IP Library › Granted Patent US 11,101,214
Granted Patent B2
US 11,101,214 · App. 16/380,502 · Granted Aug 24, 2021

Package structure with dam structure and method for forming the same

Inventors: Po-Hao Tsai (Zhongli, TW); Techi Wong (Zhubei, TW); Meng-Liang Lin (Hsinchu, TW); Yi-Wen Wu (New Taipei, TW); Po-Yao Chuang (Hsin-Chu, TW); Shin-Puu Jeng (Hsinchu, TW)
Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
H01L23/5283H01L23/3128H01L23/3185H01L23/49575H01L23/49861H01L23/5389H01L24/09H01L24/17H01L24/32H01L25/0657H01L25/074H01L25/50H01L2224/0231H01L2224/02373H01L2224/02379H01L2224/02381H01L2224/0401H01L2224/3207H01L2224/32225H01L2225/0652H01L2225/06517H01L2924/1436H01L2924/1437
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Quick Facts
Patent No.
US 11,101,214
App. No.
16/380,502
Granted
Aug 24, 2021
Kind
B2
Abstract

A package structure and method for forming the same are provided. The package structure includes a die structure formed over a first interconnect structure, and the die structure includes a first region and a second region. The package structure includes a dam structure formed on the first region of the die structure, and a second interconnect structure formed over the die structure and the dam structure. The package structure also includes a package layer formed between the first interconnect structure and the second interconnect structure, and the package layer is formed on the second region of the die structure to surround the dam structure.

Claims (41)

1. A package structure, comprising:

a die structure formed over a first interconnect structure, wherein the die structure comprises a center region and a peripheral region;

a dam structure formed on the center region of the die structure, wherein the dam structure has a trapezoid shape with a top width and a bottom width, the bottom width is greater than the top width, and the bottom width is in direct contact with the die structure;

a second interconnect structure formed over the die structure and the dam structure; and

a package layer formed between the first interconnect structure and the second interconnect structure, wherein the package layer is formed on the peripheral region of the die structure to surround the dam structure, wherein the dam structure is separated from the second interconnect structure by the package layer.

2. The package structure as claimed in claim 1 , further comprising:

a ring structure formed over the first interconnect structure, wherein the die structure is surrounded by the ring structure.

3. The package structure as claimed in claim 2 , wherein a top surface of the ring structure is lower than a bottom surface of the dam structure.

4. The package structure as claimed in claim 2 , wherein a top surface of the ring structure is lower than a top surface of the die structure.

5. The package structure as claimed in claim 1 , wherein all of the sidewall surfaces of the dam structure are in direct contact with the package layer.

6. The package structure as claimed in claim 1 , wherein a size of the dam structure is smaller than a size of the die structure.

7. The package structure as claimed in claim 1 , further comprising:

a plurality of connectors formed between the first interconnect structure and the second interconnect structure, wherein the connectors are embedded in the package layer.

8. The package structure as claimed in claim 1 , wherein the dam structure comprises a plurality of sub-dam portions, and the sub-dam portions are arranged parallel to each other.

9. The package structure as claimed in claim 1 , further comprising:

a connector formed between the die structure and the first interconnect structure.

10. A package structure, comprising:

a first die structure formed over a first interconnect structure, wherein the first die structure comprises a first surface and a second surface;

a connector formed on the first surface of the first die structure;

a dam structure formed on the second surface of the first die structure;

a second interconnect structure formed on the dam structure;

a package layer surrounding the dam structure, wherein the second interconnect structure is separated from the first die structure by the package layer, wherein a top surface of the dam structure is in direct contact with the second interconnect structure or the package layer; and

a second die structure formed over the second interconnect structure, wherein the dam structure is between the first die structure and the second die structure.

11. The package structure as claimed in claim 10 , further comprising:

a ring structure formed over the first interconnect structure, wherein the first die structure is encircled by the ring structure.

12. The package structure as claimed in claim 11 , further comprising:

a plurality of connectors formed between the first interconnect structure and the second interconnect structure, wherein the ring structure is between the dam structure and the connectors.

13. The package structure as claimed in claim 10 , wherein the dam structure has a rectangular, a polygonal, a circular, or an oval shape when seen from a top-view.

14. The package structure as claimed in claim 10 , wherein the dam structure comprises a plurality of sub-dam portions, wherein a sum of a width of each of the sub-dam portions of the dam structure is smaller than a width of the first die structure.

15. The package structure as claimed in claim 10 , wherein the dam structure is on a central area of the second surface of the first die structure.

16. A package structure, comprising:

a die structure formed over a first interconnect structure;

a dam structure formed on a center region of the die structure, wherein a height of the dam structure is smaller than a height of the die structure;

a second interconnect structure formed over the dam structure;

a package layer surrounding the die structure and the dam structure, wherein the dam structure is separated from the second interconnect structure by the package layer; and

a ring structure formed over the first interconnect structure, wherein the dam structure is surrounded by the ring structure.

17. The package structure as claimed in claim 16 , wherein a width of the dam structure is smaller than a width of the die structure.

18. The package structure as claimed in claim 16 , further comprising:

a plurality of connectors between the die structure and the first interconnect structure, wherein the plurality of connectors are encircled by the ring structure.

19. The package structure as claimed in claim 18 , wherein a top surface of the ring structure is higher than top surfaces of the plurality of connectors.

20. The package structure as claimed in claim 16 , wherein a top surface of the ring structure is lower than a top surface of the die structure.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 11, 2019
From: TSAI, PO-HAO; WONG, TECHI; LIN, MENG-LIANG; WU, YI-WEN; CHUANG, PO-YAO; JENG, SHIN-PUU
To: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Reel/Frame 048862/0481 →
Continuity (2)
Provisional Application 62787490 · Jan 2, 2019
Related Publication 20200211962A1 · Jul 2, 2020
Cited By (4)
US 12,272,922 US 12,406,914 US 12,476,174 US 12,708,054