IP Library Granted Patent US 11,069,867
Granted Patent B2
US 11,069,867 · App. 16/743,844 · Granted Jul 20, 2021

Electronically pure single chirality semiconducting single-walled carbon nanotube for large scale electronic devices

Inventor: Huaping Li (Los Angeles, CA)
Assignee: Atom H2O, LLC
H01L51/0512C09D11/037C09D11/52H01L51/0004H01L51/0021H01L51/0025H01L51/0048H01L51/0558H01L51/0005H01L51/0017H01L51/0541H01L51/0545
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 11,069,867
App. No.
16/743,844
Granted
Jul 20, 2021
Kind
B2
Abstract

An electronically pure carbon nanotube ink, includes a population of semiconducting carbon nanotubes suspended in a liquid, the ink being essentially free of metallic impurities and organic material, and characterized in that when incorporated as a carbon nanotube network in a metal/carbon nanotube network/metal double diode, a nonlinear current-bias curve is obtained on application of a potential from 0.01 V to 100 V. The ink can be used to prepare air-stable n-type thin film transistors having performances similar to current thin film transistors used in flat panel displays amorphous silicon devices and high performance p-type thin film transistors with high-κ dielectrics.

Claims (45)

1. An n-type carbon nanotube thin film transistors, comprising:

an electronically pure semiconducting carbon nanotube thin film comprising a population of single-walled semiconducting carbon nanotubes essentially free of metallic impurities and organic material, and wherein the film is characterized as being electronically pure when incorporated as a carbon nanotube network in a metal/carbon nanotube network/metal double diode, a nonlinear current-bias curve is obtained on application of a potential from 0.01 V to 5 V across the semiconducting carbon nanotube network diode;

drain/source metal electrodes in electrical contact with the carbon nanotube thin film;

an amorphous silicon nitride dielectrics layer; and

a metal gate electrode,

characterized in that the N-type carbon nanotube thin film transistor shows amorphous silicon-like transfer characteristics in which the current increases from <10 −12 A to at least 10 −7 A when the gate voltage sweeps from 0 V to 20V under 0.1 V drain-source bias.

2. The n-type carbon nanotube thin film transistors of claim 1 , characterized in that under V DS =0.1 V, the I DS increases from 1 fA at −5V to 0.1 μA at 30 V.

3. The n-type carbon nanotube thin film transistors of claim 1 , characterized in that under V DS =10 V, I DS >30 μA at 30 V.

4. The n-type carbon nanotube thin film transistors of claim 1 , wherein the thin film transistor demonstrates negligible threshold shift after 10 V stress for one hour.

5. The n-type carbon nanotube thin film transistors of claim 1 , characterized in that under V DS =0.1 V, the I ON /I OFF ratio is >10 8 .

6. The n-type carbon nanotube thin film transistors of claim 1 , characterized in that under V DS =0.1 V, the I ON /I OFF ratio is in the range of 10 6 -10 12 .

7. The n-type carbon nanotube thin film transistors of claim 1 , wherein the gate electrode is a top gate electrode.

8. The n-type carbon nanotube thin film transistors of claim 1 , wherein the gate electrode is a bottom gate electrode.

9. The n-type carbon nanotube thin film transistors of claim 1 , wherein the transistor is prepared using an etch-stop.

10. The n-type carbon nanotube thin film transistors of claim 1 , wherein the transistor is prepared using a back channel etch process.

11. The n-type carbon nanotube thin film transistors of claim 1 , wherein the carbon nanotube density is in a range from 1-1000 nanotubes per μm 2 .

12. The n-type carbon nanotube thin film transistors of claim 1 , wherein the thin film transistor is air stable.

13. The n-type carbon nanotube thin film transistors of claim 1 , wherein the n-type carbon nanotube thin film transistors have channel lengths ranging from 5 nm to 1 mm or higher.

14. The n-type carbon nanotube thin film transistors of claim 1 , wherein the n-type carbon nanotube thin film transistors have channel widths ranging from 5 nm to 1 mm.

15. The n-type carbon nanotube thin film transistors of claim 1 , wherein the electronically pure semiconducting carbon nanotube are single-walled carbon nanotubes.

16. The n-type carbon nanotube thin film transistors of claim 1 , wherein the carbon nanotubes comprise one or more chiralities selected from (6,1), (5,3), (7,0), (6,2), (5,4), (8,0), (7,2), (8,1), (6,4), (7,3), (6,5), (9,1), (8,3), (10,0), (9,2), (7,5), (8,4), (11,0), (12, 2), (7,6), (9,4), (11,1), (10,3), (8,6), (9,5), (12,1), (11,3), (8,7), (13,0), (12,2), (10,5), (11,4), (9,7), (10,6), (13,2), (12,4), (14,1), (9,8), (13,3), (18,4), (20,2).

