Specimen observation method
A device for observing a specimen, such as a charged particle beam device exemplified by a scanning electron microscope and a transmission electron microscope in which an operator can specify minute bubbles with high contrast in a charged particle beam image of a liquid subjected to processing of generating bubbles, using a phenomenon in which contrast as high as an operator can specify minute bubbles is provided in a charged particle beam image of a specimen including an ionic liquid and a liquid subjected to processing of generating bubbles, thus making it possible to recognize minute bubbles in a liquid.
1. A specimen observation method comprising:
a capturing step of obtaining a charged particle beam image of a specimen including an ionic liquid and a liquid subjected to processing of generating bubbles,
wherein the capturing step includes an in-situ observing step of the specimen, and
wherein the in-situ observing step includes a circulating step of circulating the specimen through a flow passage for observing movement of said bubbles with time.
2. The specimen observation method according to claim 1 , further comprising:
an enclosing step of enclosing the specimen in a container including a transparent portion for a charged particle,
wherein the enclosing step is performed before the capturing step.
3. The specimen observation method according to claim 1 ,
wherein the ionic liquid includes a cation and an anion.
4. The specimen observation method according to claim 1 ,
wherein the bubbles are fine bubbles.
5. The specimen observation method according to claim 1 , further comprising:
a measuring step of obtaining dimensions of a predetermined region in the charged particle beam image,
wherein the predetermined region is darker than the surroundings thereof.
6. The specimen observation method according to claim 1 ,
wherein the capturing step includes a video obtaining step of obtaining a video of the specimen.
7. The specimen observation method according to claim 1 ,
wherein the in-situ observing step includes a voltage applying step of applying a voltage to the specimen.
8. The specimen observation method according to claim 1 ,
wherein the in-situ observing step includes a temperature control step of changing a temperature of the specimen.
9. The specimen observation method according to claim 1 ,
wherein the in-situ observing step includes a medium supplying step of supplying a medium to the specimen.
10. The specimen observation method according to claim 1 ,
wherein the charged particle beam image is a transmission electron image.
11. The specimen observation method according to claim 1 ,
wherein the charged particle beam image is a scanning electron microscope image.
12. A specimen observation method comprising:
a capturing step of obtaining a charged particle beam image of a specimen including an ionic liquid and a liquid capable of generating bubbles,
wherein the capturing step corresponds to an in-situ observation of bubbles, and
wherein the in-situ observing step includes a circulating step of circulating the specimen through a flow passage for observing movement of said bubbles with time.