Semiconductor structure and manufacturing method of the same
The present disclosure provides a semiconductor structure having a memory region. The semiconductor structure includes an N th metal layer in a memory region and a periphery region, the periphery region spanning a wider area than the memory region, a plurality of magnetic tunneling junctions (MTJs) over the N th metal layer, the plurality of MTJs having at least one of mixed pitches and mixed sizes, a top electrode via over each of the plurality of MTJs; and an (N+M) th metal layer over the plurality of MTJs. A method for manufacturing the semiconductor structure is also disclosed.
1. A method for manufacturing a semiconductor structure, the method comprising:
forming an N th metal layer in a memory region and in a periphery region;
forming a plurality of magnetic tunneling junctions (MTJs) in the memory region, the plurality of MTJs having at least one of mixed pitches and mixed sizes;
forming a planarization etch stop layer in the memory region and in the periphery region; and
performing an etch back operation on a coating layer over the planarization etch stop layer until a portion of the planarization etch stop layer in the memory region is removed,
wherein N is an integer greater than or equal to 1, and wherein performing the etch back operation comprises leaving the planarization etch stop layer in the periphery region when the portion of the planarization etch stop layer in the memory region is removed.
2. The method of claim 1 , wherein performing the etch back operation comprises exposing an oxide layer underlying the planarization etch stop layer.
3. The method of claim 2 , wherein performing the etch back operation comprises leaving a portion of the planarization etch stop layer in the memory region and covering the oxide layer.
4. The method of claim 2 , wherein a top surface of each of the MTJs is covered by the oxide layer after the etch back operation.
5. The method of claim 2 , further comprising:
patterning top electrode via trenches in the oxide layer of the memory region; and
forming a top electrode via layer in the top electrode via trenches.
6. The method of claim 1 , further comprising performing a planarization operation over the memory region and the periphery region after the etch back operation.
7. The method of claim 6 , wherein the planarization etch stop layer in the memory region and in the periphery region is exposed after the planarization operation.
8. The method of claim 7 , wherein the planarization etch stop layer being exposed comprises discrete patterns from a top view perspective.
9. A method for manufacturing a semiconductor structure, the method comprising:
forming a plurality of magnetic tunneling junctions (MTJs) in a memory region, the plurality of MTJs having at least one of mixed pitches and mixed sizes;
forming a sidewall spacer layer in the memory region and the periphery region over the plurality of MTJs;
forming an oxide layer in the memory region over the sidewall spacer layer and in a periphery region adjacent to the memory region;
forming a planarization etch stop layer over the oxide layer; and
performing an etch back operation until a portion of oxide layer in the memory region is exposed.
10. The method of claim 9 , further comprising performing a planarization operation after the etch back operation to expose the planarization etch stop layer.
11. The method of claim 10 , wherein exposing the planarization etch stop layer comprises forming the planarization etch stop layer having a discrete pattern staggering from the plurality of MTJs from a top view perspective.
12. The method of claim 9 , further comprising:
patterning top electrode via trenches in the oxide layer of the memory region; and
forming a top electrode via layer over the memory region and the periphery region.
13. The method of claim 9 , wherein forming the planarization etch stop layer comprises depositing a nitride or oxynitride layer over the memory region and the periphery region.
14. A method for manufacturing a semiconductor structure, the method comprising:
forming an N th metal layer in a memory region and in a periphery region;
forming a plurality of magnetic tunneling junctions (MTJs) in the memory region, the plurality of MTJs having at least one of mixed pitches and mixed sizes;
forming a sacrificial layer in the memory region and in the periphery region; and
performing an etch back operation until a portion of the sacrificial layer in the memory region is removed,
wherein N is an integer greater than or equal to 1, and wherein performing the etch back operation comprises leaving the sacrificial layer in the periphery region when the portion of the sacrificial layer in the memory region is removed.
15. The method of claim 14 , further comprising forming a planarization etch stop layer in the memory region and in the periphery region prior to forming the sacrificial layer.
16. The method of claim 14 , further comprising performing a planarization operation over the memory region and the periphery region after the etch back operation.
17. The method of claim 16 , further comprising forming an oxide layer prior to forming the planarization etch stop layer, wherein performing the etch back operation comprises removing a portion of the planarization etch stop layer until an exposure of the oxide layer.
18. The method of claim 17 , further comprising forming a top electrode trench subsequent to performing the planarization operation.
19. The method of claim 18 , wherein forming the top electrode trench comprises:
patterning a mask layer over the oxide layer and the planarization etch stop layer; and
performing a first etch to remove a portion of the oxide layer until exposing a sidewall spacer layer surrounding and covering the plurality of MTJs.
20. The method of claim 19 , further comprising performing a second etch to remove a portion of the sidewall spacer layer until exposing a top electrode of one of the MTJs.