Wiring board, semiconductor device, and method of manufacturing wiring board
A glass wiring board is provided with an analog duplexer including an inductor and a capacitor, and includes: a core wiring board provided with the coil-shaped inductor having through electrodes and wiring patterns provided in a glass substrate via an inorganic adhesive layer, and with a land pattern connected to an outer layer; the capacitor having a structure with a dielectric layer sandwiched between upper and lower electrode patterns on an insulating resin layer covering the core wiring board; and a wiring pattern for connecting to an external component such as an external substrate.
1. A semiconductor device comprising:
an analog duplexer including a first wiring board; and
a second wiring board to which the analog duplexer is mounted, wherein the first wiring board is a wiring board, comprising:
a core wiring board provided with a coil-shaped inductor having a through electrode and a wiring pattern and arranged in a core substrate via an inorganic adhesive layer, and with a land pattern provided on the core substrate and connected to an outer layer;
insulating resin layers covering both surfaces of the core wiring board;
a capacitor provided on one of the insulating resin layers on one side of the core wiring board and having a structure with a dielectric layer sandwiched between an upper electrode pattern and a lower electrode pattern electrically connecting to the wiring pattern of the inductor; and
a wiring pattern for connecting to an external substrate, the wiring pattern being electrically connected to the land pattern and provided on the insulating resin layer.
2. The semiconductor device of claim 1 , wherein
the lower electrode pattern of the capacitor has an arithmetic surface roughness Ra of 50 nm or more and 150 nm or less.
3. The semiconductor device of claim 1 , wherein
the circuit including the inductor and the capacitor is a high-frequency filter.
4. The semiconductor device of claim 1 , wherein
the core substrate is a glass substrate having a thickness of 50 μm or more and 1000 μm or less.
5. The semiconductor device of claim 1 , wherein
the through electrode is formed in a through hole having a maximum diameter of 15 μm or more and 150 μm or less.
6. The semiconductor device of claim 1 , wherein
the wiring pattern of the inductor has a thickness of 25 μm or less.
7. The semiconductor device of claim 1 , wherein
the inorganic adhesive layer is a single-layer film of a single material selected from, or a single-layer or multilayered film of a combination of two or more materials selected from tin oxide, indium oxide, zinc oxide, nickel, nickel-phosphorus, chromium, chromium oxide, aluminum nitride, copper nitride, aluminum oxide, tantalum, titanium, and copper.
8. The semiconductor device of claim 1 , wherein
the through electrode and the wiring pattern included in the inductor are made of any one single metal or a compound of two or more metals of copper, silver, gold, nickel, platinum, palladium, ruthenium, tin, tin-silver, tin-silver-copper, tin-copper, tin-bismuth, and tin-lead.
9. The semiconductor device of claim 1 , wherein
the insulating resin layer is formed of any one material of or a composite of at least two materials of epoxy resin, phenolic resin, polyimide resin, cycloolefin, PBO resin, and acrylic resin.
10. A method of manufacturing a wiring board, comprising:
forming a through hole in a core substrate;
forming an inorganic adhesive layer on a surface of the core substrate including an inside of the through hole, and forming, on the inorganic adhesive layer, a land pattern for connecting to an inductor and an outer layer, thereafter removing an area of the inorganic adhesive layer on which neither the inductor nor the land pattern is stacked;
after removing the area of the inorganic adhesive layer, covering with insulating resin both surfaces of the core substrate on which the inductor and the land pattern are formed, and forming, in the insulating resin, an opening for electrically connecting to the inductor and the land pattern;
forming, on the insulating resin, a capacitor having a lower electrode pattern electrically connecting to the inductor via the opening, a dielectric layer, and an upper electrode pattern stacked in this order, and forming an external connection wiring pattern electrically connected to the land pattern via the opening to connect to an external substrate; and
stacking an insulating resin to cover the capacitor and the external connection wiring pattern, and forming, in the insulating resin, an opening for electrically connecting to the upper electrode pattern of the capacitor and the external connection wiring pattern.