Imaging device, manufacturing device, and manufacturing method
The present technology relates to an imaging device, a manufacturing device, and a manufacturing method. The imaging device includes an organic photoelectric conversion film, an upper electrode provided in an upper portion of the organic photoelectric conversion film, a lower electrode provided in a lower portion of the organic photoelectric conversion film, and a metal thin film provided between the organic photoelectric conversion film and the upper electrode or between the organic photoelectric conversion film and the lower electrode. The metal thin film is provided between the organic photoelectric conversion film and the upper electrode. The upper electrode is formed of an oxide semiconductor, a metal oxide, and the metal thin film. The present technology can be applied to a vertical spectral imaging device.
1. An imaging device, comprising:
an organic photoelectric conversion film;
an upper electrode in an upper portion of the organic photoelectric conversion film;
a lower electrode in a lower portion of the organic photoelectric conversion film; and
an enthalpy control layer between the organic photoelectric conversion film and the lower electrode.
2. The imaging device according to claim 1 , wherein the enthalpy control layer includes an oxide film containing one of cadmium (Cd), copper (Cu), lead (Pb), or palladium (Pd).
3. The imaging device according to claim 1 , wherein the enthalpy control layer includes one of a Silver Oxide (Ag 2 O), Cobalt(II) Oxide (CoO), Cobalt (II, III) Oxide (Co 3 O 4 ), Cesium oxide (Cs 2 O), Copper Oxide (CuO), Cuprous Oxide (Cu 2 O), Germanium oxide (GeO), Germanium dioxide (GeO 2 ), Nickel Oxide (NiO), or Lead Oxide (PbO).
4. The imaging device according to claim 1 , wherein the enthalpy control layer has a thickness of one of equal to 5 nm or less than 5 nm.
5. The imaging device according to claim 1 , further comprising a metal thin film between the organic photoelectric conversion film and the upper electrode.
6. The imaging device according to claim 5 , wherein
the upper electrode comprises a hole blocking layer, and
the hole blocking layer is between the metal thin film and the organic photoelectric conversion film.
7. The imaging device according to claim 5 , wherein the metal thin film includes aluminum (Al).
8. The imaging device according to claim 5 , wherein the metal thin film includes one of aluminum (Al), indium (In), silver (Ag), gold (Au), zinc (Zn), lithium (Li), tin (Sn), antimony (Sb), magnesium (Mg), cadmium (Cd), calcium (Ca), potassium (K), rubidium (Rb), cesium (Cs), strontium (Sr), barium (Ba), cerium (Ce), yttrium (Y), hafnium (Hf), nickel (Ni), gallium (Ga), or titanium (Ti).
9. The imaging device according to claim 1 , wherein
the lower electrode comprises an metal oxide layer, and
the metal oxide layer is disposed between the organic photoelectric conversion film and the lower electrode.
10. The imaging device according to claim 1 , wherein each of the upper electrode and the lower electrode includes one of ITO, tin oxide-based SnO 2 , aluminum zinc oxide, gallium zinc oxide, indium zinc oxide, IGZO, CuI, InSbO 4 , ZnMgO, CuInO 2 , MgIn 2 O 4 , CdO, or ZnSnO 3 .
11. The imaging device according to claim 1 , wherein the organic photoelectric conversion film includes one of a quinacridone derivative, a naphthalene derivative, an anthracene derivative, a phenanthrene derivative, a tetracene derivative, a pyrene derivative, a perylene derivative, or a fluoranthene derivative.
12. The imaging device according to claim 1 , wherein the organic photoelectric conversion film includes one of a polymer, a metal complex dye, a cyanine dye, a merocyanine dye, a phenylxanthene dye, a triphenylmethane dye, a rhodacyanine dye, a xanthene dye, a macrocyclic azaannulene dye, an azulene dye, naphthoquinone, an anthraquinone dye, a condensed polycyclic aromatic compound, a chain compound, a heterocyclic ring compound, or a first dye.
13. The imaging device according to claim 12 , wherein
the polymer is one of phenylene vinylene, fluorene, carbazole, indole, pyrene, pyrrole, picoline, thiophene, acetylene, or diacetylene,
the metal complex dye is one of a dithiol metal complex dye, a metal phthalocyanine dye, a metal porphyrin dye, or a ruthenium complex dye,
the condensed polycyclic aromatic compound is one of anthracene or pyrene,
the chain compound is one of a condensed aromatic ring or a condensed heterocyclic compound,
the heterocyclic ring compound is one of quinoline, benzothiazole, or benzoxazole, and
the first dye is bonded by one of a squarylium group or a croconic methine group.
14. The imaging device according to claim 1 , wherein
the upper electrode comprises an oxide semiconductor, a metal oxide, and a metal thin film,
the oxide semiconductor, the metal oxide, and the metal thin film are stacked, and
the metal oxide is an oxidized portion of the metal thin film.
15. The imaging device according to claim 1 , wherein
a standard enthalpy of formation of a material of the enthalpy control layer is higher than a standard enthalpy of formation of a material of the lower electrode, and
the enthalpy control layer is reduced selectively.
16. The imaging device according to claim 15 , wherein the enthalpy control layer is configured to prevent hydrogen from entering the lower electrode.
17. The imaging device according to claim 1 , wherein the upper electrode comprises an oxide semiconductor (ITO) and an aluminum oxide (AlO) thin film.