Apparatus and methods for alignment of a susceptor
The embodiments described herein generally relate to a stem assembly for coupling a susceptor to a process chamber. The stem assembly includes a pivot mechanism, a first flexible seal coupled to the pivot mechanism, a second flexible seal coupled to a plate on a first side of the plate, the plate having a second side coupled to the first flexible seal, a housing coupled to the second flexible seal, and a motion assembly adapted to move the housing in an X axis and a Y axis, and position the susceptor angularly relative to an X-Y plane of the process chamber.
1. A thermal processing chamber comprising:
a chamber body;
a base ring coupled to the chamber body;
a susceptor positioned between an upper dome and a lower dome, the chamber body surrounding the lower dome, wherein the lower dome is rigidly fixed to the base ring and comprises a pivot mechanism coupled to the chamber body;
a stem coupled to the susceptor; and
a motion assembly coupled to the stem outside of the lower dome, the motion assembly comprising a lateral adjustment device and a tilt adjustment mechanism, both adapted to position a major surface of the susceptor in plane that is parallel to an X-Y plane of the chamber and position the stem along a longitudinal axis of the chamber, and the motion assembly comprises a rotary stage to rotate the susceptor, wherein the pivot mechanism is configured to provide angular movement of the motion assembly relative to the lower dome.
2. The chamber of claim 1 , wherein the motion assembly comprises at least two flexible seals.
3. The chamber of claim 2 , wherein one of the at least two flexible seals is substantially limited to movement in an X axis or a Y axis.
4. The chamber of claim 2 , wherein one of the at least two flexible seals is substantially limited to movement along the longitudinal axis of the chamber.
5. The chamber of claim 2 , wherein the lateral adjustment device comprises an X adjustment plate and a Y adjustment plate that are coupled to adjacent sides of a base plate disposed adjacent to one of the at least two flexible seals.
6. The chamber of claim 5 , wherein each of the X adjustment plate and the Y adjustment plate comprises a set screw that is coupled to a housing coupled to the stem.
7. The chamber of claim 1 , wherein the motion assembly further comprises a vertical actuator having a base disposed in a plane that is substantially normal to the longitudinal axis, and a bracket disposed in a plane that is substantially normal to the plane of the base.
8. The chamber of claim 7 , wherein the tilt adjustment mechanism pushes or pulls on the bracket to adjust an angular orientation of the stem.
9. The chamber of claim 1 , wherein the motion assembly is coupled to the lower dome.
10. The chamber of claim 1 , wherein the pivot mechanism comprises a dynamic seal coupled between an outer housing and an inner portion of the lower dome.
11. A thermal processing chamber comprising:
a chamber body;
a base ring coupled to the chamber body;
a susceptor positioned between an upper dome and a lower dome, the lower dome rigidly fixed to the base ring, wherein the lower dome is positioned within the chamber body, and the lower dome comprises a pivot mechanism coupled to the chamber body;
a stem coupled to the susceptor, the stem extending at least partially through the pivot mechanism; and
a motion assembly coupled to the stem outside of the lower dome, the motion assembly comprising:
a rotary stage coupled to a tube that receives a portion of the stem; and
a lateral adjustment device and a tilt adjustment mechanism, both adapted to position a major surface of the susceptor in plane that is parallel to an X-Y plane of the chamber and position the stem along a longitudinal axis of the chamber, wherein the motion assembly comprises at least two flexible seals, and wherein the lateral adjustment device comprises an X adjustment plate and a Y adjustment plate that are coupled to adjacent sides of a base plate disposed adjacent to one of the at least two flexible seals.
12. The chamber of claim 11 , wherein each of the X adjustment plate and the Y adjustment plate comprises a set screw that is coupled to a housing coupled to the stem.
13. The chamber of claim 11 , wherein the motion assembly further comprises a vertical actuator having a base disposed in a plane that is substantially normal to the longitudinal axis, and a bracket disposed in a plane that is substantially normal to the plane of the base.
14. The chamber of claim 13 , wherein the tilt adjustment mechanism pushes or pulls on the bracket to adjust an angular orientation of the stem.
15. The chamber of claim 11 , wherein the motion assembly is coupled to the lower dome.
16. The chamber of claim 15 , wherein the pivot mechanism comprises a housing and a dynamic seal disposed between the lower dome and the housing.