IP Library Granted Patent US 10,991,553
Granted Patent B2
US 10,991,553 · App. 16/524,926 · Granted Apr 27, 2021

Nanosecond pulser thermal management

Inventors: Timothy Ziemba (Bainbridge Island, WA); Ilia Slobodov (Seattle, WA); John Carscadden (Seattle, WA); Kenneth Miller (Seattle, WA); Connor Liston (Seattle, WA)
Assignee: Eagle Harbor Technologies, Inc.
H01J37/32146H01J37/32082H01J37/32091H01J37/32128H01J37/32174H01J37/32541H01J37/32568H01J37/32715H01L21/6833H01L21/68757H02M3/33523H03K3/57H03M1/12H05K7/20154H05K7/20172H05K7/20254H05K7/20272H05K7/20281H05K7/20509
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Quick Facts
Patent No.
US 10,991,553
App. No.
16/524,926
Granted
Apr 27, 2021
Kind
B2
Abstract

Some embodiments include a thermal management system for a nanosecond pulser. In some embodiments, the thermal management system may include a switch cold plates coupled with switches, a core cold plate coupled with one or more transformers, resistor cold plates coupled with resistors, or tubing coupled with the switch cold plates, the core cold plates, and the resistor cold plates. The thermal management system may include a heat exchanger coupled with the resistor cold plates, the core cold plate, the switch cold plate, and the tubing. The heat exchanger may also be coupled with a facility fluid supply.

Claims (56)

1. A nanosecond pulser system comprising:

a plurality of switches electrically coupled in parallel, each of the plurality of switches having a switch heat sink;

a transformer comprising:

at least one transformer core that includes a first core surface;

a plurality of primary windings electrically coupled with the plurality of switches; and

a plurality of secondary windings;

an output electrically coupled with the plurality of secondary windings, the output providing pulses having a voltage greater than about 1 kV, a pulse width less than about 1 μs, and a pulse repletion frequency greater than about 20 kHz;

at least one switch cold plate physically coupled with the first switch surface of at least a subset of the plurality of switches, the at least one switch cold plate comprising a metal; and

a core cold plate physically coupled with the first core surface, the core cold plate comprising a metal.

2. The nanosecond pulser system according to claim 1 , wherein the stray capacitance between the switch cold plate and ground with the switch cold plate is less than 5 nF greater than the stray capacitance between a switch heat sink and ground with the switch cold plate removed.

3. The nanosecond pulser system according to claim 1 , wherein the stray capacitance between secondary winding and ground with the core cold plate is less than 5 nF greater than the stray capacitance between secondary winding and ground without the core cold plate.

4. The nanosecond pulser system according to claim 1 , wherein the stray inductance on the secondary side of the transformer with the core cold plate is less than 10 μH greater than the stray inductance on the secondary side of the transformer without the core cold plate.

5. The nanosecond pulser system according to claim 1 , wherein the stray inductance on the primary side of the transformer with the core cold plate is less than 10 nH greater than the stray inductance on the primary side of the transformer without the core cold plate.

6. The nanosecond pulser system according to claim 1 , wherein the switch cold plate and each switch heat sink are electrically coupled and have the same electric potential.

7. The nanosecond pulser system according to claim 1 , further comprising an insulating material disposed between the switch cold plate and a heat sink.

8. The nanosecond pulser system according to claim 1 , further comprising an insulating material disposed between the core cold plate and the transformer core, the plurality of primary windings, and the plurality of secondary windings.

9. The nanosecond pulser system according to claim 8 , wherein the insulating material has a thickness greater than about 0.01 mm.

10. The nanosecond pulser system according to claim 1 , further comprising:

a plurality of tubes coupled with the core cold plate and the switch cold plate; and

a fluid that flows through the plurality of tubes.

11. The nanosecond pulser system according to claim 10 , wherein the fluid comprises a di-electric fluid, Galden, Coolanol, or water.

12. The nanosecond pulser system according to claim 1 , further comprising one or more fans positioned to allow a gas to circulate near the switch cold plate and the core cold plate.

