Capacitance detection circuit, semiconductor device, input device and electronic apparatus including the same, and method of detecting capacitance

1. A capacitance detection circuit for measuring an electrostatic capacitance, comprising:

a control signal generator configured to generate a control signal;

a drive circuit including:

a push-pull type output stage, which is configured to apply a drive voltage to the electrostatic capacitance according to the control signal, and including a low-side transistor and a high-side transistor; and

a differential input stage whose output terminals are connected to a control terminal of the low-side transistor and a control terminal of the high-side transistor, respectively, to apply output voltages to the control terminal of the high-side transistor and the control terminal of the low-side transistor, respectively, so that a feedback signal corresponding to an output voltage of the drive circuit matches the control signal;

a current detection circuit configured to generate a detection current which is a replica of a current flowing through the output stage of the drive circuit, and including:

a first transistor having a control terminal connected in common with the control terminal of the high-side transistor; and

a second transistor having a control terminal connected in common with the control terminal of the low-side transistor; and

an integrating circuit configured to integrate the detection current to generate a detection voltage,

wherein the detection current depends on a difference between a current flowing through the first transistor and a current flowing through the second transistor.

2. The capacitance detection circuit of claim 1 , wherein the control signal is a pulse signal, and

wherein the drive circuit includes an amplifier configured to receive the pulse signal.

3. The capacitance detection circuit of claim 1 , wherein the electrostatic capacitance is obtained by calculating a difference between the detection voltage obtained during charging and the detection voltage obtained during discharging.

4. The capacitance detection circuit of claim 1 , wherein the integrating circuit integrates the detection current obtained during charging and the detection current obtained during discharging.

5. The capacitance detection circuit of claim 1 , further comprising: an offset capacitor having one end connected to an input of the integrating circuit, and the other end to which a correction signal corresponding to the control signal is applied.

6. The capacitance detection circuit of claim 1 , wherein the capacitance detection circuit is integrated on a single semiconductor integrated circuit.

7. The capacitance detection circuit of claim 1 , wherein the differential input stage includes:

a non-inverting input terminal to which the control signal, which is a pulse signal, generated by the control signal generator is input; and

an inverting input terminal to which the drive voltage is input.

8. A semiconductor device for measuring a plurality of electrostatic capacitances, comprising:

a plurality of sense terminals to which the plurality of electrostatic capacitances are connected; and

a plurality of capacitance detection circuits corresponding to the plurality of sense terminals,

wherein each of the plurality of capacitance detection circuits includes:

a control signal generator configured to generate a control signal;

a drive circuit including:

a push-pull type output stage, which is configured to apply a drive voltage to the electrostatic capacitances according to the control signal, and including a low-side transistor and a high-side transistor; and

a differential input stage whose output terminals are connected to a control terminal of the low-side transistor and a control terminal of the high-side transistor, respectively, to apply output voltages to the control terminal of the high-side transistor and the control terminal of the low-side transistor, respectively, so that a feedback signal corresponding to an output voltage of the drive circuit matches the control signal;

a current detection circuit configured to generate a detection current which is a replica of a current flowing through the output stage of the drive circuit, and including:

a first transistor having a control terminal connected in common with the control terminal of the high-side transistor; and

a second transistor having a control terminal connected in common with the control terminal of the low-side transistor; and

an integrating circuit configured to integrate the detection current to generate a detection voltage,

wherein the detection current depends on a difference between a current flowing through the first transistor and a current flowing through the second transistor.

9. The semiconductor device of claim 8 , further comprising: a current averaging circuit configured to generate an average current of a plurality of detection currents obtained by the plurality of capacitance detection circuits,

wherein the integrating circuit of each of the capacitance detection circuits integrates a difference between the corresponding detection current and the average current.

10. An input device comprising:

a touch panel including a plurality of sensor electrodes such that the electrostatic capacitances of a portion of the plurality of sensor electrodes in a vicinity of a coordinate touched by a user changes; and

the semiconductor device of claim 8 that is configured to measure the electrostatic capacitances of the plurality of sensor electrodes.

11. An electronic apparatus comprising: the input device of claim 10 .

12. The semiconductor device of claim 8 , wherein the differential input stage includes:

a non-inverting input terminal to which the control signal, which is a pulse signal, generated by the control signal generator is input; and

an inverting input terminal to which the drive voltage is input.

13. A method of detecting an electrostatic capacitance, comprising:

generating a control signal;

charging and discharging the electrostatic capacitance according to the control signal by using a drive circuit including:

a push-pull type output stage, which is configured to apply a drive voltage to the electrostatic capacitance according to the control signal, and including a low-side transistor and a high-side transistor; and

a differential input stage whose output terminals are connected to a control terminal of the low-side transistor and a control terminal of the high-side transistor, respectively, to apply output voltages to the control terminal of the high-side transistor and the control terminal of the low-side transistor, respectively, so that a feedback signal corresponding to an output voltage of the drive circuit matches the control signal;

generating a detection current which is a replica of a current of the output stage by using a current detection circuit including:

a first transistor having a control terminal connected in common with the control terminal of the high-side transistor; and

a second transistor having a control terminal connected in common with the control terminal of the low-side transistor; and

generating a detection voltage by integrating the detection current,

wherein the detection current depends on a difference between a current flowing through the first transistor and a current flowing through the second transistor.

14. The method of claim 13 , wherein the control signal is a pulse signal, and

wherein the drive circuit includes an amplifier configured to receive the pulse signal.

15. The method of claim 13 , further comprising: calculating a difference between the detection voltage obtained during charging and the detection voltage obtained during discharging.

16. The method of claim 13 , wherein the detection voltage is generated by integrating the detection current obtained during charging and the detection current obtained during discharging.

17. The method of claim 13 , wherein the differential input stage includes:

a non-inverting input terminal to which the control signal, which is a pulse signal, generated by a control signal generator is input; and

an inverting input terminal to which the drive voltage is input.