Magnetic sensor including a plurality of magnetic detection elements and a plurality of magnetic field generators
A magnetic sensor includes a plurality of magnetic detection elements, and a plurality of magnetic field generators associated with the plurality of magnetic detection elements. Each of the plurality of magnetic field generators includes a first ferromagnetic material section and a first antiferromagnetic material section. The first antiferromagnetic material section is in contact with and exchange-coupled to the first ferromagnetic material section. The first ferromagnetic material section has an overall magnetization. The plurality of magnetic field generators includes first and second magnetic field generators configured so that the overall magnetization of the first ferromagnetic material section of the first magnetic field generator is in a different direction from the overall magnetization of the first ferromagnetic material section of the second magnetic field generator.
1. A plurality of magnetic field generators each comprising a first ferromagnetic material section and a first antiferromagnetic material section, wherein
the first antiferromagnetic material section is in contact with and exchange-coupled to the first ferromagnetic material section,
the first ferromagnetic material section has an overall magnetization, and
the plurality of magnetic field generators includes first and second magnetic field generators configured so that the overall magnetization of the first ferromagnetic material section of the first magnetic field generator is in a different direction from the overall magnetization of the first ferromagnetic material section of the second magnetic field generator.
2. The plurality of magnetic field generators according to claim 1 , wherein the first magnetic field generator is associated with a first magnetic detection element, and the second magnetic field generator is associated with a second magnetic detection element.
3. The plurality of magnetic field generators according to claim 1 , wherein
the first ferromagnetic material section includes a plurality of constituent layers stacked on each other, and
the plurality of constituent layers include a first ferromagnetic layer in contact with the first antiferromagnetic material section.
4. The plurality of magnetic field generators according to claim 3 , wherein the plurality of constituent layers further include a second ferromagnetic layer which is located farther from the first antiferromagnetic material section than the first ferromagnetic layer.
5. The plurality of magnetic field generators according to claim 4 , wherein the plurality of constituent layers further include a nonmagnetic layer interposed between the first ferromagnetic layer and the second ferromagnetic layer.
6. The plurality of magnetic field generators according to claim 5 , wherein
the first ferromagnetic layer and the second ferromagnetic layer are ferromagnetically exchange-coupled to each other via the nonmagnetic layer, and
each of the first ferromagnetic layer and the second ferromagnetic layer has a magnetization in the same direction as the overall magnetization of the first ferromagnetic material section.
7. The plurality of magnetic field generators according to claim 5 , wherein
the first ferromagnetic layer and the second ferromagnetic layer are antiferromagnetically exchange-coupled to each other via the nonmagnetic layer, and
the second ferromagnetic layer has a magnetization in the same direction as the overall magnetization of the first ferromagnetic material section.
8. The plurality of magnetic field generators according to claim 1 , wherein
the first ferromagnetic material section has a first surface and a second surface opposite to each other,
the first antiferromagnetic material section is in contact with the first surface of the first ferromagnetic material section, and
each of the plurality of magnetic field generators further includes a second antiferromagnetic material section in contact with the second surface of the first ferromagnetic material section and exchange-coupled to the first ferromagnetic material section.
9. The plurality of magnetic field generators according to claim 8 , wherein the first and second antiferromagnetic material sections have different blocking temperatures.
10. The plurality of magnetic field generators according to claim 1 , wherein
the first antiferromagnetic material section has a first surface and a second surface opposite to each other,
the first ferromagnetic material section is in contact with the first surface of the first antiferromagnetic material section,
each of the plurality of magnetic field generators further includes a second ferromagnetic material section in contact with the second surface of the first antiferromagnetic material section and exchange-coupled to the first antiferromagnetic material section, and
the second ferromagnetic material section has an overall magnetization.
11. A magnetic sensor system comprising a scale and a magnetic sensor arranged in a variable relative positional relationship with each other, the magnetic sensor system being configured to detect a physical quantity associated with the relative positional relationship between the scale and the magnetic sensor, wherein
the scale includes a plurality of magnetic field generators,
each of the plurality of magnetic field generators includes a first ferromagnetic material section and a first antiferromagnetic material section,
the first antiferromagnetic material section is in contact with and exchange-coupled to the first ferromagnetic material section,
the first ferromagnetic material section has an overall magnetization, and
the plurality of magnetic field generators includes first and second magnetic field generators configured so that the overall magnetization of the first ferromagnetic material section of the first magnetic field generator is in a different direction from the overall magnetization of the first ferromagnetic material section of the second magnetic field generator.