13. The nanosecond pulser system according to claim 1 , further comprising:

a nanosecond pulser enclosure within which the plurality of switches, the transformer, switch cold plate, and the transformer core cold plate are disposed; and

an inert gas subsystem disposed within the nanosecond pulser enclosure that releases an inert gas into the nanosecond pulser enclosure with a pressure greater than atmospheric pressure.

14. The nanosecond pulser system according to claim 1 , wherein the transformer comprises a second transformer core, and the core cold plate is disposed between the transformer core and the second transformer core.

15. A nanosecond pulser system comprising:

a plurality of switches arranged axially around a central point;

a plurality of switch cold plates having a substantially flat surface, each of the substantially flat surfaces of the plurality of switch cold plates physically coupled with at least one of the plurality of switches and the plurality of switch cold plates are arranged axially around the central point;

a tube physically coupled with each of the plurality of switch cold plates; and

an inlet connector and an outlet connector coupled with the tube;

wherein a dielectric fluid flows through the inlet connector, into the tube, and out the outlet connector.

16. The nanosecond pulser system according to claim 15 ,

wherein each switch of the plurality of switches includes a switch heat sink; and

wherein the stray capacitance between a first switch cold plate of the plurality of switch cold plates and ground with the first switch cold plate coupled with a switch heat sink is less than 5 nF greater than the stray capacitance between a switch heat sink and ground with the first switch cold plate removed.

17. The nanosecond pulser system according to claim 15 , further comprising a thermal interface material disposed between the plurality of switch cold plates and the plurality of switches.

18. The nanosecond pulser system according to claim 15 , further comprising a heat exchanger coupled with the inlet connector and the outlet connector, the heat exchanger also including a facility fluid inlet and a facility fluid outlet.

19. A nanosecond pulser system comprising:

a core cold plate comprising:

a top surface;

a bottom surface;

an internal tube comprising a ring with an aperture, an outer circumference, and having a first end and a second end;

an inlet connector coupled with the first end of the internal tube;

an outlet connector coupled with the second end of the internal tube; and

a transformer comprising:

a transformer core having a toroid shape with a top surface, a bottom surface, and a transformer hole that passes through the middle of the transformer core, wherein either the bottom surface or the top surface of the transformer core is coupled with the top surface of the core cold plate;

primary windings wound around the transformer core; and

secondary windings wound around the transformer core.

20. The nanosecond pulser system according to claim 19 , further comprising a second transformer comprising:

a second transformer core having a toroid shape with a second top surface, a second bottom surface, and a second hole that passes through the middle of the second transformer core, wherein either the second bottom surface or the second top surface of the second transformer core is coupled with the bottom surface of the core cold plate;

primary windings wound around the transformer core; and

secondary windings wound around the transformer core.

21. The nanosecond pulser system according to claim 19 , wherein either or both the inner ring and the outer ring comprise an insulating material.

22. The nanosecond pulser system according to claim 19 , further comprising a heat exchanger coupled with the inlet connector and the outlet connector, the heat exchanger also including a facility fluid inlet and a facility fluid outlet.

23. The nanosecond pulser system according to claim 19 , further comprising a flat ring within which the internal tube is disposed.

24. The nanosecond pulser system according to claim 19 , wherein the stray inductance on the primary side of the transformer with the core cold plate is less than 10 nH greater than the stray inductance on the primary side of the transformer without the core cold plate.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 19, 2019
From: ZIEMBA, TIMOTHY; CARSCADDEN, JOHN; MILLER, KENNETH; SLOBODOV, ILIA; LISTON, CONNOR
To: EAGLE HARBOR TECHNOLOGIES, INC.
Reel/Frame 050094/0077 →
Continuity (12)
Continuation In Part 16523840 · Jul 26, 2019
Provisional Application 62789523 · Jan 8, 2019
Provisional Application 62789526 · Jan 8, 2019
Provisional Application 62717523 · Aug 10, 2018
Provisional Application 62711457 · Jul 27, 2018
Provisional Application 62711406 · Jul 27, 2018
Provisional Application 62711464 · Jul 27, 2018
Provisional Application 62711468 · Jul 27, 2018
Provisional Application 62711467 · Jul 27, 2018
Provisional Application 62711347 · Jul 27, 2018
Provisional Application 62711334 · Jul 27, 2018
Related Publication 20200037468A1 · Jan 30, 2020
Cited By (17)
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