IP Library › Granted Patent US 12,642,007
Granted Patent B2
US 12,642,007 · App. 17/710,438 · Granted May 26, 2026

Tetragonal half metallic heusler compounds

Inventors: Sergey Faleev (Santa Clara, CA); Panagiotis Charilaos Filippou (Fremont, CA); Yari Ferrante (San Jose, CA); Chirag Garg (San Jose, CA); Mahesh Samant (San Jose, CA); Jaewoo Jeong (Los Altos, CA)
Assignees: INTERNATIONAL BUSINESS MACHINES CORPORATION; Samsung Electronics Co., Ltd.
H10N50/85H10B61/22H10N50/01G11C11/161
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Quick Facts
Patent No.
US 12,642,007
App. No.
17/710,438
Granted
May 26, 2026
Kind
B2
Abstract

A magnetoresistive random-access memory cell includes a templating layer. The templating layer includes a binary alloy having an alternating layer lattice structure. The cell further includes a half metallic Heusler layer including a half metallic Heusler material having a tetragonal lattice structure. The half metallic Heusler layer is located outward of the templating layer, and has a Heusler in-plane lattice constant that is different from an in-plane lattice constant in a cubic form of the half metallic Heusler material. A tunnel barrier is located outward of the half metallic Heusler layer, and a magnetic layer is located outward of the tunnel barrier.

Claims (64)

1 . A magnetoresistive random-access memory cell, comprising:

a templating layer comprising a binary alloy having an alternating layer lattice structure;

a half metallic Heusler layer comprising a half metallic Heusler material having a tetragonal lattice structure, the half metallic Heusler layer being located over the templating layer, and having a Heusler in-plane lattice constant that is different from an in-plane lattice constant in a cubic form of the half metallic Heusler material;

a tunnel barrier located over the half metallic Heusler layer on a side of the half metallic Heusler layer opposite the templating layer; and

a magnetic layer located over the tunnel barrier on a side of the tunnel barrier opposite the half metallic Heusler layer.

2 . The magnetoresistive random-access memory cell of claim 1 , wherein:

the half metallic Heusler layer comprises a storage layer; and

the magnetic layer comprises a reference layer.

3 . The magnetoresistive random-access memory cell of claim 2 , wherein the half metallic Heusler material is selected from the group consisting of Mn 2 FeSb, Mn 2 CoAl, Mn 2 CoGe, Mn 2 CoSi, Mn 2 CuSi, Co 2 CrAl, Co 2 CrSi, Co 2 MnSb, and Co 2 MnSi.

4 . The magnetoresistive random-access memory cell of claim 3 , wherein the half metallic Heusler layer has a thickness of less than 5 nm.

5 . The magnetoresistive random-access memory cell of claim 3 , wherein the half metallic Heusler material comprises Mn 2 FeSb.

6 . The magnetoresistive random-access memory cell of claim 5 , wherein the half metallic Heusler layer has a thickness of less than 5 nm.

7 . The magnetoresistive random-access memory cell of claim 2 , wherein the tunnel barrier is selected from the group consisting of magnesium oxide and magnesium aluminum oxide.

8 . The magnetoresistive random-access memory cell of claim 2 , wherein the binary alloy is represented by A 1−x E x , wherein A is a transition metal element and E is a main group clement including at least one of aluminum and gallium, and x is in the range from 0.42 to 0.55.

9 . The magnetoresistive random-access memory cell of claim 1 , wherein:

the half metallic Heusler layer comprises a reference layer; and

the magnetic layer comprises a storage layer.

10 . The magnetoresistive random-access memory cell of claim 9 , wherein the half metallic Heusler material compound is selected from the group consisting of Mn 2 FeSb, Mn 2 CoAl, Mn 2 CoGe, Mn 2 CoSi, Mn 2 CuSi, Co 2 CrAl, Co 2 CrSi, Co 2 MnSb, and Co 2 MnSi.

11 . The magnetoresistive random-access memory cell of claim 10 , wherein the half metallic Heusler layer has a thickness of less than 5 nm.

12 . The magnetoresistive random-access memory cell of claim 10 , wherein the half metallic Heusler material comprises Mn 2 FeSb.

13 . The magnetoresistive random-access memory cell of claim 12 , wherein the half metallic Heusler layer has a thickness of less than 5 nm.

14 . The magnetoresistive random-access memory cell of claim 1 , wherein the alternating layer lattice structure of the templating layer comprises a cesium chloride structure.

15 . The magnetoresistive random-access memory cell of claim 1 , wherein the templating layer is nonmagnetic at room temperature.

16 . The magnetoresistive random-access memory cell of claim 1 , wherein:

the templating layer has a templating layer in-plane lattice constant; and

the Heusler in-plane lattice constant substantially matches the templating layer in-plane lattice constant.

17 . The magnetoresistive random-access memory cell of claim 16 , wherein the half metallic Heusler material has magnetization substantially perpendicular to the half metallic Heusler material.

