Semiconductor device and method for fabricating the same
A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate; forming a gate structure on the substrate; forming an epitaxial layer adjacent to the gate structure; forming an interlayer dielectric (ILD) layer on the gate structure; forming a first contact hole in the ILD layer adjacent to the gate structure; and forming a cap layer in the recess, in which a top surface of the cap layer is even with or lower than a top surface of the substrate.
1. A method for fabricating semiconductor device, comprising:
providing a substrate;
forming a gate structure on the substrate;
forming an epitaxial layer adjacent to the gate structure;
forming an interlayer dielectric (ILD) layer on the gate structure;
forming a first contact hole in the ILD layer adjacent to the gate structure; and
forming a cap layer in the first contact hole, wherein a top surface of the cap layer is even with or lower than a top surface of the substrate, the top surface of the cap layer comprises a planar surface parallel to a top surface of the substrate, and a top surface of the epitaxial layer comprises a first planar inclined sidewall extending upward from one end of a curved surface, and a second planar inclined sidewall extending upward from other end of the curved surface, wherein the curved surface is substantially semicircular under cross-sectional view and is in direct contact to sidewalls and a bottom surface of the cap layer.
2. The method of claim 1 , further comprising:
forming a metal layer on the cap layer to fill the first contact hole; and
planarizing the metal layer to form a first contact plug.
3. The method of claim 2 , further comprising forming a silicide between the first contact plug and the cap layer.
4. The method of claim 1 , further comprising:
forming a second contact hole in the ILD layer to expose the gate structure;
forming a metal layer in the second contact hole; and
planarizing the metal layer to form a second contact plug.
5. The method of claim 1 , further comprising:
forming a contact etch stop layer (CESL) on the gate structure and the substrate;
forming the ILD layer; and
removing part of the ILD layer and part of the CESL to form the first contact hole.
6. The method of claim 1 , wherein the cap layer and the epitaxial layer comprise same material.
7. The method of claim 6 , wherein a doping concentration of the cap layer is higher than a doping concentration of the epitaxial layer.
8. The method of claim 1 , further comprising forming a buffer layer before forming the epitaxial layer.
9. The method of claim 8 , wherein the buffer layer, the epitaxial layer, and the cap layer comprise same material.
10. The method of claim 1 , wherein the top surface of the cap layer comprises a reverse V-shaped profile.
11. The method of claim 1 , wherein the top surface of the cap layer comprises a V-shaped profile.