IP Library › Granted Patent US 10,937,953
Granted Patent B2
US 10,937,953 · App. 16/260,024 · Granted Mar 2, 2021

Tunable tetragonal ferrimagnetic heusler compound with PMA and high TMR

Inventors: Jaewoo Jeong (Los Altos, CA); Mahesh G. Samant (San Jose, CA); Stuart S. P. Parkin (San Jose, CA); Yari Ferrante (San Jose, CA)
Assignees: Samsung Electronics Co., Ltd.; INTERNATIONAL BUSINESS MACHINES CORPORATION
H01L43/10G11C11/161H01F10/3286H01L43/02G11C2211/5615H01L27/222
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Quick Facts
Patent No.
US 10,937,953
App. No.
16/260,024
Granted
Mar 2, 2021
Kind
B2
Abstract

A device is disclosed. The device includes a tetragonal Heusler compound of the form Mn 3-x Co x Ge, wherein 0<x≤1, wherein Co accounts for at least 0.4 atomic percent of the Heusler compound. The device also includes a substrate oriented in the direction (001) and of the form YMn 1+d , wherein Y includes an element selected from the group consisting of Ir and Pt, and 0≤d≤4. The tetragonal Heusler compound and the substrate are in proximity with each other, thereby allowing spin-polarized current to pass from one through the other. In one aspect, the device also includes a multi-layered structure that is non-magnetic at room temperature. The structure includes alternating layers of Co and E. E includes at least one other element that includes Al. The composition of the structure is represented by Co 1-y E y , with y being in the range from 0.45 to 0.55.

Claims (71)

1. A device, comprising:

a Heusler compound of the form Mn 3-x Co x Ge, wherein 0<x≤1, wherein Co accounts for at least 0.4 atomic percent of the Heusler compound and the Heusler compound has a tetragonal structure; and

a substrate oriented in the direction (001) and of the form YMn 1+d , wherein Y includes an element selected from the group consisting of Ir and Pt, and 0≤d≤4,

wherein the Heusler compound and the substrate are in proximity with each other, thereby allowing spin-polarized current to pass from one through the other.

2. The device of claim 1 , wherein Y is Ir.

3. The device of claim 1 , further comprising a tunnel barrier in contact with the Heusler compound.

4. The device of claim 3 , wherein the tunnel barrier includes Mg and O.

5. The device of claim 1 , further comprising a TaN layer between and in contact with the Heusler compound and the substrate.

6. The device of claim 1 , wherein the Heusler compound is of the form Mn 3-x Co x Ge, wherein 0<x≤1, and the substrate is of the form IrMn 3 .

7. The device of claim 1 , wherein the Heusler compound has a magnetic moment that is substantially perpendicular to the film plane.

8. The device of claim 7 , wherein the Heusler compound has a thickness of at least 10 Angstroms and not more than 500 angstroms.

9. The device of claim 1 , wherein a TaN layer is underneath and in contact with the substrate.

10. The device of claim 1 , wherein the Heusler compound has a thickness of less than 5 nm.

11. The device of claim 1 , wherein the Heusler compound has a thickness of less than 3 nm.

12. A device, comprising:

a Heusler compound of the form Mn 3-x Co x Ge, wherein 0<x≤1, wherein Co accounts for at least 0.4 atomic percent of the Heusler compound, the Heusler compound having a tetragonal structure;

a multi-layered structure that is non-magnetic at room temperature, the multi-layered structure comprising alternating layers of Co and E, wherein E comprises at least one other element that includes Al, wherein the composition of the structure is represented by Co 1-y E y , with y being in the range from 0.45 to 0.55; and

a substrate underlying the multi-layered structure;

wherein the Heusler compound and the multi-layered structure are in proximity with each other, thereby allowing spin-polarized current to pass from one through the other.

13. The device of claim 12 , wherein the magnetic moment of the Heusler compound is substantially perpendicular to the interface between the multi-layered structure and the Heusler compound.

14. The device of claim 12 , wherein the Heusler compound has a thickness of less than 5 nm.

15. The device of claim 12 , wherein the Heusler compound has a thickness of less than 3 nm.

16. The device of claim 12 , further comprising:

a tunnel barrier overlying the Heusler compound, thereby permitting current to pass through both the tunnel barrier and the Heusler compound.

17. The device of claim 16 , wherein the tunnel barrier includes Mg and O.

18. The device of claim 16 , further comprising a magnetic layer in contact with the tunnel barrier.

19. A device, comprising:

a Heusler compound of the form Mn 3-x Co x Ge, wherein 0<x≤1, wherein Co accounts for at least 0.4 atomic percent of the Heusler compound, the Heusler compound having a tetragonal structure;

a multi-layered structure that is non-magnetic at room temperature, the multi-layered structure comprising alternating layers of Co and E, wherein E comprises at least one other element that includes Al, wherein the composition of the structure is represented by Co 1-y E y , with y being in the range from 0.45 to 0.55; and

a substrate underlying the multi-layered structure;

wherein the Heusler compound and the multi-layered structure are in proximity with each other, thereby allowing spin-polarized current to pass from one through the other; and

wherein the Heusler compound has a thickness of one unit cell.

