IP Library Granted Patent US 11,030,372
Granted Patent B2
US 11,030,372 · App. 16/659,351 · Granted Jun 8, 2021

Method for generating layout diagram including cell having pin patterns and semiconductor device based on same

Inventors: Pin-Dai Sue (Tainan, TW); Chin-Chou Liu (Jhubei, TW); Sheng-Hsiung Chen (Zhubei, TW); Fong-Yuan Chang (Hsinchu, TW); Lee-Chung Lu (Taipei, TW); Yen-Hung Lin (Hsinchu, TW); Li-Chun Tien (Tainan, TW); Po-Hsiang Huang (Tainan, TW); Yi-Kan Cheng (Taipei, TW); Chi-Yu Lu (New Taipei, TW)
Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
G06F30/392G06F30/394G06F2111/20
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Quick Facts
Patent No.
US 11,030,372
App. No.
16/659,351
Granted
Jun 8, 2021
Kind
B2
Abstract

A method (of generating a layout diagram) includes generating a cell, representing at least part of a circuit in a semiconductor device, which is arranged at least in part according to second tracks of the M_2nd level (M_2nd tracks), and first tracks of the M_1st level (M_1st tracks). The generating the cell includes: selecting, based on a chosen site for the cell in the layout diagram, one of the M_2nd tracks; generating a first M_2nd pin pattern representing an output pin of the circuit; arranging a long axis of the first pin pattern substantially along the selected M_2nd track; generating second, third, fourth and fifth M_1st pin patterns representing corresponding input pins of the circuit; and arranging long axes of the second to fifth pin patterns substantially along corresponding ones of the M_1st tracks.

Claims (86)

1. A method of manufacturing a semiconductor device, the method comprising:

for a layout diagram, stored on a non-transitory computer-readable medium, including first and second levels of metallization (corresponding M_1st and M_2nd levels), the M_2nd level overlying the M_1st level,

generating a cell, representing at least part of a circuit in the semiconductor device, which is arranged at least in part according to first tracks relative to the M_1st level (M_1 st tracks) which extend in a first direction, and second tracks relative to the M_2nd level (M_2nd tracks) which extend in a second direction substantially perpendicular to the first direction; and

wherein the generating the cell includes:

selecting, based on a chosen site for the cell in the layout diagram, one of the M_2nd tracks;

generating a first pin pattern in the M_2nd level representing an output pin of the circuit;

arranging a long axis of the first pin pattern substantially along the selected M_2nd track;

relative to a total number of pin patterns in the M_1st and M_2nd levels, concentrating a majority of the total number of pin patterns in the M_1st level, the concentrating including:

generating second, third, fourth and fifth pin patterns in the M_1st level representing corresponding input pins of the circuit; and

arranging long axes of the second to fifth pin patterns substantially along corresponding ones of the M_1st tracks.

2. The method of claim 1 , wherein the generating second, third, fourth and fifth pin patterns further includes:

co-track aligning two of the second to fifth pin patterns.

3. The method of claim 1 , wherein the generating second, third, fourth and fifth pin patterns further includes:

configuring each of the second to fifth pin patterns to have at least two access points.

4. The method of claim 3 , wherein the generating second, third, fourth and fifth pin patterns further includes:

configuring at least one of the second to fifth pin patterns to have at least three access points;

configuring at least one of the second to fifth pin patterns to have at least four access points;

configuring at least one of the second to fifth pin patterns to have at least five access points; or

configuring at least one of the second to fifth pin patterns to have at least six access points.

5. The method of claim 3 , wherein the generating second, third, fourth and fifth pin patterns includes:

conserving the at least two access points of each of the second to fifth pin patterns until a function for the circuit is chosen.

6. The method of claim 3 , wherein the generating second, third, fourth and fifth pin patterns includes:

choosing a function for the circuit; and

for each of the second to fifth pin patterns, selecting one of the at least two access points to be a connection point based on the chosen function of the circuit.

7. The method of claim 1 , wherein:

each of the second and third pin patterns has only two access points;

relative to the first direction, each of the second and third pin patterns has a length which is sufficient to accommodate only two access points; and

the generating second, third, fourth and fifth pin patterns further includes:

relative to the first direction, arranging the second pin pattern so that the two access points of the second pin pattern are substantially aligned with a first subset of two of the M_2nd tracks; and

relative to the first direction, arranging the third pin pattern so that the two access points of the third pin pattern are substantially aligned with a second subset of two of the M_2nd tracks which is different than the first subset of the M_2nd tracks.

8. The method of claim 1 , wherein the arranging long axes of the second to fifth pin patterns includes:

arranging the long axes of the second to fifth pin patterns in the M_1st level substantially along four or fewer corresponding ones of the M_1st tracks.

9. The method of claim 8 , wherein the arranging long axes of the second to fifth pin patterns further includes:

arranging the long axes of the second to fifth pin patterns in the M_1st level substantially along three or fewer corresponding ones of the M_1st tracks.

