Semiconductor device including a plurality of electrodes and supporters
A semiconductor device includes a plurality of electrode structures formed on a substrate; and an upper supporter group and a lower supporter between upper ends and lower ends of the plurality of electrode structures The upper supporter group includes a plurality of supporters, and at least some of the plurality of supporters each have an upper surface and a lower surface. One of the upper surface and the lower surface has a curved profile, and the other surface has a flat profile.
1. A semiconductor device comprising:
a plurality of electrode structures on a substrate; and
a first supporter and a second supporter between upper ends and lower ends of the plurality of electrode structures, respectively, the first supporter having a first upper surface and a first lower surface, the first supporter having a first thickness between the first upper surface and the first lower surface,
wherein one of the first upper surface and first lower surface has a curved profile, and the other of the first upper surface and first lower surface has a flat profile,
the first supporter has the first thickness that decreases towards the plurality of electrode structures, and
a side surface of a portion of each of the plurality of electrode structures under the first supporter extends in vertical direction toward the substrate.
2. The semiconductor device of claim 1 , wherein the second supporter is closer to the substrate than the first supporter.
3. The semiconductor device of claim 1 , wherein the first supporter is separated from the second supporter.
4. The semiconductor device of claim 1 , wherein a thickness of the second supporter is less than a thickness of the first supporter.
5. The semiconductor device of claim 1 , wherein the first supporters has an opening.
6. The semiconductor device of claim 1 , wherein the second supporter includes an opening.
7. The semiconductor device of claim 1 , wherein the first upper surface has a curved profile, and the first lower surface has a flat profile.
8. The semiconductor device of claim 1 , wherein upper end portions of the plurality of electrode structures protrude more than the first upper surface of the first supporter.
9. The semiconductor device of claim 1 , wherein the second supporter has an second upper surface and a second lower surface, the second supporter having a second thickness between the second upper surface and the second lower surface,
wherein one of the second upper surface and the second lower surface has a flat profile, and the other of the second upper surface and the second lower surface has a curved profile.
10. The semiconductor device of claim 9 , wherein the second supporter has the second thickness that decreases towards the plurality of electrode structures.
11. The semiconductor device of claim 9 , wherein the first lower surface and the second upper surface have flat profile.
12. A semiconductor device comprising:
a plurality of electrode structures on a substrate;
a first supporter, and a second supporter separated from the other between upper ends and lower ends of the plurality of electrode structures;
a dielectric layer on the plurality of electrode structures; and
an upper electrode on the dielectric layer,
wherein an upper surface of the first supporter have curved profiles, and a lower surface of the first supporter have relatively flat profiles as compared with the upper surface of the first supporter,
the first supporter has a first thickness from the upper surface of the first supporter to the lower surface of the first supporter, the first thickness decreases towards the plurality of electrode structures,
the second supporter is at lower level than an intermediate portion of each of the plurality of electrode structures, and
a side surface of a portion of each of the plurality of electrode structures under the first supporter have no bowing effect.
13. The semiconductor device of claim 12 , wherein the upper surface of the first supporter has a convex profile.
14. The semiconductor device of claim 12 , wherein the first supporter and the second supporter include a substantially similar material.
15. The semiconductor device of claim 12 , further comprising a wherein
a third supporter between the first supporter and the second supporter, and
a distance between the first supporter and the third supporter is less than a distance between the second supporter and the third supporter.
16. The semiconductor device of claim 15 , wherein a thickness of the second supporter is less than a thickness of each of the first supporter and the third supporter.
17. The semiconductor device of claim 12 , wherein upper end portions of the plurality of electrode structures protrude more than the upper surface of the first supporter.
18. A semiconductor device comprising:
a substrate;
an electrode perpendicular to the substrate;
a first supporter having a top surface and a bottom surface, the bottom surface of the first supporter being substantially parallel to the substrate such that the bottom surface of the first supporter is connected substantially at right angles to the electrode, the top surface having a different profile from the bottom surface; and
a second supporter being closer to the substrate than the first supporter, wherein the first supporter have a thickness that decreases towards the electrode, and
the first supporter includes silicon carbon nitride,
wherein a side surface of a portion of each of a plurality of electrode structures which is adjacent to the bottom surface of the first supporter under the first supporter extends in vertical direction toward the substrate.
19. The semiconductor device of claim 18 , wherein a percentage of carbon in the silicon carbon nitride is between 0.1 atom % to 15 atom %.
20. The semiconductor device of claim 18 , wherein upper end portion of the electrode protrude more than the top surface of the first supporter.