Forming thermally stable salicide for salicide first contacts
A method for forming a salicide includes forming, on at least one semiconductor fin, at least one source/drain (S/D) region including a (111) facet and having a cross-sectional quadrilateral shape, forming a conductive material on the (111) facet, annealing the conductive material to form a silicide on the (111) facet, and forming at least one contact to the silicide.
1. A method for forming a salicide, comprising:
forming, on top surfaces of a plurality of semiconductor fins, a plurality of source/drain (S/D) regions separated in a non-merged configuration each including a (111) facet and having a cross-sectional quadrilateral shape;
forming a conductive material on all facets of the plurality of S/D regions in a wrapped around configuration;
annealing the conductive material to form a silicide on the (111) facets; and
forming at least one contact to the silicide.
2. The method as recited in claim 1 , wherein forming the at least one contact further includes:
forming a dielectric layer over the plurality of S/D regions;
forming at least one contact hole in the dielectric layer; and
forming the at least one contact to the silicide in the at least one contact hole.
3. The method as recited in claim 2 , wherein forming the at least one contact hole further includes forming a plurality of contact holes over a portion of the plurality of S/D regions.
4. The method as recited in claim 3 , wherein forming the at least one contact further includes forming a plurality of contacts to the silicide in the plurality of contact holes over the portion of the plurality of S/D regions to reduce capacitance in a partially strapped configuration.
5. The method as recited in claim 1 , wherein annealing the conductive material further includes performing a thermally stabilizing anneal process with a laser anneal at a temperature of between about 900 to 1100 degrees C. for less than or equal to 1 millisecond.
6. The method as recited in claim 5 , wherein annealing the conductive material further includes performing an additional anneal process to continue to form the silicide.
7. A method for forming a salicide, comprising:
forming, on top surfaces of a plurality of semiconductor fins, a plurality of source/drain (S/D) regions separated in a non-merged configuration each including a (111) facet and having a cross-sectional quadrilateral shape;
forming a conductive material on the (111) facets;
annealing the conductive material to form a silicide on the (111) facets, including forming merged silicides between the plurality of S/D regions; and
forming at least one contact to the silicide.
8. The method as recited in claim 7 , wherein forming the at least one contact further includes:
forming a dielectric layer over the plurality of S/D regions;
forming at least one contact hole in the dielectric layer; and
forming the at least one contact to the silicide in the at least one contact hole.
9. The method as recited in claim 8 , wherein forming the at least one contact hole further includes forming a plurality of contact holes over a portion of the plurality of S/D regions.
10. The method as recited in claim 9 , wherein forming the at least one contact further includes forming a plurality of contacts to the silicide in the plurality of contact holes over the portion of the plurality of S/D regions to reduce capacitance in a partially strapped configuration.
11. A method for forming a salicide, comprising:
forming gate structures with a dummy gate material;
forming, on at least one semiconductor fin, at least one source/drain (S/D) region including a (111) facet and having a cross-sectional quadrilateral shape;
forming a conductive material on the (111) facet;
annealing the conductive material to form a silicide on the (111) facet;
replacing the dummy gate material with a gate conductor after the annealing; and
forming at least one contact to the silicide.
12. The method as recited in claim 11 , wherein the conductive material is formed on a top side of the (111) facet of the at least one S/D region.
13. The method as recited in claim 11 , wherein:
forming the at least one S/D region further includes forming a plurality of S/D regions including (111) facets and having cross-sectional quadrilateral shapes on a plurality of semiconductor fins, the quadrilateral shapes being separated in a non-merged configuration; and
the S/D regions on adjacent ones of the semiconductor fins having separated cross-sectional quadrilateral shapes.
14. The method as recited in claim 13 , wherein the conductive material is formed on all facets of the plurality of S/D regions in a wrapped around configuration.
15. The method as recited in claim 13 , wherein annealing the conductive material further includes forming merged silicides between the plurality of S/D regions.
16. The method as recited in claim 11 , wherein forming the at least one contact further includes:
forming a dielectric layer over the at least one S/D region;
forming at least one contact hole in the dielectric layer; and
forming the at least one contact to the silicide in the at least one contact hole.
17. The method as recited in claim 16 , wherein the at least one S/D region includes a plurality of S/D regions, and wherein forming the at least one contact hole further includes forming a plurality of contact holes over a portion of the plurality of S/D regions.
18. The method as recited in claim 17 , wherein forming the at least one contact further includes forming a plurality of contacts to the silicide in the plurality of contact holes over the portion of the plurality of S/D regions to reduce capacitance in a partially strapped configuration.
19. The method as recited in claim 11 , wherein annealing the conductive material further includes performing a thermally stabilizing anneal process with a laser anneal at a temperature of between about 900 to 1100 degrees C. for less than or equal to 1 millisecond.
20. The method as recited in claim 19 , wherein annealing the conductive material further includes performing an additional anneal process to continue to form the silicide.