Seed layers for copper interconnects

1. A method of forming an interconnect structure, comprising:

positioning a substrate in a first processing chamber, the substrate comprising a patterned surface having openings formed in a material layer thereof;

depositing, in the first processing chamber, a tantalum nitride layer on the material layer to line the openings;

positioning the substrate in a second processing chamber; and

forming a seed layer on the tantalum nitride layer without removing the substrate from the second processing chamber, comprising:

alternating sequentially exposing the substrate to a first reactive precursor comprising a copper-containing organometallic and a second reactive precursor comprising hydrogen to form a first copper layer;

alternating sequentially exposing the substrate to a third reactive precursor comprising a ruthenium-containing organometallic and a fourth reactive precursor comprising hydrogen to form a ruthenium layer on the first copper layer; and

alternating sequentially exposing the substrate to the first reactive precursor and the second reactive precursor to form a second copper layer on the ruthenium layer,

wherein the first processing chamber and the second processing chamber are connected together by a transfer chamber, the first copper layer has a first thickness between 0.5 nm and 5 nm, the ruthenium layer has a second thickness between 1 angstrom and 10 angstroms, the second cooper layer has a third thickness between 1 nm and 20nm, the tantalum nitride layer has a fourth thickness between 1 nm and 5 nm.

2. The method of claim 1 , further comprising sequentially forming a plurality of alternating first copper and ruthenium layers before forming the second copper layer.

3. A method of forming a interconnect structure, comprising:

positioning a substrate in a first processing chamber, the substrate comprising a patterned surface having openings formed in a material layer thereof;

depositing, in the first processing chamber, a tantalum nitride layer on the material layer to line the openings, wherein the tantalum nitride layer is deposited to a first thickness of between 1 nm and 5 nm;

positioning the substrate in a second processing chamber;

forming a seed layer on the tantalum nitride layer without removing the substrate from the second processing chamber, comprising:

(a) depositing a first copper layer on the substrate by alternating sequentially exposing the patterned substrate to a first reactive precursor comprising a copper-containing organometallic and a second reactive precursor comprising hydrogen, wherein the first copper layer is deposited to a second thickness of between 0.5 nm and 20 nm;

(b) depositing a ruthenium layer on the first copper layer by alternating sequentially exposing the substrate to a third reactive precursor comprising a ruthenium-containing organometallic and a fourth reactive precursor comprising hydrogen, wherein the ruthenium layer is deposited to a third thickness of between 1 angstrom and 10angstroms; and

(c) repeating (a) and (b); and

depositing a second copper layer on the seed layer, wherein the second copper layer is deposited to a fourth thickness between 1 nm and 20 nm, wherein the first processing chamber and the second processing chamber are connected together by a transfer chamber.

4. The method of claim 3 , wherein the material layer comprises a dielectric layer.

5. The method of claim 3 , wherein depositing the second copper layers comprises sequentially exposing the patterned substrate to a first reactive precursor comprising a copper-containing organometallic and a second reactive precursor comprising hydrogen.

6. The method of claim 3 , wherein depositing the second copper layers comprises a PVD process, and wherein depositing the ruthenium layer comprises sequentially exposing the patterned substrate to a first reactive precursor comprising a ruthenium-containing, organometallic and a second reactive precursor comprising hydrogen.

7. A method of forming an interconnect structure, comprising:

positioning a substrate in a first processing chamber, the substrate comprising a patterned surface having openings formed in a material layer thereof;

depositing, in the first processing chamber, a tantalum nitride layer on the material layer to line the openings;

positioning the substrate in a second processing chamber:

forming a seed layer on the tantalum nitride layer, comprising:

sequentially forming a plurality of alternating first copper and ruthenium layers; and

forming a second copper layer on a ruthenium layer of the plurality of alternating first copper and ruthenium layers, wherein

the first copper layers, the ruthenium layers, and the second copper layer are sequentially deposited in the second processing chamber without removing the substrate therefrom,

forming the first and second copper layers comprises alternating sequentially exposing the substrate to a first reactive precursor comprising a copper-containing organometallic and a second reactive precursor comprising hydrogen, and

forming the ruthenium layer comprises alternating sequentially exposing the substrate to a third reactive precursor comprising a ruthenium-containing organometallic and a fourth reactive precursor comprising hydrogen.

8. The method of claim 7 , wherein

the tantalum nitride layer has a first thickness of between 1 nm and 5 nm,

one or more of the first copper layer are deposited to a second thickness of between 0.5 nm and 5 nm;

one or more of the ruthenium layer are deposited to a third thickness of between 1 angstrom and 10 angstroms; and

the second copper layer is deposited to a fourth thickness between 1 nm and 20 nm.

9. The method of claim 7 , wherein the first processing chamber and the second processing chamber are connected together by a transfer chamber.