Bonding head and method for bonding semiconductor package, and semiconductor package

1. A method for bonding a semiconductor package, the method comprising:

loading a semiconductor chip on a substrate; and

bonding the semiconductor chip to the substrate by using a bonding tool, the bonding tool including:

a pressing surface for pressing the semiconductor chip,

a top surface spaced apart from the pressing surface, and

an inclined surface extending from one side of the pressing surface to connect the pressing surface to the top surface,

wherein bonding the semiconductor chip to the substrate includes deforming a bonding agent disposed between the substrate and the semiconductor chip by pressing the bonding tool, and

wherein deforming the bonding agent includes generating a fillet by protruding a portion of the bonding agent beyond the semiconductor chip, and growing the fillet in such a way that a top surface of the fillet is grown in an extending direction of the inclined surface.

2. The method as claimed in claim 1 , wherein the inclined surface is provided in plurality.

3. The method as claimed in claim 1 , wherein bonding the semiconductor chip to the substrate further includes hardening the deformed bonding agent.

4. The method as claimed in claim 3 , further comprising removing the bonding tool after hardening the deformed bonding agent.

5. The method as claimed in claim 3 , wherein hardening the deformed bonding agent includes heating the deformed bonding agent by the bonding tool.

6. The method as claimed in claim 1 , wherein an area of the pressing surface is equal to or greater than an area of a chip top surface of the semiconductor chip.

7. The method as claimed in claim 1 , wherein the bonding agent includes at least one of a non-conductive film (NCF), non-conductive paste (NCP), an anisotropic conductive film, or anisotropic conductive paste.

8. A bonding head for a semiconductor package, the bonding head comprising:

a bonding tool to bond a semiconductor package,

wherein the bonding tool includes:

a pressing surface to press a semiconductor chip,

a top surface spaced apart from the pressing surface, and

an inclined surface connecting the pressing surface to the top surface, the inclined surface extending from the pressing surface to guide a growing direction of a fillet.

9. The bonding head as claimed in claim 8 , further comprising a supporter coupled to the bonding tool.

10. The bonding head as claimed in claim 9 , wherein the bonding tool and the supporter are detachably coupled to each other.

11. The bonding head as claimed in claim 10 , wherein the supporter includes a through-hole.

12. The bonding head as claimed in claim 9 , wherein the bonding tool and the supporter include a same material.

13. The bonding head as claimed in claim 8 , wherein the inclined surface is provided in plurality.

14. The bonding head as claimed in claim 8 , wherein the bonding tool includes an adsorption hole.

15. The bonding head as claimed in claim 8 , further comprising a protective sheet protecting the pressing surface and the inclined surface.

16. The bonding head as claimed in claim 8 , wherein a width of the top surface is larger than a width of the pressing surface along a horizontal direction parallel to the pressing surface.

17. The bonding head as claimed in claim 16 , further comprising a supporter coupled to the top surface, a width of the supporter being larger than the width of the pressing surface along the horizontal direction parallel to the pressing surface.

18. The bonding head as claimed in claim 8 , wherein an angle between the inclined surface and the pressing surface is a constant obtuse angle.

19. The bonding head as claimed in claim 8 , wherein the bonding tool includes metal.