Substrate processing method, substrate processing apparatus and pre-drying processing liquid
A pre-drying processing liquid containing a sublimable substance that changes to gas without passing through to a liquid and a solvent in which the sublimable substance dissolves is supplied to a front surface of a substrate on which a pattern has been formed. Thereafter, the solvent is evaporated from the pre-drying processing liquid on the front surface of the substrate to thereby form a solidified body containing the sublimable substance on the front surface of the substrate. Thereafter, the solidified body is sublimated and thereby removed from the front surface of the substrate. A value acquired by multiplying a ratio of the thickness of the solidified body to the height of the pattern by 100 is greater than 76 and less than 219.
1. A substrate processing method comprising:
a pre-drying processing liquid supplying step of supplying a front surface of a substrate, on which a pattern has been formed, with a pre-drying processing liquid containing a sublimable substance that changes to gas without passing through to a liquid and a solvent in which the sublimable substance dissolves;
a solidified body forming step of forming a solidified body containing the sublimable substance on the front surface of the substrate by evaporating the solvent from the pre-drying processing liquid on the front surface of the substrate; and
a sublimating step of removing the solidified body from the front surface of the substrate by sublimating the solidified body, wherein
a value acquired by multiplying a ratio of a thickness of the solidified body to a height of the pattern by 100 is greater than 76 and less than 219, wherein
the pre-drying processing liquid supplied to the front surface of the substrate in the pre-drying processing liquid supplying step is a solution that contains the sublimable substance containing a hydrophobic group, the solvent, and an adsorbent substance that contains a hydrophobic group and a hydrophilic group and is higher in hydrophilicity than the sublimable substance.
2. The substrate processing method according to claim 1 , wherein
the adsorbent substance is a substance having sublimability.
3. The substrate processing method according to claim 1 , wherein a concentration of the adsorbent substance in the pre-drying processing liquid is lower than the concentration of the solvent in the pre-drying processing liquid.
4. The substrate processing method according to claim 1 , wherein
the sublimable substance is higher in hydrophobicity than the adsorbent substance.