IP Library › Granted Patent US 11,121,165
Granted Patent B2
US 11,121,165 · App. 15/994,874 · Granted Sep 14, 2021

Image sensor with a cross-wafer capacitator

Inventors: Chiajen Lee (Irvine, CA); Xiaofeng Fan (San Jose, CA)
Assignee: Apple Inc.
H01L27/1464H01L27/14634H01L27/14636
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Quick Facts
Patent No.
US 11,121,165
App. No.
15/994,874
Granted
Sep 14, 2021
Kind
B2
Abstract

One or more cross-wafer capacitors are formed in an electronic component, circuit, or device that includes stacked wafers. One example of such a device is a stacked image sensor. The image sensor can include two or more wafers, with two wafers that are bonded to each other each including a conductive segment adjacent to, proximate, or abutting a bonding surface of the respective wafer. The conductive segments are positioned relative to each other such that each conductive element forms a plate of a capacitor. A cross-wafer capacitor is formed when the two wafers are attached to each other.

Claims (34)

1. An image sensor, comprising:

a first photodetector;

a second photodetector;

a first wafer including a first single conductive segment connected to a first signal line; and

a second wafer attached to the first wafer and comprising:

a second signal line operably coupled to the first photodetector and configured to carry a first charge read out of the first photodetector;

a third signal line operably coupled to the second photodetector and configured to carry a second charge read out of the second photodetector;

a second conductive segment connected to the second signal line and positioned adjacent to the first single conductive segment to produce a first cross-wafer capacitor including the first single conductive segment and the second conductive segment; and

a third conductive segment connected to the third signal line and positioned adjacent to the first single conductive segment to produce a second cross-wafer capacitor including the first single conductive segment and the third conductive segment, wherein:

the image sensor is configured to sum the first charge and the second charge on the first signal line using the first cross-wafer capacitor and the second cross-wafer capacitor wherein:

the first cross-wafer capacitor and the second cross-wafer capacitor share the first single conductive segment.

2. The image sensor of claim 1 , wherein:

the first cross-wafer capacitor is configured to store the first charge transferred from the first photodetector during a first global shutter operation; and

the second cross-wafer capacitor is configured to store the second charge transferred from the second photodetector during a second global shutter operation.

3. The image sensor of claim 1 , wherein:

the second signal line is connected to a first circuit; and

the third signal line is connected to a second circuit different from the first circuit.

4. The image sensor of claim 1 , wherein the first single conductive segment is connected to a node configured to receive a reference signal.

5. A first wafer for an image sensor comprising:

a first signal line operably coupled to a first photodetector and configured to carry a first charge read out of the first photodetector;

a second signal line operably coupled to a second photodetector and configured to carry a second charge read out of the second photodetector;

a first conductive plate connected to the first signal line and positioned proximate to a first area of a bonding surface of the first wafer, and configured to produce a first cross-wafer capacitor with a second single conductive plate of a second wafer attached to the first wafer at the bonding surface; and

a third conductive plate connected to the second signal line and positioned proximate to a second area of the bonding surface of the first wafer, and configured to produce a second cross-wafer capacitor with the second single conductive plate of the second wafer; wherein:

the image sensor is configured to sum the first charge and the second charge on a third signal line connected to the second single conductive plate wherein:

the first cross-wafer capacitor and the second cross-wafer capacitor share the second single conductive plate.

6. The first wafer of claim 5 , wherein:

the first cross-wafer capacitor is configured to store the first charge transferred during a first global shutter operation; and

the second cross-wafer capacitor is configured to store the second charge during a second global shutter operation.

7. The first wafer of claim 5 , wherein:

the first signal line is connected to a first circuit; and

the second signal line is connected to a second circuit different from the first circuit.

8. The first wafer of claim 5 , further comprising:

a fourth conductive plate connected to a third signal line and positioned proximate to a third area of the bonding surface of the first wafer, and configured to produce a third cross-wafer capacitor with the second single conductive plate of the second wafer.

9. The first wafer of claim 5 , wherein the second single conductive plate is connected to a node configured to receive a reference signal.

Continuity (3)
Continuation 14611917 · Feb 2, 2015
Provisional Application 62057863 · Sep 30, 2014
Related Publication 20180342544A1 · Nov 29, 2018
Cited By (2)
US 12,550,517 US 12,745,468