Semiconductor structure and manufacturing method thereof
A semiconductor device includes a substrate, a gate structure over the substrate, gate spacers on opposite sidewalls of the gate structure, an inhibitor residue over gate structure and between the gate spacers, and source/drain structures on opposite sides of the gate structure. The inhibitor residue lines a sidewall of one of the gate spacers.
1. A semiconductor device, comprising:
a substrate;
a gate structure over the substrate;
gate spacers on opposite sidewalls of the gate structure, wherein each of the gate spacers has an inner sidewall in contact with the gate structure;
an inhibitor residue over the gate structure and between the gate spacers, wherein the inhibitor residue lines the inner sidewall of one of the gate spacers; and
source/drain structures on opposite sides of the gate structure.
2. The semiconductor device of claim 1 , wherein the inhibitor residue is in contact with a top surface of the gate structure.
3. The semiconductor device of claim 1 , further comprising a conductive layer over the gate structure and between the gate spacers, wherein the inhibitor residue lines a sidewall of the conductive layer.
4. The semiconductor device of claim 3 , wherein the conductive layer is spaced apart from the gate spacers.
5. The semiconductor device of claim 3 , wherein top surfaces of the gate spacers, a top surface of the inhibitor residue, and a top surface of the conductive layer are coplanar.
6. The semiconductor device of claim 1 , wherein the gate structure comprises a gate dielectric layer, a work function metal layer over the gate dielectric layer, and a gate electrode over the work function metal layer, and the inhibitor residue is in contact with the gate dielectric layer.
7. The semiconductor device of claim 6 , wherein the inhibitor residue is spaced apart from the gate electrode of the gate structure.
8. The semiconductor device of claim 1 , wherein the inhibitor residue is made of a self-assemble monolayer (SAM).
9. The semiconductor device of claim 1 , wherein the inhibitor residue is made of a polymer.
10. A semiconductor device, comprising:
a substrate;
a gate structure over the substrate;
gate spacers on opposite sidewalls of the gate structure, wherein top surfaces of the gate spacers are level with a top surface of the gate structure;
a metal layer covering an entirety of the top surface of the gate structure but not covering the top surfaces of the gate spacers;
a conductive layer over the metal layer, wherein a sidewall of the conductive layer is coterminous with a sidewall of the metal layer; and
source/drain structures on opposite sides of the gate structure.
11. The semiconductor device of claim 10 , wherein the gate structure comprises a gate dielectric layer, a capping layer over the gate dielectric layer, a first work function metal layer over the capping layer, a second work function metal layer over the first work function metal layer, and a gate electrode over the second work function metal layer; and
wherein the metal layer is in contact with the gate dielectric layer, the capping layer, the first work function metal layer, the second work function metal layer, and the gate electrode.
12. The semiconductor device of claim 10 , where a bottom surface of the conductive layer and a top surface of the metal layer have substantially the same width.
13. The semiconductor device of claim 10 , wherein the conductive layer is thicker than the metal layer.
14. The semiconductor device of claim 10 , wherein the metal layer does not vertically overlap the gate spacers.
15. A semiconductor device, comprising:
a substrate;
a gate structure over the substrate;
a gate spacer on a sidewall of the gate structure, wherein a top surface of the gate spacer is level with a top surface of the gate structure;
an interlayer dielectric (ILD) layer adjacent to the gate spacer; and
a dielectric layer extending from a top surface of the ILD layer to a first portion of the top surface of the gate spacer and terminating prior to reaching a second portion of the top surface of the gate spacer.
16. The semiconductor device of claim 15 , further comprising a source/drain structure in the substrate and under the ILD layer, wherein the dielectric layer is wider than the source/drain structure.
17. The semiconductor device of claim 16 , wherein the dielectric layer overlaps an entirety of the source/drain structure.
18. The semiconductor device of claim 15 , further comprising a contact etch stop layer (CESL) between the ILD layer and the gate spacer, and the dielectric layer is in contact with a top surface of the CESL.
19. The semiconductor device of claim 15 , wherein the gate spacer comprises a first spacer layer in contact with the gate structure and a second spacer layer spaced from the gate structure by the first spacer layer, wherein the dielectric layer covers an entirety of a top surface of the second spacer layer and a partial region of a top surface of the first spacer layer.
20. The semiconductor device of claim 15 , wherein the gate structure is free from coverage of the dielectric layer.