12. The magnetic sensor system according to claim 11 , wherein the plurality of magnetic field generators are arranged in a row.
13. The magnetic sensor system according to claim 12 , wherein the direction of the overall magnetization of the first ferromagnetic material section of the first magnetic field generator and the direction of the overall magnetization of the first ferromagnetic material section of the second magnetic field generator intersect a direction in which the row of the plurality of magnetic field generators extends and are opposite to each other.
14. The magnetic sensor system according to claim 11 , wherein the plurality of magnetic field generators are annularly arranged to form an aggregation having an outer periphery and an inner periphery.
15. The magnetic sensor system according to claim 14 , wherein the overall magnetization of the first ferromagnetic material section of the first magnetic field generator is in a direction from the outer periphery to the inner periphery, and the overall magnetization of the first ferromagnetic material section of the second magnetic field generator is in a direction from the inner periphery to the outer periphery.
16. A magnetic sensor comprising:
a plurality of magnetic detection elements; and
a plurality of magnetic field generators, wherein
each of the plurality of magnetic field generators includes a first ferromagnetic material section and a first antiferromagnetic material section,
the first antiferromagnetic material section is in contact with and exchange-coupled to the first ferromagnetic material section,
the first ferromagnetic material section has an overall magnetization,
the plurality of magnetic field generators includes first and second magnetic field generators configured so that the overall magnetization of the first ferromagnetic material section of the first magnetic field generator is in a different direction from the overall magnetization of the first ferromagnetic material section of the second magnetic field generator, and
each of the plurality of magnetic detection elements is configured to be subjected to a magnetic field that results from the overall magnetization of the first ferromagnetic material section of at least one of the plurality of magnetic field generators.
17. The magnetic sensor according to claim 16 , wherein each of the plurality of magnetic detection elements is a magnetoresistance element.
18. The magnetic sensor according to claim 17 , wherein the magnetoresistance element includes: a magnetization pinned layer having a magnetization pinned in a certain direction; a free layer having a magnetization that varies depending on the magnetic field to be detected; and a nonmagnetic layer located between the magnetization pinned layer and the free layer.
19. The magnetic sensor according to claim 18 , wherein the overall magnetization of the first ferromagnetic material section of any one of the plurality of magnetic field generators is in a direction intersecting the direction of the magnetization of the magnetization pinned layer of a specific magnetoresistance element that is to be subjected to a magnetic field resulting from the overall magnetization of the first ferromagnetic material section of the one of the plurality of magnetic field generators.
20. The magnetic sensor according to claim 16 , wherein
the plurality of magnetic detection elements includes a first magnetic detection element and a second magnetic detection element connected in series,
the first magnetic detection element is configured to be subjected to a magnetic field that results from the overall magnetization of the first ferromagnetic material section of the first magnetic field generator, and
the second magnetic detection element is configured to be subjected to a magnetic field that results from the overall magnetization of the first ferromagnetic material section of the second magnetic field generator.
21. A magnetic sensor comprising:
a plurality of magnetic detection elements; and
a plurality of magnetic field generators, wherein
each of the plurality of magnetic field generators includes a first ferromagnetic material section and a first antiferromagnetic material section,
the first antiferromagnetic material section is in contact with and exchange-coupled to the first ferromagnetic material section,
the first ferromagnetic material section has an overall magnetization,
the plurality of magnetic detection elements includes a first magnetic detection element and a second magnetic detection element connected in series,
the plurality of magnetic field generators includes a first to a fourth magnetic field generator,
the first magnetic detection element is configured to be subjected to a magnetic field that results from the overall magnetization of the first ferromagnetic material section of the first magnetic field generator and the overall magnetization of the first ferromagnetic material section of the second magnetic field generator,
the second magnetic detection element is configured to be subjected to a magnetic field that results from the overall magnetization of the first ferromagnetic material section of the third magnetic field generator and the overall magnetization of the first ferromagnetic material section of the fourth magnetic field generator,
the first and third magnetic field generators are configured so that the overall magnetization of the first ferromagnetic material section of the first magnetic field generator is in a different direction from the overall magnetization of the first ferromagnetic material section of the third magnetic field generator, and
the second and fourth magnetic field generators are configured so that the overall magnetization of the first ferromagnetic material section of the second magnetic field generator is in a different direction from the overall magnetization of the first ferromagnetic material section of the fourth magnetic field generator.