Backplane substrate including in-cell type touch panel, liquid crystal display device using the same, and method of manufacturing the same
The present invention is for a backplane substrate including an in-cell type touch panel advantageous to reducing the number of masks and the number of processes, a liquid crystal display device including the same, and a method of manufacturing the same, includes a plurality of interlayer dielectric layers disposed above a drain electrode of a thin film transistor are simultaneously patterned after forming a sensing line and a common electrode.
1. A backplane substrate including an in-cell type touch panel, comprising:
a substrate comprising a plurality of pixels in a matrix;
a thin film transistor at each pixel of the substrate;
a first interlayer dielectric layer covering the thin film transistor;
a plurality of sensing lines on the first interlayer dielectric layer;
a second interlayer dielectric layer covering the sensing lines, the second interlayer dielectric layer being disposed on the first interlayer dielectric layer;
a common electrode on the second interlayer dielectric layer;
a third interlayer dielectric layer covering the common electrode;
a pixel electrode on the third interlayer dielectric layer, pixel electrode being connected to the thin film transistor at each pixel through a first interlayer contact hole continuously passing through the third interlayer dielectric layer, the second interlayer dielectric layer, and the first interlayer dielectric layer;
a second interlayer contact hole passing through the third interlayer dielectric layer and the second interlayer dielectric layer to expose one of the plurality of sensing lines; and
a connection pattern to connect the one of the plurality of sensing lines and the common electrode through the second interlayer contact hole,
wherein the pixel electrode and the connection pattern are formed of a same layer and are separated from each other.
2. The backplane substrate including the in-cell type touch panel of claim 1 , wherein the common electrode is used as an electrode for sensing touch.
3. The backplane substrate including the in-cell type touch panel of claim 1 , wherein:
an electrical signal is applied from the one of the sensing lines to the common electrode of each block covering some pixels of the plurality of pixels; and
a touch driver receives signals applied to the common electrode.
4. The backplane substrate including the in-cell type touch panel of claim 1 , wherein:
the substrate includes a plurality of blocks; and
each sensing line is connected to one of the plurality of blocks.
5. The backplane substrate including the in-cell type touch panel of claim 4 , wherein each sensing line is electrically connected to the one of the plurality of blocks, and is insulated from the other of the plurality of blocks.
6. The backplane substrate including the in-cell type touch panel of claim 1 , wherein:
the common electrode includes a transparent electrode; and
the plurality of sensing lines include a metal having high conductivity.
7. The backplane substrate including the in-cell type touch panel of claim 1 , wherein the pixel electrode and the connection pattern are formed in a same process.
8. The backplane substrate including the in-cell type touch panel of claim 1 , wherein:
the common electrode has an opening hole corresponding to a part of the upper surface of the one of the plurality of sensing lines; and
the opening hole overlaps the second interlayer contact hole.
9. The backplane substrate including the in-cell type touch panel of claim 8 , wherein at least one side of the opening hole of the common electrode is spaced apart from the second interlayer contact hole.
10. The backplane substrate including the in-cell type touch panel of claim 8 , wherein the opening hole of the common electrode is wider than the second interlayer contact hole.
11. The backplane substrate including the in-cell type touch panel of claim 8 , wherein the second interlayer contact hole is within the opening hole of the common electrode.
12. The backplane substrate including the in-cell type touch panel of claim 1 , wherein the connection pattern has an island shape spaced apart from the pixel electrode.
13. The backplane substrate including the in-cell type touch panel of claim 1 , wherein the second and third interlayer dielectric layer are formed of an inorganic insulation material.
14. The backplane substrate including the in-cell type touch panel of claim 1 , wherein the first interlayer dielectric layer includes an inorganic insulation material.
15. The backplane substrate including the in-cell type touch panel of claim 1 , wherein the first interlayer dielectric layer includes organic insulation material.
16. The backplane substrate including the in-cell type touch panel of claim 1 , further comprising an opposing substrate facing the substrate and a liquid crystal layer between the substrate and the opposing substrate.
17. The backplane substrate including the in-cell type touch panel of claim 16 , further comprising a color filter layer disposed on the substrate or on the opposing substrate.