Arrays of memory cells individually comprising a capacitor and a transistor and methods of forming such arrays
An array of memory cells individually comprising a capacitor and a transistor comprises, in a first level, alternating columns of digitlines and conductive shield lines. In a second level above the first level there are rows of transistor wordlines. In a third level above the second level there are rows and columns of capacitors. In a fourth level above the third level there are rows of transistor wordlines. In a fifth level above the fourth level there are alternating columns of digitlines and conductive shield lines. Other embodiments and aspects are disclosed, including method.
1. A memory array comprising:
a first digitline and a first conductive shield in a first level;
a first vertical transistor in a second level above the first level, the first vertical transistor being electrically coupled to the first digitline;
a first capacitor and a second capacitor in a third level above the second level, the first capacitor being electrically coupled to first vertical transistor;
a second vertical transistor in a fourth level above the third level, the second vertical transistor being electrically coupled to the second capacitor; and
a second digitline and a second conductive shield in a fifth level above the fourth level, the second digitline being electrically coupled to the second vertical transistor.
2. The memory array of claim 1 further comprising:
a third digitline and a third conductive shield in a sixth level above the fifth level;
a third vertical transistor in a seventh level above the sixth level, the third vertical transistor being electrically coupled to the third digitline;
a third capacitor and a fourth capacitor in an eighth level above the seventh level, the third capacitor being electrically coupled to the third vertical transistor;
a fourth vertical transistor in a ninth level above the eighth level, the fourth vertical transistor being electrically coupled to the fourth capacitor; and
a fourth digitline and a fourth conductive shield in a tenth level above the ninth level, the fourth digitline is coupled to fourth vertical transistor.
3. The memory array of claim 1 further comprising:
a third vertical transistor in a sixth level above the fifth level, the third vertical transistor being electrically coupled to the second digitline;
a third capacitor and a fourth capacitor in a seventh level above the sixth level, the fourth capacitor being electrically coupled to third vertical transistor;
a fourth vertical transistor in an eighth level above the seventh level, the fourth vertical transistor being electrically coupled to the third capacitor; and
a third digitline and a third conductive shield in a tenth level above the ninth level, the third digitline being electrically coupled to the fourth vertical transistor.
4. The memory array of claim 1 wherein the first digitline and the first conductive shield have horizontally planar bases.
5. The memory array of claim 1 wherein the first and second capacitors share a common capacitor electrode.
6. The memory array of claim 1 wherein the third and fourth capacitors share a common capacitor electrode.
7. The memory array of claim 1 wherein the first vertical transistor is directly electrically coupled to the first digitline.
8. The memory array of claim 1 wherein the first capacitor is directly electrically coupled to the first vertical transistor.
9. The memory array of claim 1 wherein the second vertical transistor is directly electrically coupled to the second capacitor.
10. The memory array of claim 1 wherein the second digitline is directly electrically coupled to the second vertical transistor.
11. The memory array of claim 1 wherein,
the first vertical transistor is directly electrically coupled to the first digitline;
the first capacitor is directly electrically coupled to the first vertical transistor;
the second vertical transistor is directly electrically coupled to the second capacitor; and
the second digitline is directly electrically coupled to the second vertical transistor.
12. The array of claim 1 wherein the first and second capacitor electrodes are pillars having a substantially circular periphery.
13. The array of claim 1 wherein memory cells thereof individually have a total of only one transistor and a total of only one capacitor.
14. The array of claim 1 wherein each of the first and second capacitors has at least one capacitor electrode that is taller than it is wide.
15. The memory array of claim 1 comprising a base substrate below the first level, the base substrate comprising control and/or other peripheral circuitry for operating components within the memory array and that may or may not be wholly or partially within the memory array.
16. The memory array of claim 2 wherein the first digitline, the first vertical transistor, the first capacitor, the second conductive shield, the third digitline, the third vertical transistor, the third capacitor and the fourth conductive shield are vertically aligned.
17. The memory array of claim 3 wherein the first digitline, the first vertical transistor, the first capacitor, the second conductive shield, the third capacitor, the fourth transistor, and the third digitline are vertically aligned.
18. The memory array of claim 4 wherein the horizontally planar bases are coplanar.
19. The memory array of claim 6 wherein the first and second capacitors share a common capacitor electrode.
20. The array of claim 14 wherein each of the first and second capacitors has only one capacitor electrode that is taller than it is wide.