10. The method of claim 1 , further comprising:

based on the layout diagram, at least one of:

(A) making one or more photolithographic exposure;

(B) fabricating one or more semiconductor masks; or

(C) fabricating at least one component in a layer of a semiconductor integrated circuit.

11. A system for manufacturing a semiconductor device, the system comprising:

at least one processor; and

at least one memory including computer program code for one or more programs;

wherein the at least one memory, the computer program code and the at least one processor are configured to cause the system to execute:

for a layout diagram, stored on a non-transitory computer-readable medium, including first and second levels of metallization (corresponding M_1st and M_2nd levels), the M_2nd level overlying the M_1st level,

generating a cell, representing at least part of a circuit in the semiconductor device, which is arranged at least in part according to first tracks relative to the M_1st level (M_1st tracks) which extend in a first direction, and second tracks relative to the M_2nd level (M_2nd tracks) which extend in a second direction substantially perpendicular to the first direction; and

wherein the generating the cell includes:

selecting, based on a chosen site for the cell in the layout diagram, one of the M_2nd tracks;

generating a first pin pattern in the M_2nd level representing an output pin of the circuit;

arranging a long axis of the first pin pattern substantially along the selected M_2nd track;

relative to a total number of pin patterns in the M_1st and M_2nd levels, concentrating a majority of the total number of pin patterns in the M_1st level, the concentrating including:

generating second, third, fourth and fifth pin patterns in the M_1st level representing corresponding input pins of the circuit; and

arranging long axes of the second to fifth pin patterns substantially along four or fewer corresponding ones of the M_1st tracks.

12. The system of claim 11 , further comprising at least one of:

a masking facility configured to fabricate one or more semiconductor masks based on the layout diagram; or

a fabricating facility configured to fabricate at least one component in a layer of a semiconductor integrated circuit based on the layout diagram.

13. The system of claim 11 , wherein the generating second, third, fourth and fifth pin patterns includes at least one of:

co-track aligning two of the second to fifth pin patterns; or

configuring each of the second to fifth pin patterns to have at least two access points.

14. The system of claim 13 , wherein:

each of the second to fifth pin patterns includes at least two access points; and

the generating second, third, fourth and fifth pin patterns includes:

conserving the at least two access points of each of the second to fifth pin patterns until a function for the circuit is chosen.

15. The system of claim 13 , wherein:

each of the second to fifth pin patterns includes at least two access points; and

the generating second, third, fourth and fifth pin patterns includes:

choosing a function for the circuit; and

for each of the second to fifth pin patterns, selecting one of the at least two access points to be a connection point based on the chosen function of the circuit.

16. The system of claim 11 , wherein:

each of the second and third pin patterns has only two access points;

relative to the first direction, each of the second and third pin patterns has a length which is sufficient to accommodate only two access points; and

the generating second, third, fourth and fifth pin patterns further includes:

relative to the first direction, arranging the second pin pattern so that the two access points of the second pin pattern with a first subset of two of the M_2nd tracks; and

relative to the first direction, arranging the third pin pattern so that the two access points of the third pin pattern are substantially aligned with a second subset of two of the M_2nd tracks which is different than the first subset of the M_2nd tracks.

17. The system of claim 11 , wherein the arranging long axes of the second to fifth pin patterns includes:

arranging the long axes of the second to fifth pin patterns in the M_1st level substantially along three or fewer corresponding ones of the M_1st tracks.

18. A semiconductor device comprising:

a first cell region, representing a circuit, which includes first and second layers of metallization (corresponding M_1st and M_2nd layers), the M_2nd layer overlying the M_1st layer, and which is arranged at least in part according to first tracks relative to the M_1st layer (M_1st tracks) which extend in a first direction, and second tracks relative to the M_2nd layer (M_2nd tracks) which extend in a second direction substantially perpendicular to the first direction, the first cell region including:

first, second, third and fourth pins in the M_1st layer representing corresponding inputs of the circuit;

long axes of the first to fourth pins being substantially aligned along four or fewer corresponding ones of the M_1st tracks; and

a fifth pin in the M_2nd layer representing an output of the circuit;

a long axis of the fifth pin being substantially aligned along a corresponding one of the M_2nd track; and

wherein, relative to a total number of pins in the M_1st and M_2nd layers, a majority of the total number of pins is in the M_1st layer.

19. The semiconductor device of claim 18 , wherein:

two of the first to fourth pins are substantially co-track aligned.

20. The semiconductor device of claim 18 , wherein:

the long axes of the first to fourth pins in the M_1st layer are substantially aligned along three or fewer corresponding ones of the M_1st tracks.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 6, 2019
From: SUE, PIN-DAI; LIU, CHIN-CHOU; CHEN, SHENG-HSIUNG; CHANG, FONG-YUAN; LU, LEE-CHUNG; LIN, YEN-HUNG; TIEN, LI-CHUN; HUANG, PO-HSIANG; CHENG, YI-KAN; LU, CHI-YU
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 051218/0268 →
Continuity (2)
Provisional Application 62753296 · Oct 31, 2018
Related Publication 20200134124A1 · Apr 30, 2020
Cited By (1)
US 12,340,165