Semiconductor device including a field effect transistor

1. A semiconductor device comprising:

a substrate including a plurality of fins;

a plurality of gate electrodes intersecting the plurality of fins;

an active contact electrically connected to the plurality of fins;

a plurality of vias including a first via, a second via and a third via; and

a plurality of interconnection lines on the plurality of vias,

wherein the plurality of interconnection lines include a first interconnection line on both the first via and the second via, and a second interconnection line on the third via,

wherein the first interconnection line is electrically connected to the active contact through the first via, and

wherein the second and third vias are disconnected to the active contact and the plurality of gate electrodes.

2. The semiconductor device of claim 1 , wherein the third via vertically overlaps a first gate electrode of the plurality of gate electrodes.

3. The semiconductor device of claim 1 , further comprising a gate contact electrically connected to a second gate electrode of the plurality of gate electrodes,

wherein third via is spaced apart from the second and third gate electrodes with an interlayer insulating layer interposed therebetween.

4. The semiconductor device of claim 1 , wherein a width of the third via is greater than a width of the second via.

5. The semiconductor device of claim 1 , wherein the plurality of fins and at least one of the plurality of gate electrodes constitute a high-voltage transistor.

6. The semiconductor device of claim 1 , further comprising an interlayer insulating layer on the active contact and the plurality of gate electrodes,

wherein the plurality of vias are disposed on the interlayer insulating layer, and

wherein a top surface of the interlayer insulating layer covers bottom surfaces of the second and third vias.

7. The semiconductor device of claim 1 , further comprising a connection structure between the active contact and the first via.

8. The semiconductor device of claim 1 , wherein the first interconnection line has an extension extending in a direction parallel with an extending direction of the gate electrodes, and

wherein the second via is disposed under the extension.

9. The semiconductor device of claim 1 , wherein the first via is a regular via, and

wherein each of the second and third vias is a dummy via.

10. The semiconductor device of claim 1 , wherein the plurality of fins includes:

a first fin on a PMOSFET region; and

a second fin on an NMOSFET region,

wherein the first and second fins each extend in a first direction, and

wherein each of the plurality of gate electrodes extend in a second direction intersecting the first direction.

11. A semiconductor device including a standard cell, the semiconductor device comprising:

a substrate;

a plurality of FinFETs on the substrate, the plurality of FinFETs constitute a logic circuit of the standard cell;

an interlayer insulating layer on the plurality of FinFETs,

a plurality of vias on the interlayer insulating layer, the plurality of vias including a first via, a second via and a third via; and

a plurality of interconnection lines on the plurality of vias,

wherein the plurality of interconnection lines comprise a first interconnection line on both the first via and the second via, and a second interconnection line on the third via,

wherein the first interconnection line is electrically connected to at least one of the plurality of FinFETs through the first via, and

wherein the second and third vias are disconnected to the plurality of FinFETs.

12. The semiconductor device of claim 11 , wherein the third via vertically overlaps a gate electrode of at least one of the plurality of FinFETs.

13. The semiconductor device of claim 12 , wherein a width of the third via is greater than a width of the second via.

14. The semiconductor device of claim 11 , wherein the plurality of vias further includes a fourth via disposed under the second interconnection line,

wherein the second interconnection line is electrically connected to at least one of the plurality of FinFETs through the fourth via.

15. The semiconductor device of claim 11 , wherein the first via is a regular via, and

wherein each of the second and third vias is a dummy via.

16. A semiconductor device comprising:

a substrate;

a substrate including a plurality of fins;

a plurality of gate electrodes intersecting the plurality of fins;

a first interlayer insulating layer on the plurality of gate electrodes;

a second interlayer insulating layer on the first interlayer insulating layer;

a third interlayer insulating layer on the second interlayer insulating layer;

a connection structure in the first interlayer insulating layer;

a plurality of vias in the second interlayer insulating layer, the plurality of vias including a first via, a second via and a third via; and

an interconnection line in the third interlayer insulating layer,

wherein the first via is disposed between the interconnection line and the connection structure and electrically connects the interconnection line to the connection structure, and

wherein the second and third vias are spaced apart from the connection structure, such that a top surface of the first interlayer insulating layer covers bottom surfaces of the second and third vias.

17. The semiconductor device of claim 16 , wherein the third via vertically overlaps at least one of the plurality of gate electrodes.

18. The semiconductor device of claim 17 , wherein a width of the third via is greater than a width of the second via.

19. The semiconductor device of claim 17 , wherein the plurality of fins and the at least one of the plurality of gate electrodes constitute a high-voltage transistor.

20. The semiconductor device of claim 16 , wherein the first via is a regular via, and wherein each of the second and third vias is a dummy via.