Thin-film transistor including oxide semiconductor layer, method of manufacturing the same, and display apparatus including the same
A thin-film transistor is disclosed. The thin-film transistor includes a gate electrode disposed on a substrate, an oxide semiconductor layer disposed so as to overlap at least a portion of the gate electrode in the state of being isolated from the gate electrode, a gate insulation film disposed between the gate electrode and the oxide semiconductor layer, a source electrode connected to the oxide semiconductor layer, and a drain electrode connected to the oxide semiconductor layer in the state of being spaced apart from the source electrode, wherein the oxide semiconductor layer includes indium (In), gallium (Ga), zinc (Zn), tin (Sn), and oxygen (O), the content of indium (In) in the oxide semiconductor layer is greater than the content of gallium (Ga), the content of indium (In) is substantially equal to the content of zinc (Zn), and the content ratio (Sn/In) of tin (Sn) to indium (In) is 0.1 to 0.25.
1. A method of manufacturing a thin-film transistor, comprising:
forming an oxide semiconductor layer comprising indium (In), gallium (Ga), zinc (Zn), tin (Sn), and oxygen (O) on a substrate, wherein
a content of In in the oxide semiconductor layer is greater than a content of Ga, and
a content of In in the oxide semiconductor layer is greater than a content of Sn, and
wherein forming an oxide semiconductor layer includes:
forming a first layer of the oxide semiconductor layer; and
forming a second layer of the oxide semiconductor layer on the first layer,
wherein an O content of the second layer is greater than an O content of the first layer.
2. The method according to claim 1 , wherein forming the oxide semiconductor layer includes:
performing a deposition at a temperature of 150° C. or higher to form the oxide semiconductor layer.
3. The method according to claim 1 , wherein the oxide semiconductor layer has a thickness of 20 nm or more.
4. The method according to claim 1 , further comprising:
plasma-treating the oxide semiconductor layer.
5. The method according to claim 4 , wherein plasma-treating the oxide semiconductor layer includes:
applying energy of an amount ranging from 2.0 to 2.5 kW/m 2 .
6. The method according to claim 4 , wherein plasma-treating the oxide semiconductor layer includes:
applying an N 2 O substance.
7. The method according to claim 4 , further comprising:
forming a source electrode and a drain electrode connected to the oxide semiconductor layer;
disposing the source electrode and the drain electrode so as to be spaced apart from each other,
wherein the source electrode and the drain electrode serve as a shielding layer for blocking plasma during plasma-treating of the oxide semiconductor layer.
8. The method according to claim 1 , further comprising:
heat-treating the oxide semiconductor layer at a temperature of 300° C. or higher.
9. The method according to claim 1 ,
forming the content of In to be substantially equal to the content of Zn.
10. The method according to claim 1 , further comprising:
forming a gate electrode;
disposing the gate electrode to be closer to the first layer than the second layer.
11. The method according to claim 1 , wherein a content ratio of each of In, Ga, Zn and Sn based on total amount of In, Ga, Zn and Sn is substantially same in the first layer and the second layer.
12. The method according to claim 1 , wherein a content ratio (Sn/In) of Sn to In is 0.1 to 0.25.
13. The method according to claim 1 , wherein the oxide semiconductor layer has a mobility of 18 cm 2 /Vs or more.
14. The method according to claim 1 , wherein the oxide semiconductor layer has a carrier concentration of 5×10 17 EA/cm 3 or more.
15. The method according to claim 1 , wherein the oxide semiconductor layer has a spin density of 2.0×10 17 spins/cm 3 or less.
16. The method according to claim 1 , wherein the second layer has a thickness substantially equivalent to 5 to 20% of a thickness of the oxide semiconductor layer.
17. The method according to claim 1 , wherein the content of In is 1.5 to 5 times the content of Ga.
18. A method of manufacturing a thin-film transistor, comprising:
forming an oxide semiconductor layer comprising indium (In), gallium (Ga), zinc (Zn), tin (Sn), and oxygen (O), wherein,
the oxide semiconductor layer has a packing density of 6.5 g/cm 3 or more,
a content of In in the oxide semiconductor layer is greater than a content of Ga, and
a content of In in the oxide semiconductor layer is greater than a content of Sn.
19. The method according to claim 18 , wherein forming the oxide semiconductor layer includes:
forming a first layer of the oxide semiconductor layer; and
forming a second layer of the oxide semiconductor layer on the first layer,
wherein an O content of the second layer is greater than an O content of the first layer.
20. The method according to claim 19 , wherein a content ratio of each of In, Ga, Zn and Sn based on total amount of In, Ga, Zn and Sn is substantially same in the first layer and the second layer.