Nanosheet P-type transistor with oxygen reservoir
An approach provides a semiconductor structure for a p-type field effect transistor that includes a nanosheet stack with a top protective layer composed of a plurality of oxygen reservoir layers between a plurality of channel layers, wherein the nanosheet stack is a semiconductor substrate adjacent to one or more isolation structures. The approach includes an interfacial material is around each layer of the plurality of channel layers and on the semiconductor substrate and a layer of gate dielectric material that is over the interfacial material, the top protective layer, and on the one or more isolation structures. The approach includes a layer of a work function metal is over the gate dielectric material and a liner that is over the nanosheet stack and over the work function metal on each of the one or more isolation structures that is covered by a low resistivity metal layer.
1. A semiconductor structure for a p-type field effect transistor, the structure comprising:
a nanosheet stack with a top protective layer composed of a plurality of oxygen reservoir layers between a plurality of channel layers, wherein the nanosheet stack is on a portion of a semiconductor substrate adjacent to one or more isolation structures;
an interfacial material is around each layer of the plurality of channel layers, around each layer of the plurality of oxygen layers, and on a portion of a top surface of the portion of a semiconductor substrate;
a layer of gate dielectric material is over the interfacial material and is over a top surface of the one or more isolation structures;
a layer of a work function metal is over the gate dielectric material;
a liner is over the nanosheet stack and over the work function metal on each of the one or more isolation structures; and
a low resistivity metal layer is on the liner to a level above a top surface of the nanosheet stack covering sides of the nanosheet stack.
2. The semiconductor structure of claim 1 , wherein the plurality of channel layers are composed of a semiconductor material for the p-type field effect transistor.
3. The semiconductor structure of claim 1 , wherein each of the plurality of oxygen reservoir layers are composed of one of SiO or SiON.
4. The semiconductor structure of claim 1 , wherein each of the plurality of oxygen reservoir layers have a thickness one nanometer to five nanometers.
5. The semiconductor structure of claim 1 , wherein the layer of work function metal is a p-type work function metal.
6. The semiconductor structure of claim 5 , wherein the layer of work function metal is an oxygen rich p-type work function metal.
7. The semiconductor structure of claim 1 , wherein the layer of work function metal is one of TiON or TiN.
8. The semiconductor structure of claim 1 , the plurality of channel layers are composed of a p-type semiconductor channel material.
9. The semiconductor structure of claim 1 , the plurality of channel layers are composed of a silicon semiconductor material.
10. A semiconductor structure for a p-type field effect transistor with oxygen reservoir layers, the structure comprising:
a nanosheet stack with a top protective layer composed of a plurality of oxygen reservoir layers between a plurality of channel layers, wherein the nanosheet stack is on a portion of a semiconductor substrate adjacent to one or more isolation structures, and wherein each channel layer is composed of a p-type semiconductor material and more than one p-type semiconductor material is present in the plurality of channel layers;
an interfacial material is around each layer of the plurality of channel layers, around each layer of the plurality of oxygen layers, and on a portion of a top surface of the portion of a semiconductor substrate;
a layer of gate dielectric material is over the interfacial material and is over a top surface of the one or more isolation structures;
a layer of a work function metal is over the gate dielectric material;
a liner is over the nanosheet stack and over the work function metal on each of the one or more isolation structures; and
a low resistivity metal layer is on the liner to a level above a top surface of the nanosheet stack covering sides of the nanosheet stack.