IP Library Granted Patent US 11,054,673
Granted Patent B2
US 11,054,673 · App. 16/896,735 · Granted Jul 6, 2021

Photonic devices

Inventors: Mohammad Soltani (Belmont, MA); Eduardo M. Chumbes (Andover, MA)
Assignees: Raytheon BBN Technologies Corp.; Raytheon Company
G02F1/01716G02F1/01708H01S5/125G02F2202/108H01L29/2003H01L29/7783H01S5/343
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Quick Facts
Patent No.
US 11,054,673
App. No.
16/896,735
Granted
Jul 6, 2021
Kind
B2
Abstract

Photonic devices having Al 1-x Sc x N and Al y Ga 1-y N materials, where Al is Aluminum, Sc is Scandium, Ga is Gallium, and N is Nitrogen and where 0<x≤0.45 and 0≤y≤1.

Claims (17)

1. A photonic device comprising: a Group III-Nitride quantum well electro-optic modulator, the modulator comprising:

a Group III-Nitride quantum well photonic waveguiding layer; and

a cladding layer comprising an Al 1-x Sc x N, where 0<x≤0.45, the cladding layer disposed on the Group III-Nitride quantum well photonic waveguiding layer providing a lower refractive index at the operating wavelength of the photonic device to the Group III-Nitride while also providing a crystalline lattice matching layer to the Group III-Nitride quantum well photonic waveguiding layer.

2. A Group III-Nitride quantum well electro-optic modulator, comprising:

a Group III-Nitride quantum well photonic waveguiding layer; and

a cladding layer comprising an Al 1-x Sc x N disposed on the Group III-Nitride quantum well photonic waveguiding layer providing a lower refractive index at the operating wavelength of the photonic device to the Group III-Nitride while also providing a crystalline lattice matching layer to the Group III-Nitride quantum well photonic waveguiding layer and where 0<x≤0.45.

3. A Group III-Nitride quantum well electro-optic modulator comprising,

a Group III-Nitride quantum well photonic waveguiding layer with in-plane light propagation; and

a cladding layer, such cladding layer comprising Al 1-x Sc x N disposed on the Group III-Nitride quantum well photonic waveguiding layer providing a lower refractive index at the operating wavelength of the photonic device to the Group III-Nitride while also providing a crystalline lattice matching layer to the Group III-Nitride quantum well photonic waveguiding layer and where 0<x≤0.45.

4. The Group III-Nitride quantum well electro-optic modulator recited in claim 3 wherein the Group III-Nitride quantum well photonic waveguiding layer comprises a stack of Al y Ga 1-y N and In z Ga 1-z N layers where 0<z≤1 and 0≤y≤1.

5. A Group III-Nitride quantum well electro-optic modulator having: a photonic waveguiding layer; and cladding layer disposed on the photonic waveguiding layer, the cladding layer comprising Al 1-x Sc x N, where: 0<x≤0.45 and the photonic waveguiding layer comprises a stack of Al y Ga 1-y N and In z Ga 1-z N layers where 0<z≤1 and 0≤y≤1.

6. The photonic device recited in claim 1 wherein the Group III-Nitride quantum well photonic waveguiding layer comprises a stack of Al y Ga 1-y N and In z Ga 1-z N layers where 0<z≤1 and 0≤y≤1.

7. The photonic device recited in claim 1 comprising a second cladding layer comprising Al 1-x Sc x N wherein the Group III-Nitride quantum well photonic waveguiding layer is disposed between the cladding layer and the second cladding layer.

8. The Group III-Nitride quantum well electro-optic modulator recited in claim 2 wherein the Group III-Nitride quantum well photonic waveguiding layer comprises a stack of Al y Ga 1-y N and In z Ga 1-z N layers where 0<z≤1 and 0≤y≤1.

9. The Group III-Nitride quantum well electro-optic modulator recited in claim 2 comprising a second cladding layer comprising Al 1-x Sc x N wherein the Group III-Nitride quantum well photonic waveguiding layer is disposed between the cladding layer and the second cladding layer.

10. The Group III-Nitride quantum well electro-optic modulator recited in claim 2 wherein the cladding layer comprises a stack of GAN/InScN layers.

11. The Group III-Nitride quantum well electro-optic modulator recited in claim 10 wherein the cladding layer and the second classing layer each comprises a stack of GAN/InScN layers.

Assignments (3)
CHANGE OF NAME Recorded Aug 22, 2024
From: RAYTHEON BBN TECHNOLOGIES CORP.
To: RTX BBN TECHNOLOGIES, INC.
Reel/Frame 068748/0419 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 10, 2020
From: CHUMBES, EDUARDO M.
To: RAYTHEON COMPANY
Reel/Frame 052889/0666 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 10, 2020
From: SOLTANI, MOHAMMAD
To: RAYTHEON BBN TECHNOLOGIES CORP.
Reel/Frame 052889/0709 →
Continuity (3)
Division 16227846 · Dec 20, 2018
Provisional Application 62670273 · May 11, 2018
Related Publication 20200301175A1 · Sep 24, 2020
Cited By (1)
US 12,740,102