Magnetism detection device
A magnetism detection device according to an embodiment of the disclosure includes a sensor section and a resistive section. The sensor section includes a first magnetism detection element. The first magnetism detection element has a first stacked structure and is configured to detect a magnetic field to be detected. The resistive section includes a first resistive element and is coupled to the sensor section. The first resistive element has the first stacked structure.
1. A magnetism detection device comprising:
a plurality of first sensor patterns including a first magnetism detection element having a first stacked structure, the first magnetism detection element being configured to detect a magnetic field to be detected; and
a plurality of first dummy patterns having the first stacked structure.
2. The magnetism detection device according to claim 1 ,
wherein the first stacked structure in each of the plurality of first sensor patterns includes a first ferromagnetic layer having a first magnetization substantially pinned in a first direction, and
the first stacked structure in each of the plurality of first dummy patterns includes a first ferromagnetic layer having a first magnetization substantially pinned in the first direction.
3. The magnetism detection device according to claim 1 ,
wherein the plurality of first sensor patterns and the plurality of first dummy patterns are provided on same substrate.
4. The magnetism detection device according to claim 3 ,
wherein the plurality of first dummy patterns are provided to be adjacent to the plurality of first sensor patterns.
5. The magnetism detection device according to claim 3 , wherein the plurality of first dummy patterns are arranged to enclose at least a part of the plurality of first sensor patterns.
6. The magnetism detection device according to claim 1 , further comprising:
a plurality of second sensor patterns including a second magnetism detection element having a second stacked structure, the second magnetism detection element being configured to detect the magnetic field to be detected; and
a plurality of second dummy patterns having the second stacked structure.
7. The magnetism detection device according to claim 6 , wherein the plurality of first sensor patterns, the plurality of first dummy patterns, the plurality of second sensor patterns, and the plurality of second dummy patterns are provided on same substrate.
8. The magnetism detection device according to claim 7 , wherein
the plurality of first dummy patterns are provided to be adjacent to the plurality of first sensor patterns, and
the plurality of second dummy patterns are provided to be adjacent to the plurality of second sensor patterns.
9. The magnetism detection device according to claim 7 , wherein
the plurality of first dummy patterns are arranged to enclose at least a part of the plurality of first sensor patterns, and
the plurality of second dummy patterns are arranged to enclose at least a part of the plurality of second sensor patterns.
10. The magnetism detection device according to claim 6 , wherein
the first magnetism detection element and the second magnetism detection element are coupled in series or coupled in parallel to each other.
11. The magnetism detection device according to claim 6 , wherein
each of the first magnetism detection element, the second magnetism detection element, the plurality of first dummy patterns, and the plurality of second dummy patterns comprises a magnetic tunnel junction element.
12. The magnetism detection device according to claim 1 , further comprising:
a plurality of second sensor patterns including a second magnetism detection element having a second stacked structure, the second magnetism detection element being configured to detect the magnetic field to be detected;
a plurality of third sensor patterns including a third magnetism detection element having the first stacked structure, the third magnetism detection element being configured to detect the magnetic field to be detected;
a plurality of fourth sensor patterns including a fourth magnetism detection element having the second stacked structure, the fourth magnetism detection element being configured to detect the magnetic field to be detected;
a plurality of second dummy patterns having the second stacked structure;
a plurality of third dummy patterns having the first stacked structure; and
a plurality of fourth dummy patterns having the second stacked structure.
13. The magnetism detection device according to claim 12 , wherein
the first stacked structure comprises a plurality of first stacked structures, each of the first stacked structures includes a first ferromagnetic layer having first magnetization substantially pinned in a first direction, and
the second stacked structure comprises a plurality of second stacked structures, each of the second stacked structures includes a second ferromagnetic layer having second magnetization substantially pinned in a second direction opposite to the first direction.
14. A magnetism detection device comprising:
a plurality of first sensor patterns including a first magnetism detection element, the first magnetism detection element including a first magnetic body having first magnetization pinned in a first direction; and
a plurality of first dummy patterns including a second magnetic body having second magnetization pinned in the first direction.
15. The magnetism detection device according to claim 14 , further comprising:
a plurality of second sensor patterns including a second magnetism detection element, the second magnetism detection element including a third magnetic body having third magnetization pinned in a second direction opposite to the first direction; and
a plurality of second dummy patterns including a fourth magnetic body having fourth magnetization pinned in the second direction.