Semiconductor element and display device using the same
A display device including a semiconductor element is provided. The semiconductor element includes: a semiconductor having an active layer; a gate insulating film which is in contact with the semiconductor; a gate electrode opposite to the active layer through the gate insulating film; a first nitride insulating film formed over the active layer; a photosensitive organic resin film formed on the first nitride insulating film; a second nitride insulating film formed on the photosensitive organic resin film; and a wiring provided on the second nitride insulating film, in which a first opening portion is provided in the photosensitive organic resin film, an inner wall surface of the first opening portion is covered with the second nitride insulating film, a second opening portion is provided in a laminate including the gate insulating film, the first nitride insulating film, and the second nitride insulating film inside the first opening portion, and the semiconductor is connected with the wiring through the first opening portion and the second opening portion.
1. A display device comprising:
a semiconductor layer over a substrate;
a first insulating film over the semiconductor layer, the first insulating film comprising a first opening;
a wiring over the first insulating film, the wiring in contact with the semiconductor layer through the first opening;
a second insulating film over the wiring, the second insulating film comprising a first inorganic insulating film and a second opening;
a third insulating film over the second insulating film, the third insulating film comprising an organic insulating film and a third opening;
a fourth insulating film over the third insulating film, the fourth insulating film comprising a second inorganic insulating film and a fourth opening; and
a pixel electrode over the fourth insulating film, the pixel electrode in contact with the wiring through the second opening, the third opening, and the fourth opening,
wherein the first opening and the third opening overlap with each other.
2. The display device according to claim 1 ,
wherein the second insulating film is in contact with the wiring,
wherein the third insulating film is in contact with the second insulating film,
wherein the fourth insulating film is in contact with the third insulating film, and
wherein the pixel electrode is in contact with the fourth insulating film.
3. The display device according to claim 1 ,
wherein the first opening and the second opening overlap with each other, and
wherein the first opening and the fourth opening overlap with each other.
4. A display device comprising:
a semiconductor layer over a substrate;
a first insulating film over the semiconductor layer, the first insulating film comprising a first opening;
a wiring over the first insulating film, the wiring in contact with the semiconductor layer through the first opening;
a second insulating film over the wiring, the second insulating film comprising a first inorganic insulating film and a second opening;
a third insulating film over the second insulating film, the third insulating film comprising an organic insulating film and a third opening;
a fourth insulating film over the third insulating film, the fourth insulating film comprising a second inorganic insulating film and a fourth opening; and
a pixel electrode over the fourth insulating film, the pixel electrode in contact with the wiring through the second opening, the third opening, and the fourth opening,
wherein the first opening and the third opening overlap with each other, and
wherein the third insulating film has a curved inner wall surface adjacent to the third opening.
5. The display device according to claim 4 ,
wherein the second insulating film is in contact with the wiring,
wherein the third insulating film is in contact with the second insulating film,
wherein the fourth insulating film is in contact with the third insulating film, and
wherein the pixel electrode is in contact with the fourth insulating film.
6. The display device according to claim 4 ,
wherein the first opening and the second opening overlap with each other, and
wherein the first opening and the fourth opening overlap with each other.