Semiconductor device and semiconductor module
The semiconductor device of the present invention includes an insulating layer, a high voltage coil and a low voltage coil which are disposed in the insulating layer at an interval in the vertical direction, a low potential portion which is provided in a low voltage region disposed around a high voltage region for the high voltage coil in planar view and is connected with potential lower than the high voltage coil, and an electric field shield portion which is disposed between the high voltage coil and the low voltage region and includes an electrically floated metal member.
1. A semiconductor device comprising:
a first lead frame;
a first semiconductor chip bonded to the first lead frame;
a second lead frame;
a second semiconductor chip bonded to the second lead frame;
an inductor chip mounted on the second lead frame, the inductor chip being placed between the first semiconductor chip and the second semiconductor chip in plan view,
wherein the inductor chip comprises:
a substrate;
a lower side inductor wiring formed over the substrate;
an upper side inductor wiring formed over the lower side inductor wiring to face each other in sectional view and formed with adjacent wirings;
a peripheral wiring surrounding the lower side inductor wiring and the upper side inductor wiring in a plan view, wherein a distance between the adjacent wirings forming the upper side inductor wiring being less than a distance between the peripheral wiring and an outermost wiring of the upper side inductor wiring, and the peripheral wiring is not in direct contact with the substrate;
a first insulating material formed between the peripheral wiring and the substrate such that a lower surface of the peripheral wiring is in contact with the first insulating material and the peripheral wiring is electrically isolated from the substrate by the first insulating material; and
the outermost wiring of the upper side inductor wiring is apart from the peripheral wiring such that a distance is constant between the outermost wiring and the peripheral wiring at a whole part of the outermost wiring having a curvature.
2. The semiconductor device according to claim 1 , wherein a second insulating material is disposed between the lower side inductor wiring and the upper side inductor wiring.
3. The semiconductor device according to claim 2 , wherein a coil protective layer is placed over the upper side inductor wiring.
4. The semiconductor device according to claim 3 , wherein the coil protective film is thicker than a thickness of the upper side inductor wiring.
5. The semiconductor device according to claim 4 , wherein the adjacent wirings of the upper side inductor wiring are disposed relative to each other with even pitches.
6. The semiconductor device according to claim 5 , wherein the lower side inductor wiring is formed with adjacent wirings wherein the adjacent wirings of the lower side inductor wiring are disposed relative to each other with even pitches.
7. The semiconductor device according to claim 6 , wherein a wiring pattern is connected to a surface of the lower side inductor wiring and connected to an opening pad formed at a surface of the inductor chip.
8. The semiconductor device according to claim 7 , wherein the upper side inductor wiring is made of a material including copper.
9. The semiconductor device according to claim 8 , wherein the lower side inductor wiring is made of a material including copper.
10. The semiconductor device according to claim 9 , wherein a control signal is supplied from the first semiconductor chip to the second semiconductor chip via the inductor chip.
11. The semiconductor device according to claim 10 , wherein the first semiconductor chip, the second semiconductor chip, and the inductor chip are molded and formed as a Small Outline Package (SOP) package.
12. The semiconductor device according to claim 1 , wherein the peripheral wiring is a shield wiring.
13. The semiconductor device according to claim 12 , wherein the opening pad is formed as a rectangular shape in plan view.
14. The semiconductor device according to claim 13 , wherein the coil protective film is made of a material including a polyimide.
15. The semiconductor device according to claim 14 , wherein metal wires are connected between the first semiconductor chip and the inductor chip.
16. The semiconductor device according to claim 15 , wherein a high output voltage transistor with a high output voltage rating is formed in the second semiconductor chip, which high output voltage rating is higher than an output voltage rating of a low output voltage transistor formed in the first semiconductor chip.
17. The semiconductor device according to claim 16 , wherein size of the inductor chip is smaller than the second semiconductor chip in plan view.
18. The semiconductor device according to claim 17 , wherein size of the inductor chip is smaller than the first semiconductor chip in plan view.
19. The semiconductor device according to claim 1 , wherein the upper side inductor wiring is formed as including a rounded shape.
20. The semiconductor device according to claim 19 , wherein the peripheral wiring is separated from the lower side inductor wiring and the upper side inductor wiring electrically.
21. The semiconductor device according to claim 1 , further comprising a second wiring having an upper surface formed between the lower side inductor wiring and the substrate such that the lower surface of the peripheral wiring is opposed to the upper surface of the second wiring and is not electrically coupled to the second wiring.
22. The semiconductor device according to claim 21 wherein the second wiring is sandwiched between the lower side inductor wiring and the substrate.
23. The semiconductor device according to claim 21 wherein no conductive structure is disposed between the upper surface of the second wiring and the lower surface of the peripheral wiring.