20. A device, comprising:

a Heusler compound of the form Mn 3-x Co x Ge, wherein 0<x≤1, wherein Co accounts for at least 0.4 atomic percent of the Heusler compound, the Heusler compound having a tetragonal structure;

a multi-layered structure that is non-magnetic at room temperature, the multi-layered structure comprising alternating layers of Co and E, wherein E comprises at least one other element that includes Al, wherein the composition of the structure is represented by Co 1-y E y , with y being in the range from 0.45 to 0.55; and

a substrate underlying the multi-layered structure;

wherein the Heusler compound and the multi-layered structure are in proximity with each other, thereby allowing spin-polarized current to pass from one through the other; and

wherein E is an AlGe alloy.

21. A device, comprising:

a Heusler compound of the form Mn 3-x Co x Ge, wherein 0<x≤1, wherein Co accounts for at least 0.4 atomic percent of the Heusler compound, the Heusler compound having a tetragonal structure;

a multi-layered structure that is non-magnetic at room temperature, the multi-layered structure comprising alternating layers of Co and E, wherein E comprises at least one other element that includes Al, wherein the composition of the structure is represented by Co 1-y E y , with y being in the range from 0.45 to 0.55; and

a substrate underlying the multi-layered structure;

wherein the Heusler compound and the multi-layered structure are in proximity with each other, thereby allowing spin-polarized current to pass from one through the other; and

wherein E is an AlGa alloy.

22. A device, comprising:

a Heusler compound of the form Mn 3-x Co x Ge, wherein 0<x≤1, wherein Co accounts for at least 0.4 atomic percent of the Heusler compound, the Heusler compound having a tetragonal structure;

a multi-layered structure that is non-magnetic at room temperature, the multi-layered structure comprising alternating layers of Co and E, wherein E comprises at least one other element that includes Al, wherein the composition of the structure is represented by Co 1-y E y , with y being in the range from 0.45 to 0.55; and

a substrate underlying the multi-layered structure;

wherein the Heusler compound and the multi-layered structure are in proximity with each other, thereby allowing spin-polarized current to pass from one through the other; and

wherein E includes an alloy selected from the group consisting of AlSn, AlGe, AlGaGe, AlGaSn, AlGeSn, and AlGaGeSn.

23. A method, comprising:

using a device as a memory element, the device including

a Heusler compound of the form Mn 3-x Co x Ge, wherein 0<x≤1, wherein Co accounts for at least 0.4 atomic percent of the Heusler compound, the Heusler compound having a tetragonal structure; and

a substrate oriented in the direction (001) and of the form YMn 1+d , wherein Y includes an element selected from the group consisting of Ir and Pt, and 0<d≤4;

wherein the Heusler compound and the substrate are in proximity with each other, thereby allowing spin-polarized current to pass from one through the other and

wherein a TaN layer is underneath and in contact with the substrate.

24. A method comprising:

using a device as a memory element, the device including

a first magnetic layer that includes a Heusler compound of the form Mn 3-x Co x Ge, wherein 0<x≤1, wherein Co accounts for at least 0.4 atomic percent of the tetragonal Heusler compound, the Heusler compound having a tetragonal structure; and

a multi-layered structure that is non-magnetic at room temperature, the structure comprising alternating layers of Co and E, wherein E comprises at least one other element that includes Al, wherein the composition of the structure is represented by Co 1-y E y , with y being in the range from 0.45 to 0.55; and

a tunnel barrier;

a second magnetic layer; wherein the first magnetic layer, the multi-layered structure, the tunnel barrier, and the second magnetic layer are in proximity with each other, thereby allowing spin-polarized current to pass from one through the other;

wherein the tunnel barrier includes MgO.

25. A device, comprising:

a substrate;

a underlayer oriented in the direction (001) that is non-magnetic at room temperature, the underlayer overlying the substrate;

a first magnetic layer that includes a Heusler compound Mn 3-x Co x Ge, wherein 0<x≤1, the first magnetic layer being in contact with the underlayer, wherein the magnetic moment of the first layer is switchable;

a tunnel barrier overlying the first magnetic layer; and

a second magnetic layer in contact with the tunnel barrier.

26. The device of claim 25 , further comprising a capping layer in contact with the second magnetic layer.

27. The device of claim 25 , wherein the magnetic moment of the first magnetic layer is substantially perpendicular to the interface between the tunnel barrier and the first magnetic layer.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 15, 2019
From: JEONG, JAEWOO
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 048889/0510 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 5, 2019
From: SAMANT, MAHESH G.; PARKIN, STUART S.P.; FERRANTE, YARI
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 048238/0970 →
Continuity (1)
Related Publication 20200243755A1 · Jul 30, 2020
Cited By (3)
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