Substrate, method of sawing substrate, and semiconductor device
A method of dividing a substrate includes preparing a substrate including a crystalline semiconductor layer having a scribe lane region and device regions, a dielectric layer on the crystalline semiconductor layer, and a partition structure in physical contact with the dielectric layer and provided on the scribe lane region of the crystalline semiconductor layer, forming an amorphous region in the crystalline semiconductor layer, and performing a grinding process on the crystalline semiconductor layer after the forming of the amorphous region. The amorphous region is formed in the scribe lane region of the crystalline semiconductor layer.
1. A semiconductor device comprising:
a crystalline semiconductor substrate;
an amorphous region in the crystalline semiconductor substrate and exposed at an outer sidewall of the crystalline semiconductor substrate;
a dielectric layer on the crystalline semiconductor substrate;
a partition structure provided in the dielectric layer; and
a protective layer provided on the dielectric layer,
wherein the partition structure is connected to the protective layer and includes the same material as the protective layer,
wherein the dielectric layer exposes at least a portion of an outer sidewall of the partition structure, and
wherein the exposed outer sidewall of the partition structure and the outer sidewall of the crystalline semiconductor substrate are out of alignment.
2. The semiconductor device of claim 1 , wherein the protective layer comprises a material different from that of the dielectric layer.
3. The semiconductor device of claim 1 , wherein the partition structure is in physical contact with the dielectric layer and having a different strength from the dielectric layer.
4. The semiconductor device of claim 1 , wherein an outer side surface of the amorphous region and the outer sidewall of the partition structure are exposed to an external space.
5. The semiconductor device of claim 4 , wherein the outer sidewall of the crystalline semiconductor substrate and an outer sidewall of the dielectric layer are exposed to the external space.
6. The semiconductor device of claim 1 , wherein the partition structure is provided in a trench formed in the dielectric layer.
7. The semiconductor device of claim 1 , wherein the amorphous region comprised a plurality of amorphous regions, and
wherein the plurality of amorphous regions are provided at different distances from a bottom surface of the crystalline semiconductor substrate.
8. The semiconductor device of claim 1 , wherein the partition structure includes a partition via and a partition pattern, and
wherein the partition via and the partition pattern include a metal.
9. A semiconductor device comprising:
a crystalline semiconductor substrate;
an amorphous region exposed at an outer sidewall of the crystalline semiconductor substrate;
a dielectric layer on an upper surface of the crystalline semiconductor substrate;
a partition structure provided in the dielectric layer; and
a protective layer provided on an upper surface of the dielectric layer,
wherein the dielectric layer exposes at least a portion of an outer sidewall of the partition structure,
wherein the protective layer comprises a material different from that of the dielectric layer,
wherein the protective layer includes a plurality of protective layers, and
wherein the partition structure includes a same material as one of the plurality of protective layers and is connected to the one of the plurality of protective layers.
10. The semiconductor device of claim 9 , wherein the outer sidewall of the partition structure is not aligned with the outer sidewall of the crystalline semiconductor substrate.
11. The semiconductor device of claim 9 , wherein a strength of the protective layer is greater than a strength of the dielectric layer.
12. The semiconductor device of claim 9 , wherein the partition structure is provided in a trench formed in the dielectric layer.
13. A semiconductor device comprising:
a crystalline semiconductor substrate;
an amorphous region in the crystalline semiconductor substrate;
a dielectric layer on the crystalline semiconductor substrate;
a partition structure provided in the dielectric layer; and
a protective layer provided on the dielectric layer and comprising a material different from that of the dielectric layer;
wherein the partition structure has an outer sidewall exposed at an outer sidewall of the dielectric layer,
wherein the outer sidewall of the partition structure and an outer sidewall of the crystalline semiconductor substrate are out of alignment,
wherein the protective layer is in physical contact with the partition structure.
14. The semiconductor device of claim 13 , wherein the amorphous region has an outer surface exposed at the outer sidewall of the crystalline semiconductor substrate.
15. The semiconductor device of claim 13 , wherein the protective layer comprises at least one of tetraethyl orthosilicate, silicon nitride, and a high-density plasma oxide.
16. The semiconductor device of claim 13 , wherein the protective layer has a different shear strength from that of the dielectric layer.
17. The semiconductor device of claim 13 , wherein the partition structure is in physical contact with the dielectric layer.
18. The semiconductor device of claim 13 , wherein the partition structure includes a partition via and a partition pattern, and
wherein the partition via and the partition pattern include a metal.
19. The semiconductor device of claim 13 , wherein the partition structure has an upper surface, wherein the upper surface of the partition structure is covered by the protective layer.