IP Library › Granted Patent US 10,950,609
Granted Patent B2
US 10,950,609 · App. 16/511,153 · Granted Mar 16, 2021

Gate-all-around (GAA) and fin field-effect transistor (FinFet) hybrid static random-access memory (SRAM)

Inventor: Haining Yang (San Diego, CA)
Assignee: QUALCOMM Incorporated
H01L27/1108H01L27/0922H01L27/0924H01L29/0673H01L29/42392H01L29/7851H01L29/78696
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Quick Facts
Patent No.
US 10,950,609
App. No.
16/511,153
Granted
Mar 16, 2021
Kind
B2
Abstract

Certain aspects of the present disclosure generally relate to a static random-access memory (SRAM) implemented using both a gate-all-around (GAA)-type transistor and a fin field-effect transistor (FinFET). For example, certain aspects are directed to an SRAM memory cell having a flip-flop (FF) having a pull-up (PU) transistor and a pull-down (PD) transistor, and a pass-gate (PG) transistor coupled between a bit line of the SRAM memory cell and the FF, a gate of the PG transistor being coupled to a word line (WL) of the SRAM memory cell. In certain aspects, at least one of the PU transistor, the PD transistor, or the PG transistor comprises a GAA transistor, and at least another one of the PU transistor, the PD transistor, or the PG transistor comprises a FinFET.

Claims (38)

1. A static random-access memory (SRAM) memory cell, comprising:

a flip-flop (FF) having a pull-up (PU) transistor and a pull-down (PD) transistor; and

a pass-gate (PG) transistor coupled between a bit line (BL) of the SRAM memory cell and the FF, a gate of the PG transistor being coupled to a word line (WL) of the SRAM memory cell, wherein:

the PD transistor comprises a gate-all-around (GAA) transistor;

the PG transistor comprises a first fin field-effect transistor (FinFET); and

the PU transistor comprises a second FinFET.

2. The SRAM memory cell of claim 1 , wherein a drive current strength of the PD transistor is greater than a drive current strength of the PG transistor.

3. The SRAM memory cell of claim 1 , wherein:

the PG transistor comprises an n-type metal-oxide-semiconductor (NMOS) transistor;

the PD transistor comprises another NMOS transistor; and

the PU transistor comprises a p-type metal-oxide-semiconductor (PMOS) transistor having a source coupled to the NMOS transistor and to a source of the other NMOS transistor.

4. The SRAM memory cell of claim 1 , wherein a a drive current strength of the PG transistor is less than a drive current strength of the PU transistor.

5. A static random-access memory (SRAM) memory cell comprising:

a flip-flop (FF) having a pull-up (PU) transistor and a pull-down (PD) transistor; and

a pass-gate (PG) transistor coupled between a bit line (BL) of the SRAM memory cell and the FF, a gate of the PG transistor being coupled to a word line (WL) of the SRAM memory cell, wherein:

the PG transistor comprises a fin field-effect transistor (FinFET);

the PD transistor comprises a first gate-all-around (GAA) transistor; and

the PU transistor comprises a second GAA transistor.

6. The SRAM memory cell of claim 5 , wherein a width of a channel slab of the PD transistor is greater than a width of a channel slab of the PU transistor.

7. The SRAM memory cell of claim 5 , wherein a drive current strength of the PD transistor is greater than a drive current strength of the PG transistor.

8. The SRAM memory cell of claim 1 , wherein the GAA transistor comprises a channel and a gate region surrounding the channel.

9. The SRAM memory cell of claim 1 , wherein each of the first FinFET and the second FinFET comprises a fin and a gate region adjacent to at least two sides of the fin.

10. A static random-access memory (SRAM), comprising:

a plurality of memory cells, each of the plurality of memory cells comprising:

a flip-flop (FF) having a pull-up (PU) transistor and a pull-down (PD) transistor; and

a pass-gate (PG) transistor coupled between a bit line (BL) of the SRAM and the FF, a gate of the PG transistor being coupled to one of a plurality of word lines (WLs) of the SRAM, wherein:

the PG transistor comprises a first gate-all-around (GAA) transistor;

the PU transistor comprises a second GAA transistor; and

the PD transistor comprises a fin field-effect transistor (FinFET).

11. The SRAM of claim 10 , wherein a drive current strength of the PG transistor is less than a drive current strength of the PD transistor.

12. The SRAM of claim 10 , wherein:

the PG transistor comprises an n-type metal-oxide-semiconductor (NMOS) transistor;

the PD transistor comprises another NMOS transistor; and

the PU transistor comprises a p-type metal-oxide-semiconductor (PMOS) transistor having a source coupled to the NMOS transistor and to a source of the other NMOS transistor.

13. The SRAM of claim 10 , wherein a drive current strength of the PU transistor is less than a drive current strength of the PD transistor.

14. The SRAM memory cell of claim 5 , wherein a drive current strength of the PU transistor is less than the drive current strength of the PG transistor.

15. The SRAM of claim 10 , wherein a width of a channel slab of the PG transistor is smaller than a width of a channel slab of the PD transistor.

16. The SRAM of claim 10 , wherein a width of a channel slab of the PU transistor is smaller than a width of a channel slab of the PD transistor.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 14, 2019
From: YANG, HAINING
To: QUALCOMM INCORPORATED
Reel/Frame 051004/0346 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 21, 2019
From: YANG, HAINING
To: QUALCOMM INCORPORATED
Reel/Frame 050779/0549 →
Continuity (1)
Related Publication 20210020643A1 · Jan 21, 2021
Cited By (2)
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