IP Library Granted Patent US 10,910,421
Granted Patent B2
US 10,910,421 · App. 15/957,520 · Granted Feb 2, 2021

Molded image sensor chip scale packages and related methods

Inventor: Weng-Jin Wu (Hsinchu, TW)
Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
H01L27/14618H01L23/3114H01L27/14636H01L27/14685H01L27/14687H01L27/14698H01L2224/11
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Quick Facts
Patent No.
US 10,910,421
App. No.
15/957,520
Granted
Feb 2, 2021
Kind
B2
Abstract

Implementations of a molded image sensor chip scale package may include an image sensor having a first side and a second side. A first cavity wall and a second cavity wall may be coupled to the first side of the image sensor and extend therefrom. The first cavity wall and the second cavity wall may form a cavity over the image sensor. A transparent layer may be coupled to the first cavity wall and the second cavity wall. A redistribution layer (RDL) may be coupled to the second side of the image sensor. At least one interconnect may be directly coupled to the RDL. A mold material may encapsulate a portion of the RDL, a portion of the image sensor, and a side of each cavity wall, and a portion of the transparent layer.

Claims (43)

1. A chip scale package comprising:

an image sensor comprising a first side and a second side;

a first cavity wall and a second cavity wall coupled to the first side of the image sensor and extending therefrom, wherein the first cavity wall and the second cavity wall form a cavity over the image sensor;

one or more grooves comprised in a perimeter of the image sensor;

a transparent layer coupled to the first cavity wall and to the second cavity wall;

a redistribution layer (RDL) coupled to the second side of the image sensor;

at least one interconnect directly coupled to the RDL; and

a mold material, wherein the mold material encapsulates a portion of the RDL, a portion of the image sensor, a side of each cavity wall, and a portion of the transparent layer; and

wherein the mold material extends into the one or more grooves comprised in the perimeter of the image sensor.

2. The package of claim 1 , wherein the mold material extends along a portion of the RDL, a side of each cavity wall, and a portion of the transparent layer.

3. The package of claim 1 , wherein the mold material forms a layer parallel with the image sensor and extends along a portion of the RDL, a side of each cavity wall, and a portion of the transparent layer in a direction perpendicular to the image sensor.

4. The package of claim 1 , wherein the mold material extends into a groove formed in the transparent layer.

5. The package of claim 1 , wherein the interconnect is one of a solder ball, a pillar, a copper ball, a gold ball, and any combination thereof.

6. The package of claim 1 , wherein the mold material is a laminatable molding material.

7. The package of claim 1 , wherein the RDL extends into the one or more grooves comprised in the image sensor.

8. A chip scale package comprising:

an image sensor comprising a first side and a second side;

a first cavity wall and a second cavity wall coupled to the first side of the image sensor and extending therefrom, wherein the first cavity wall and the second cavity wall form a cavity over the image sensor;

one or more grooves comprised in a perimeter of the image sensor;

a transparent layer coupled to the first cavity wall and to the second cavity wall;

a redistribution layer (RDL) coupled to the second side of the image sensor, the RDL extending into the one or more grooves;

at least one interconnect directly coupled to the RDL; and

a mold material, wherein the mold material encapsulates a portion of the RDL, a portion of the image sensor, a side of each cavity wall, and a portion of the transparent layer; and

wherein the mold material extends into the one or more grooves comprised in the perimeter of the image sensor.

9. The package of claim 8 , wherein the mold material extends along a portion of the RDL, a side of each cavity wall, and a portion of the transparent layer.

10. The package of claim 8 , wherein the mold material forms a layer parallel with the image sensor and extends along a portion of the RDL, a side of each cavity wall, and a portion of the transparent layer in a direction perpendicular to the image sensor.

11. The package of claim 8 , wherein the mold material extends into a groove formed in the transparent layer.

12. The package of claim 8 , wherein the interconnect is one of a solder ball, a pillar, a copper ball, a gold ball, and any combination thereof.

13. The package of claim 8 , wherein the mold material is a laminatable molding material.

14. A chip scale package comprising:

an image sensor comprising a first side and a second side;

a first cavity wall and a second cavity wall coupled to the first side of the image sensor and extending therefrom, wherein the first cavity wall and the second cavity wall form a cavity over the image sensor;

one or more grooves comprised in a perimeter of the image sensor;

a transparent layer coupled to the first cavity wall and to the second cavity wall;

a redistribution layer (RDL) coupled to the second side of the image sensor, wherein the RDL extends into the one or more grooves and the RDL extends around the first side of the image sensor;

at least one interconnect directly coupled to the RDL; and

a mold material, wherein the mold material encapsulates a portion of the RDL, a portion of the image sensor, a side of each cavity wall, and a portion of the transparent layer; and

wherein the mold material extends into the one or more grooves comprised in the perimeter of the image sensor.

15. The package of claim 14 , wherein the mold material extends along a portion of the RDL, a side of each cavity wall, and a portion of the transparent layer.

16. The package of claim 14 , wherein the mold material forms a layer parallel with the image sensor and extends along a portion of the RDL, a side of each cavity wall, and a portion of the transparent layer in a direction perpendicular to the image sensor.

17. The package of claim 14 , wherein the mold material extends into a groove formed in the transparent layer.

18. The package of claim 14 , wherein the interconnect is one of a solder ball, a pillar, a copper ball, a gold ball, and any combination thereof.

19. The package of claim 14 , wherein the mold material is a laminatable molding material.

Assignments (3)
RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT REEL 047864, FRAME 0611 Recorded Jun 23, 2023
From: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION
Reel/Frame 064077/0298 →
PATENT SECURITY AGREEMENT Recorded Oct 16, 2018
From: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
Reel/Frame 047864/0611 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 19, 2018
From: WU, WENG-JIN
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 045592/0093 →
Continuity (2)
Continuation 15405519 · Jan 13, 2017
Related Publication 20180240828A1 · Aug 23, 2018