18 . A magnetoresistive random-access memory array, comprising:

a plurality of bit lines and a plurality of complementary bit lines forming a plurality of bit line-complementary bit line pairs;

a plurality of word lines intersecting said plurality of bit line pairs at a plurality of cell locations; and

a plurality of magnetoresistive random-access memory cells located at each of said plurality of cell locations, each of said magnetoresistive random-access memory cells being electrically connected to a corresponding bit line and selectively interconnected to a corresponding one of said complementary bit lines under control of a corresponding one of said word lines, each of said plurality of magnetoresistive random-access memory cells comprising:

a templating layer comprising a binary alloy having an alternating layer lattice structure;

a half metallic Heusler layer comprising a half metallic Heusler material having a tetragonal lattice structure, the half metallic Heusler layer being located over the templating layer, and having a Heusler in-plane lattice constant that is different from an in-plane lattice constant in a cubic form of the half metallic Heusler material;

a tunnel barrier of located over the half metallic Heusler layer on a side of the half metallic Heusler layer opposite the templating layer; and

a magnetic layer located over the tunnel barrier on a side of the tunnel barrier opposite the half metallic Heusler layer.

19 . The magnetoresistive random-access memory array of claim 18 , wherein:

the half metallic Heusler layer comprises a storage layer; and

the magnetic layer comprises a reference layer.

20 . The magnetoresistive random-access memory array of claim 19 , wherein the half metallic Heusler material is selected from the group consisting of Mn 2 FeSb, Mn 2 CoAl, Mn 2 CoGe, Mn 2 CoSi, Mn 2 CuSi, Co 2 CrAl, Co 2 CrSi, Co 2 MnSb, and Co 2 MnSi.

21 . The magnetoresistive random-access memory array of claim 18 , wherein:

the half metallic Heusler layer comprises a reference layer; and

the magnetic layer comprises a storage layer.

22 . The magnetoresistive random-access memory array of claim 21 , wherein the half metallic Heusler material is selected from the group consisting of Mn 2 FeSb, Mn 2 CoAl, Mn 2 CoGe, Mn 2 CoSi, Mn 2 CuSi, Co 2 CrAl, Co 2 CrSi, Co 2 MnSb, and Co 2 MnSi.

23 . A method of operating a magnetoresistive random-access memory array, comprising:

providing a magnetoresistive random-access memory array, said array comprising:

a plurality of bit lines and a plurality of complementary bit lines forming a plurality of bit line-complementary bit line pairs;

a plurality of word lines intersecting said plurality of bit line pairs at a plurality of cell locations; and

a plurality of magnetoresistive random-access memory cells located at each of said plurality of cell locations, each of said magnetoresistive random-access memory cells being electrically connected to a corresponding bit line and selectively interconnected to a corresponding one of said complementary bit lines under control of a corresponding one of said word lines, each of said plurality of magnetoresistive random-access memory cells comprising:

a templating layer comprising a binary alloy having an alternating layer lattice structure;

a half metallic Heusler layer comprising a half metallic Heusler material having a tetragonal lattice structure, the half metallic Heusler layer being located outward of over the templating layer, and having a Heusler in-plane lattice constant that is different from an in-plane lattice constant in a cubic form of the half metallic Heusler material;

a tunnel barrier located over the half metallic Heusler layer on a side of the half metallic Heusler layer opposite the templating layer; and

a magnetic layer located over the tunnel barrier on a side of the tunnel barrier opposite the half metallic Heusler layer;

applying signals to said word lines to cause a first subset of said cells to store logical ones and a second subset of said cells to store logical zeroes; and

reading said stored logical ones and zeroes via said bit lines and said complementary bit lines.

24 . A method of forming a magnetoresistive random-access memory cell, comprising:

providing a templating layer comprising a binary alloy having an alternating layer lattice structure and having a templating layer in-plane lattice constant;

epitaxially growing a half metallic Heusler layer over the templating layer, the half metallic Heusler layer comprising a half metallic Heusler material, the half metallic Heusler layer being grown over the templating layer such that the Heusler material has a tetragonal lattice structure and a Heusler in-plane lattice constant that is different from an in-plane lattice constant in a cubic form of the half metallic Heusler material and which substantially matches the templating layer in-plane lattice constant;

forming a tunnel barrier over the half metallic Heusler layer, on a side of the half metallic Heusler layer opposite the templating layer; and

forming a magnetic layer over the tunnel barrier, on a side of the tunnel barrier opposite the half metallic Heusler layer.

25 . A hardware description language (HDL) design structure encoded on a machine-readable data storage medium, said HDL design structure comprising elements that when processed in a computer-aided design system generates a machine-executable representation of a magnetoresistive random-access memory cell, wherein said (HDL design structure) comprises:

a templating layer comprising a binary alloy having an alternating layer lattice structure;

a half metallic Heusler layer comprising a half metallic Heusler material having a tetragonal lattice structure, the half metallic Heusler layer being located over the templating layer, and having a Heusler in-plane lattice constant that is different from an in-plane lattice constant in a cubic form of the half metallic Heusler material;

a tunnel barrier located over the half metallic Heusler layer on a side of the half metallic Heusler layer opposite the templating layer; and

a magnetic layer located over the tunnel barrier on a side of the tunnel barrier opposite the half metallic Heusler layer.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 31, 2022
From: FALEEV, SERGEY; FILIPPOU, PANAGIOTIS CHARILAOS; FERRANTE, YARI; GARG, CHIRAG; SAMANT, MAHESH
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 059463/0719 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 31, 2022
From: JEONG, JAEWOO
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 059463/0825 →
Continuity (1)
Related Publication 20230320231A1 · Oct 5, 2023
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