Waveguide absorbers
The present disclosure relates to semiconductor structures and, more particularly, to waveguide absorbers and methods of manufacture. A structure includes: a photonics component; and a vanadate waveguide absorber adjacent to the photonics component.
1. A structure comprising:
a photonics component over an underlying substrate; and
a vanadate waveguide absorber contacting the underlying substrate and surrounding the photonics component.
2. The structure of claim 1 , wherein the vanadate waveguide absorber is CaVO 3 or SrVO 3 , which coats the photonics component on sides and a top surface to provide an integrated monolithic structure.
3. The structure of claim 1 , wherein the vanadate waveguide absorber has a permittivity with a real part in a range of about negative twenty (−20) to about positive twenty (+20), and an imaginary part in a range of zero (0) to about fifteen (15).
4. The structure of claim 1 , wherein the photonics component is composed of Si of SOI technology or SiN and the vanadate waveguide absorber contacts sides and a top surface of the photonics component providing an integrated monolithic structure.
5. The structure of claim 1 , further comprising a buffer layer separating the photonics component from the vanadate waveguide absorber, wherein the buffer layer fully embeds the photonics component by contacting sides and a top surface of the photonics component, and the vanadate waveguide absorber surrounds both the buffer layer and the photonics component.
6. The structure of claim 5 , further comprising a nitride layer embedded in an insulator layer, above the vanadate waveguide absorber.
7. The structure of claim 1 , wherein the photonics component is composed SiN and a nitride layer is embedded in an insulator layer.
8. The structure of claim 1 , wherein the photonics component is composed of SiN.
9. The structure of claim 1 , wherein the vanadate waveguide absorber is tapered and directly contacts sides and a top surface of the photonics component.
10. The structure of claim 1 , wherein the vanadate waveguide absorber includes a composite taper of different angles and directly contacts sides and a top surface of the photonics component.
11. A structure comprising:
a photonics component; and
a waveguide absorber integrated with and surrounding the photonics component, the waveguide absorber comprises a permittivity with a real part in a range of about negative twenty (−20) to about positive twenty (+20), and an imaginary part in a range of zero (0) to about fifteen (15).
12. The structure of claim 11 , wherein the waveguide absorber is composed of CaVO 3 or SrVO 3 , which directly contacts sides and a top surface of the photonics component to form a monolithic structure.
13. The structure of claim 11 , wherein the photonics component is composed of Si of SOI technology, SiN, III-V materials, SiON, AN or polymer and the waveguide absorber directly contacts sides and a top surface of the photonics component to form a monolithic structure.
14. The structure of claim 11 , further comprising a buffer layer separating the photonics component from the waveguide absorber, wherein the buffer layer fully embeds the photonics components by contacting sides and a top surface of the photonics component, and the waveguide absorber surrounds both the buffer layer and the photonics component and contacts an insulator material which is under the photonics component.
15. The structure of claim 14 , further comprising a nitride layer embedded in an insulator layer, above the waveguide absorber.
16. The structure of claim 11 , wherein the photonics component is composed SiN, the waveguide absorber coats the photonics component, and a nitride layer is embedded in an insulator layer which separates the waveguide absorber and the photonics component from an underlying substrate.
17. The structure of claim 11 , wherein the photonics component is composed SiN and the waveguide absorber is under the photonics component to separate the photonics component from an underlying substrate, and the waveguide absorber directly contacts the underlying substrate.
18. The structure of claim 11 , wherein the vanadate waveguide absorber and the photonics component can be any combination of straight and tapered.
19. A structure, comprising:
a waveguide structure composed of semiconductor material;
a waveguide absorber coating the waveguide structure and integrated into a monolithic device with the waveguide structure, the waveguide absorber comprising CaVO 3 or SrVO 3 ; and
an insulator material surrounding the waveguide structure and the waveguide absorber.
20. The structure of claim 19 , wherein the waveguide absorber directly contacts side surfaces and a top surface of the waveguide structure, and further contacts an underlying insulator layer in which the waveguide structure also contacts.