contact formed in said memory cell region, wherein said bit line contact comprises said polysilicon layer and said metal multilayer identical to and with same height as said polysilicon layer and said metal multilayer of said terminal portion of said resistor, and a bottom surface of said winding portion of said resistor is lower than said bit line contact.
2. The resistor for dynamic random access memory of claim 1 , further comprising a logic gate in said peripheral region, wherein said logic gate comprises said polysilicon layer and said metal multilayer identical to and with same height as said polysilicon layer and said metal multilayer of said terminal portion of said resistor.
3. The resistor for dynamic random access memory of claim 2 , wherein the bottom surface of said winding portion of said resistor is lower than said logic gate.
4. The resistor for dynamic random access memory of claim 1 , wherein the material of said metal multilayer comprises titanium, titanium nitride, tungsten or tungsten silicide.
5. The resistor for dynamic random access memory of claim 1 , wherein said resistor electrically connects to a MO metal layer through said contact.
6. A resistor for dynamic random access memory, comprising:
a substrate with a memory cell region and a peripheral region defined thereon; and
a resistor on a shallow trench isolation in said substrate, wherein said shallow trench isolation has a resistor recess, and said resistor comprises a winding portion in said resistor recess and two terminal portions upwardly-extending at two ends of said winding portion respectively, and said upwardly-extending terminal portion electrically connects to a metal layer through a contact, and said upwardly-extending terminal portion comprises a polysilicon layer formed and integrated with said winding portion and upwardly-protruding higher than said winding portion and a metal multilayer from the bottom up; and
a storage node contact formed in said memory cell region, wherein said storage node contact comprises said polysilicon layer identical to and with same height as said polysilicon layer of said terminal portion of said resistor, and a bottom surface of said winding portion of said resistor is lower than said storage node contact.