17. The n-type carbon nanotube thin film transistors of claim 1 , wherein the semiconducting carbon nanotubes are a single chirality.

18. The n-type carbon nanotube thin film transistors of claim 1 , wherein the carbon nanotubes are (6,5) single-walled carbon nanotube.

19. The n-type carbon nanotube thin film transistors of claim 1 , wherein the semiconducting carbon nanotubes are a single tube dimension.

20. A p-type carbon nanotube thin film transistors, comprising:

an electronically pure semiconducting carbon nanotube thin film comprising a population of single-walled semiconducting carbon nanotubes essentially free of metallic impurities and organic material, and wherein the film is characterized as being electronically pure when incorporated as a carbon nanotube network in a metal/carbon nanotube network/metal double diode, a nonlinear current-bias curve is obtained on application of a potential from 0.01 V to 5 V across the semiconducting carbon nanotube network diode;

drain/source metal electrodes in electrical contact with the carbon nanotube thin film;

a hafnium oxide dielectrics layer;

a metal gate electrode,

characterized in that the p-type carbon nanotube thin film transistors show p-type transfer characteristics, in which under V DS =1 V, the I DS increases from <10 −12 A to at least 10 −7 A when the gate voltage sweeps from 0 V to −20V under 1 V drain-source bias.

21. The p-type carbon nanotube thin film transistors of claim 20 , characterized in that the p-type carbon nanotube thin film transistors show p-type transfer characteristics, in which under V DS =1 V, the I DS increases less than 1 fA at 5V to 0.1 μA at −15 V.

22. The p-type carbon nanotube thin film transistors of claim 20 , wherein the carbon nanotube density is in a range from 1-1000 nanotubes per μm 2 .

23. The p-type carbon nanotube thin film transistors of claim 20 , characterized in that under V DS =1 V, the I ON /I OFF ratio is >10 8 .

24. The p-type carbon nanotube thin film transistors of claim 20 , characterized in that under V DS =1 V, the I ON /I OFF ratio is in the range of 10 6 -10 12 .

25. The p-type carbon nanotube thin film transistors of claim 20 , wherein the thin film transistor is air stable.

26. The p-type carbon nanotube thin film transistors of claim 20 , wherein the p-type carbon nanotube thin film transistors have channel lengths ranging from 35 nm to 1 mm or higher.

27. The p-type carbon nanotube thin film transistors of claim 20 , wherein the p-type carbon nanotube thin film transistors have channel widths ranging from 5 nm to 1 mm.

28. The p-type carbon nanotube thin film transistors of claim 20 , wherein the carbon nanotubes comprise one or more chiralities selected from (6,1), (5,3), (7,0), (6,2), (5,4), (8,0), (7,2), (8,1), (6,4), (7,3), (6,5), (9,1), (8,3), (10,0), (9,2), (7,5), (8,4), (11,0), (12, 2), (7,6), (9,4), (11,1), (10,3), (8,6), (9,5), (12,1), (11,3), (8,7), (13,0), (12,2), (10,5), (11,4), (9,7), (10,6), (13,2), (12,4), (14,1), (9,8), (13,3), (18,4), (20,2).

29. The p-type carbon nanotube thin film transistors of claim 20 , wherein the semiconducting carbon nanotubes are a single chirality.

30. The p-type carbon nanotube thin film transistors of claim 20 , wherein the carbon nanotubes are (6,5) single-walled carbon nanotube.

31. The p-type carbon nanotube thin film transistors of claim 20 , wherein the semiconducting carbon nanotubes are a single tube dimension.

32. The p-type carbon nanotube thin film transistors of claim 20 , wherein the gate electrode is a top gate electrode.

33. The p-type carbon nanotube thin film transistors of claim 20 , wherein the gate electrode is a bottom gate electrode.

34. The p-type carbon nanotube thin film transistors of claim 20 , wherein the transistor is prepared using an etch-stop.

35. The p-type carbon nanotube thin film transistors of claim 20 , wherein the transistor is prepared using a back channel etch process.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 16, 2020
From: CARBON NANOTUBE TECHNOLOGIES, LLC
To: ATOM H2O, LLC
Reel/Frame 054381/0945 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 9, 2020
From: LI, HUAPING
To: ATOM NANOELECTRONICS, INC.
Reel/Frame 052359/0883 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 9, 2020
From: ATOM NANOELECTRONICS, INC.
To: CARBON NANOTUBE TECHNOLOGIES, LLC
Reel/Frame 052359/0911 →
Continuity (3)
Division 15290575 · Oct 11, 2016
Provisional Application 62274634 · Jan 4, 2016
Related Publication 20200203644A1 · Jun 25, 2020
Cited By (1)
US 12,652,947