IP Library Granted Patent US 10,903,293
Granted Patent B2
US 10,903,293 · App. 16/293,908 · Granted Jan 26, 2021

Method of manufacturing display panel and display apparatus including the display panel

Inventors: Yu-Gwang Jeong (Anyang-si, KR); Taewook Kang (Seongnam-si, KR); Wooyong Sung (Seoul, KR)
Assignee: SAMSUNG DISPLAY CO., LTD
H01L27/3258H01L27/323H01L51/0096H01L51/5012H01L51/5256H01L51/56H01L2227/323
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Quick Facts
Patent No.
US 10,903,293
App. No.
16/293,908
Granted
Jan 26, 2021
Kind
B2
Abstract

A method of manufacturing a display panel includes providing an insulating substrate that includes a hole area, a display area that surrounds the hole area, and a peripheral area adjacent to the display area, forming a semiconductor pattern in the display area, forming an insulating layer, forming contact holes in the insulating layer that expose portions of the semiconductor pattern, and forming a module hole by etching a portion of the insulating layer and a portion of the insulating substrate that overlap the hole area.

Claims (39)

1. A method of manufacturing a display panel, the method comprising the steps of:

providing an insulating substrate that includes a hole area, a display area surrounding the hole area, and a peripheral area adjacent to the display area;

forming a semiconductor pattern in the display area:

forming an insulating layer that overlaps with the hole area and the display area on the semiconductor pattern;

forming contact holes in the insulating layer that expose portions of the semiconductor pattern;

forming electrodes in the contact holes that connect to the semiconductor pattern through the contact holes; and

forming a module hole by etching a portion of the insulating layer and a portion of the insulating substrate that overlap the hole area, wherein forming the module hole includes forming a first hole by removing the portion of the insulating layer that overlaps the hole area, and forming a second hole by removing a portion of the insulating substrate that overlaps with the first hole;

wherein forming the electrodes comprises:

forming a conductive layer that fills the contact holes and the first hole; and

etching the conductive layer to form the electrodes,

wherein forming the second hole is performed simultaneously with etching the conductive layer.

2. The method of claim 1 , wherein forming the module hole further comprises:

forming an undercut in the second hole.

3. The method of claim 2 , wherein forming the electrodes further comprises:

forming photoresist patterns on the conductive layer before etching the conductive layer;

and

removing the photoresist patterns after etching the conductive layer.

4. The method of claim 3 , wherein forming the undercut and removing the photoresist patterns are performed at the same time.

5. The method of claim 3 , wherein the photoresist patterns are removed by oxygen plasma.

6. The method of claim 1 , wherein the first hole is simultaneously formed with the contact holes.

7. The method of claim 1 , further comprising:

forming an organic layer after forming the electrodes; and

forming an inorganic film in the display area after forming the organic layer,

wherein the inorganic film extends from the display area into the hole area and covers an inner surface of the module hole.

8. The method of claim 7 , wherein an end of the organic layer is a boundary of the module hole.

9. The method of claim 7 , wherein the organic layer is formed by an evaporation process.

10. The method of claim 7 , wherein the inorganic film is formed by a deposition process.

11. The method of claim 7 , wherein the inorganic film is inorganic thin film encapsulation layer.

12. A method of manufacturing a display panel, the method comprising the steps of:

providing an insulating substrate that includes a hole area, a display area surrounding the hole area, and a peripheral area adjacent to the display area;

forming a semiconductor pattern in the display area;

forming an insulating layer that overlaps with the hole area and the display area on the semiconductor pattern;

forming contact holes in the insulating layer that expose portions of the semiconductor patter;

forming electrodes in the contact holes that connect to the semiconductor pattern through the contact holes;

forming a module hole by etching a portion of the insulating layer and a portion of the insulating substrate that overlap the hole area, and

forming a blocking recess in the hole area,

wherein the blocking recess is spaced apart from the module hole and surrounds at least a portion of the module hole,

wherein the blocking recess comprising a hole portion formed by penetrating the insulating layer, and a recessed portion formed by eliminating a portion of the insulating substrate, and

wherein a depth of the recessed portion is less than a thickness of the insulating substrate.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 6, 2019
From: JEONG, YU-GWANG; KANG, TAEWOOK; SUNG, WOOYONG
To: SAMSUNG DISPLAY CO., LTD.
Reel/Frame 048515/0481 →
Priority Claims (1)
KR 10-2018-0028923 · Mar 13, 2018 · national
Continuity (1)
Related Publication 20190288047A1 · Sep 19, 2019
Cited By (4)
US 12,219,797 US 12,302,697 US 12,364,145 US 12,446,435