Three-dimensional semiconductor memory devices and methods of fabricating the same
Disclosed are three-dimensional semiconductor memory devices and methods of fabricating the same. The method includes sequentially forming a sacrificial pattern and a source conductive layer on a substrate, forming a mold structure including a plurality of insulating layers and a plurality of sacrificial layers on the source conductive layer; forming a plurality of vertical structures that penetrate the mold structure, forming a trench that penetrates the mold structure, forming a sacrificial spacer on a sidewall of the trench, removing the sacrificial pattern to form a horizontal recess region; removing the sacrificial spacer, and forming a source conductive pattern that fills the horizontal recess region.
1. A method of fabricating a three-dimensional semiconductor memory device comprising:
sequentially forming a sacrificial pattern and a source conductive layer on a substrate;
forming a mold structure comprising a plurality of insulating layers and a plurality of sacrificial layers on the source conductive layer;
forming a plurality of vertical structures that penetrate the mold structure;
forming a trench that penetrates the mold structure;
forming a sacrificial spacer on a sidewall of the trench;
removing the sacrificial pattern to form a horizontal recess region;
removing the sacrificial spacer; and
forming a source conductive pattern that fills the horizontal recess region,
wherein forming the source conductive pattern further comprises forming a sidewall conductive layer in the trench and the horizontal recess region, and performing an isotropic etching process on the sidewall conductive layer.
2. The method of claim 1 , wherein the sacrificial spacer comprises amorphous silicon.
3. The method of claim 1 , wherein removing the sacrificial spacer comprises performing a dry etching process using HBr, Cl 2 , or HCl.
4. The method of claim 1 , wherein removing the sacrificial spacer comprises exposing sidewalls of the plurality of insulating layers and sidewalls of the plurality of sacrificial layers.
5. The method of claim 1 , wherein each of the plurality of vertical structures comprises a vertical semiconductor pattern and a data storage layer surrounding the vertical semiconductor pattern,
wherein the method further comprises removing a portion of the data storage layer exposed to the horizontal recess region to expose a sidewall of the vertical semiconductor pattern before removing the sacrificial spacer.
6. The method of claim 5 , wherein removing the sacrificial spacer comprises forming a recess region on the sidewall of the vertical semiconductor pattern.
7. A method of fabricating a three-dimensional semiconductor memory device comprising:
sequentially forming a sacrificial pattern and a source conductive layer on a substrate;
forming a mold structure comprising a plurality of insulating layers and a plurality of sacrificial layers on the source conductive layer;
forming a plurality of vertical structures that penetrate the mold structure;
forming a trench that penetrates the mold structure;
forming a sacrificial spacer on a sidewall of the trench;
removing the sacrificial pattern to form a horizontal recess region;
removing the sacrificial spacer; and
forming a source conductive pattern that fills the horizontal recess region,
wherein each of the vertical structures comprises a vertical semiconductor pattern and a data storage layer surrounding the vertical semiconductor pattern,
wherein the method further comprises removing a portion of the data storage layer exposed to the horizontal recess region to expose a sidewall of the vertical semiconductor pattern before removing the sacrificial spacer, and
wherein removing the portion of the data storage layer forms an undercut region where the horizontal recess region extends along the sidewall of the vertical semiconductor pattern, the undercut region extending between the sidewall of the vertical semiconductor pattern and a sidewall of the source conductive layer.
8. The method of claim 1 , further comprising performing a surface treatment process, after removing the sacrificial spacer and before forming the sidewall conductive layer.
9. The method of claim 8 , wherein the surface treatment process is performed using amine-containing silane as a source.
10. The method of claim 8 , wherein the surface treatment process and forming the sidewall conductive layer are performed in-situ in the same process chamber.
11. A method of fabricating a three-dimensional semiconductor memory device comprising:
sequentially forming a sacrificial pattern and a source conductive layer on a substrate;
forming a mold structure comprising a plurality of insulating layers and a plurality of sacrificial layers on the source conductive layer;
forming a plurality of vertical structures comprising a vertical semiconductor pattern and a data storage layer that penetrate the mold structure;
forming a trench that penetrates the mold structure;
forming a sacrificial spacer on a sidewall of the trench;
removing the sacrificial pattern to form a horizontal recess region;
removing a portion of the data storage layer exposed to the horizontal recess region to expose a sidewall of the vertical semiconductor pattern;
selectively removing the sacrificial spacer;
performing a surface treatment process after removing the sacrificial spacer; and
forming a source conductive pattern that fills the horizontal recess region,
wherein sequentially forming the sacrificial pattern and the source conductive layer on the substrate comprises forming an opening in the sacrificial pattern, and forming the source conductive layer to fill the opening.
12. The method of claim 11 , wherein the surface treatment process is performed using amine-containing silane as a source.