Handler bonding and debonding for semiconductor dies
Various embodiments process semiconductor devices. In one embodiment, a release layer is applied to a handler. The at least one singulated semiconductor device is bonded to the handler. The at least one singulated semiconductor device is packaged while it is bonded to the handler. The release layer is ablated by irradiating the release layer through the handler with a laser. The at least one singulated semiconductor device is removed from the transparent handler after the release layer has been ablated.
1. A method for processing semiconductor devices, the method comprising:
applying a release layer to a transparent handler;
disposing an insulating layer over the release layer, wherein the insulating layer is separate from an adhesive layer separately formed on the release layer, the insulating layer, or at least one singulated semiconductor device;
bonding the at least one singulated semiconductor device to the transparent handler;
ablating the release layer by irradiating the release layer through the transparent handler with a laser; and
removing the at least one singulated semiconductor device from the transparent handler after the release layer has been ablated.
2. The method of claim 1 , further comprising:
forming the adhesive layer on and in contact with the release layer.
3. The method of claim 1 , further comprising:
forming the adhesive layer on and in contact with the at least one singulated semiconductor device.
4. The method of claim 1 , further comprising:
forming the adhesive layer on and in contact with the insulating layer.
5. The method of claim 1 , further comprising:
curing the release layer prior to bonding the at least one singulated semiconductor device to the transparent handler.
6. The method of claim 1 , further comprising:
curing the release layer as part of bonding the at least one singulated semiconductor device to the transparent handler.
7. The method of claim 1 , further comprising:
packaging the at least one singulated semiconductor device while it is bonded to the transparent handler.
8. The method of claim 1 , wherein the transparent handler is one of:
a handle wafer;
a panel; and
a roll of handler material.
9. The method of claim 1 , wherein the release layer absorbs a frequency of light radiated from the laser.
10. The method of claim 1 , wherein light radiated from the laser has a wavelength of approximately 250 nm to 5000 nm.
11. The method of claim 1 , wherein the laser used for ablating the release layer is one of a YAG laser, a XeF excimer laser, and a diode-pumped solid-state (DPSS) laser.
12. The method of claim 1 , wherein light radiated from the laser is ultraviolet light.
13. The method of claim 1 , wherein light radiated from the laser is infrared light.
14. The method of claim 1 , wherein the release layer is a single layer of material.
15. The method of claim 1 , wherein the release layer comprises one or more additive materials, wherein the additive materials adjust a frequency of light absorption property of the release layer.
16. The method of claim 1 , wherein the release layer is substantially transparent to visible light.
17. A method for processing semiconductor devices, the method comprising:
applying a release layer to a transparent handler;
disposing an insulating layer over the release layer;
building semiconductor packaging components in contact with the insulating layer;
disposing an adhesive layer between the insulating layer and the transparent handler;
bonding at least one singulated semiconductor device to the semiconductor packaging components;
ablating the release layer by irradiating the release layer through the transparent handler with a laser; and
removing the at least one singulated semiconductor device from the transparent handler after the release layer has been ablated.
18. The method of claim 17 , wherein disposing the adhesive layer comprises:
forming the adhesive layer on and in contact with the release layer.
19. The method of claim 17 , wherein disposing the adhesive layer comprises:
forming the adhesive layer on and in contact with the insulating layer.
20. A method for processing semiconductor devices, the method comprising:
disposing a release layer in contact with a separate adhesive layer, wherein the adhesive layer is separate from the release layer and is disposed in contact with a transparent handler;
disposing an insulating layer over the release layer, wherein the insulating layer is separate from the adhesive layer;
bonding at least one singulated semiconductor device to the transparent handler;
ablating the release layer by irradiating the release layer through the transparent handler with a laser; and
removing the at least one singulated semiconductor device from the transparent handler after the release layer has been ablated.