Semiconductor device with fin transistors and manufacturing method of such semiconductor device
A semiconductor device and method of making same. The semiconductor device includes: a first conductivity type transistor and a second conductivity type transistor, wherein each of the first conductivity type transistor and the second conductivity type includes a gate insulating film formed on a base, a metal gate electrode formed on the gate insulating film, and side wall spacers formed at side walls of the metal gate electrode, wherein the gate insulating film is made of a high dielectric constant material, and wherein offset spacers are formed between the side walls of the metal gate electrode and the inner walls of the side wall spacers in any one of the first conductivity type transistor and the second conductivity type transistor, or offset spacers having different thicknesses are formed in the first conductivity type transistor and the second conductivity type transistor.
1. A semiconductor device comprising a first conductivity type transistor and a second conductivity type transistor, wherein:
the first conductivity type and the second conductivity type are different from each other;
each of the first conductivity type transistor and the second conductivity type transistors includes (i) a gate insulating layer defining a bottom surface and side surfaces of a concave space, and (ii) a metal gate electrode comprising a plurality of metal layers formed within the concave space; and
a gate length of the metal gate electrode of the first conductivity type transistor is different than a gate length of the metal gate electrode of the second conductivity type transistor.
2. The semiconductor device of claim 1 , wherein the gate insulating film is made of a high dielectric constant material.
3. The semiconductor device of claims comprising offset spacers between the side walls of the metal gate electrodes and the side surfaces of the of the gate insulating layers.
4. The semiconductor device of claim 3 , wherein the offset spacers in the first conductivity type transistor have a different thickness than the offset spacers in the second conductivity type transistor.