IP Library › Granted Patent US 11,022,486
Granted Patent B2
US 11,022,486 · App. 16/273,868 · Granted Jun 1, 2021

MoS

Inventors: Yu Tong (Singapore, SG); Chunxiang Zhu (Singapore, SG)
Assignee: National University of Singapore
G01J1/44G01J3/50H01L29/42356H01L29/45H01L29/495H01L31/032H01L31/1126G01J2001/4473
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Quick Facts
Patent No.
US 11,022,486
App. No.
16/273,868
Granted
Jun 1, 2021
Kind
B2
Abstract

In various embodiments, a simple, robust molybdenum disulfide (MoS 2 ) based photosensor is provided that is able to detect both light intensity and wavelength. The MoS 2 based photosensor may be structured as a field effect transistor (FET) with a back-gate configuration, including MoS 2 nanoflake layers, an insulating layer coated, doped substrate, and source, drain and backgate electrodes. The photoresponse of the MoS 2 based photosensor exhibits a fast response component that is only weakly dependent on the wavelength of light incident on the sensor and a slow response component that is strongly dependent on the wavelength of light incident on the sensor. The fast response component alone may be analyzed to determine intensity of the light, while the slow response component may be analyzed to determine the wavelength of the light.

Claims (37)

1. An instrument comprising:

a photosensor that includes

a substrate including an insulating layer,

one or more layers of a two-dimensional (2D) transition metal dichalcogenide disposed upon the substrate,

a drain electrode and a source electrode disposed upon the substrate and arranged laterally with respect to the layers of 2D transition metal dichalcogenide layers, and

a backgate electrode formed beneath the layers of 2D transition metal dichalcogenide layers and the insulating layer; and

an electrical parameter analyzer coupled to the drain electrode, the electrical parameter analyzer configured to measure a photoresponse in terms of drain current verses time of the photosensor and utilize components of the photoresponse to determine both intensity and wavelength of light incident upon the photosensor.

2. The instrument of claim 1 , wherein the 2D transition metal dichalcogenide layers comprise molybdenum disulfide (MoS 2 ) layers.

3. The instrument of claim 2 , wherein the MoS 2 layers are MoS 2 nanoflake layers.

4. The instrument of claim 1 , wherein the photoresponse includes a fast response component and a slow response component.

5. The instrument of claim 4 , wherein an interval of time that defines a cut off between the fast response component and the slow response component is 1 second.

6. The instrument of claim 1 , wherein the substrate comprises:

a silicon dioxide (SiO 2 ) insulating layer; and

a doped silicon (Si) substrate.

7. The instrument of claim 1 , wherein the drain electrode and the source electrode each comprise gold (Au) electrodes.

8. The instrument of claim 1 , wherein the backgate electrode is formed by silver (Ag) deposited within areas of the substrate.

9. An instrument comprising:

a photosensor having

a substrate,

one or more layers of a two-dimensional (2D) transition metal dichalcogenide disposed upon the substrate, and

a plurality of electrodes including a drain electrode; and

an electrical parameter analyzer coupled to the drain electrode, the electrical parameter analyzer configured to measure a photoresponse in terms of drain current verses time of the photosensor wherein the photoresponse includes a fast response component and a slow response component, and the electrical parameter analyzer is configured to determine both intensity and wavelength of light incident upon the photosensor by using the fast response component alone to determine the intensity of the light and the slow response component to determine the wavelength of the light.

10. The instrument of claim 9 , wherein the 2D transition metal dichalcogenide layers comprise molybdenum disulfide (MoS 2 ) layers.

11. The instrument of claim 10 , wherein the MoS 2 layers are MoS 2 nanoflake layers.

12. The instrument of claim 9 , wherein an interval of time that defines a cut off between the fast response component and the slow response component is 1 second.

13. The instrument of claim 9 , wherein the plurality of electrodes further comprise a source electrode and a backgate electrode.

14. The instrument of claim 9 , wherein the substrate comprises:

a silicon dioxide (SiO 2 ) insulating layer; and

a doped silicon (Si) substrate.

15. A method of operating a photosensor that includes one or more layers of a two-dimensional (2D) transition metal dichalcogenide, the method comprising:

measuring a photoresponse provided by the one or more layers of the 2D transition metal dichalcogenide in terms of current verses time;

detecting a fast response component and a slow response component of the photoresponse;

based on the fast response component alone, determining intensity of light incident on the photosensor; and

based on the slow response component determining a wavelength of the light incident on the photosensor.

16. The method of claim 15 , wherein the 2D transition metal dichalcogenide layers comprise molybdenum disulfide (MoS 2 ) layers.

17. The method of claim 15 , wherein the photosensor is structured as a field effect transistor (FET) with a back-gate configuration.

18. The method of claim 15 , wherein an interval of time that defines a cut off between the fast response component and the slow response component is 1 second.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 12, 2019
From: TONG, YU; ZHU, CHUNXIANG
To: NATIONAL UNIVERSITY OF SINGAPORE
Reel/Frame 048312/0364 →
Continuity (2)
Provisional Application 62629176 · Feb 12, 2018
Related Publication 20190257690A1 · Aug 22, 2019
Cited By (1)
US 12,385,818