Method of making a capacitor electrode of a memory device having alternately stacked oxides and nitrides over a sacrificial layer
View Patent ↗A semiconductor memory device and a method of forming the same are provided, with the semiconductor memory device including a substrate, a stacked structure, plural openings, plural flared portions and an electrode layer. The stacked structure is disposed on the substrate and includes alternately stacked oxide material layers and stacked nitride material layers. Each of the openings is disposed in the stacked structure, and each of the flared portions is disposed under each of the openings, in connection with each opening. The electrode layer is disposed on surfaces of each opening and each flared portion.
1. A method of forming semiconductor memory device, comprising:
forming a sacrificial layer on a substrate;
forming a stacked structure on the sacrificial layer, the stacked structure comprising at least one oxide material layer and at least one nitride material layer stacked alternately on the sacrificial layer;
forming a mask layer on the stacked structure;
patterning the stacked structure through the mask layer, to form a plurality of openings in the stacked structure to expose a portion of the sacrificial layer;
removing the mask layer and the portion of the sacrificial layer;
after forming an electrode layer on surfaces of each openings, completely removing the at least one oxide material layer in the stacked structure; and
completely removing the sacrificial layer.
2. The method of forming semiconductor memory device according to claim 1 , wherein the sacrificial layer is completely removed by performing an anisotropic wet etching process.
3. The method of forming semiconductor memory device according to claim 2 , wherein the anisotropic wet etching process is performed by providing tetramethylammonium hydroxide to remove the sacrificial layer.
4. The method of forming semiconductor memory device according to claim 3 , wherein a weight percentage of tetramethylammonium hydroxide is about 1% to 10%.
5. The method of forming semiconductor memory device according to claim 1 , further comprising:
forming a plurality plugs in the substrate, before forming the sacrificial layer, wherein the plugs are exposed from the openings, after removing the portion of the sacrificial layer.
6. The method of forming semiconductor memory device according to claim 5 , further comprising:
forming another nitride material layer on the plugs before forming the sacrificial layer.
7. The method of forming semiconductor memory device according to claim 6 , wherein a thickness of the sacrificial layer is about 3-5 times greater than a thickness of the another nitride layer.
8. The method of forming semiconductor memory device according to claim 6 , wherein a thickness of the stacked structure is about 1600-2000 angstroms.
9. The method of forming semiconductor memory device according to claim 5 , wherein the electrode layer directly contacts the plugs.
10. The method of forming semiconductor memory device according to claim 1 , after removing the portion of the sacrificial layer, further comprising:
performing a lateral etching process to form a plurality of expanding portions in the sacrificial layer, wherein each of the expanding portions is in connection with each of the openings, and the electrode layer is also formed on surfaces of the expanding portions.
11. The method of forming semiconductor memory device according to claim 10 , the electrode layer formed on the surface of each expanding portion also forms a corresponding expanding portion.
12. The method of forming semiconductor memory device according to claim 1 , wherein the sacrificial layer has an etching selectivity related to materials of the stacked structure.
13. The method of forming semiconductor memory device according to claim 1 , wherein the at least one oxide material layer in the stacked structure is completely removed by performing a wet etching process.