IP Library › Granted Patent US 11,234,330
Granted Patent B2
US 11,234,330 · App. 17/154,599 · Granted Jan 25, 2022

Electronic device

Inventors: Po-Yun Hsu (Miao-Li County, TW); Ker-Yih Kao (Miao-Li County, TW); Chia-Ping Tseng (Miao-Li County, TW)
Assignee: INNOLUX CORPORATION
H05K1/036H05K3/0017H05K1/056Y10T29/49165Y10T29/5313
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Quick Facts
Patent No.
US 11,234,330
App. No.
17/154,599
Granted
Jan 25, 2022
Kind
B2
Abstract

An electronic device and a method for manufacturing the same are disclosed. The method for manufacturing the electronic device includes the following steps: providing a substrate; forming a metal layer on the substrate, wherein the metal layer has a first surface; forming a first insulating layer on the first surface of the metal layer; forming a second insulating layer on the first insulating layer; etching the first insulating layer and the second insulating layer to form a contact hole, wherein the contact hole exposes a portion of the first surface; cleaning the portion of the first surface exposed by the contact hole with a solution; and forming a transparent conductive layer on the second insulating layer, wherein the transparent conductive layer electrically connects with the metal layer.

Claims (16)

1. An electronic device, comprising:

a substrate;

a metal layer disposed on the substrate and having a first surface;

a first insulating layer disposed on the first surface of the metal layer;

a second insulating layer disposed on the first insulating layer;

a contact hole penetrating through the first insulating layer and the second insulating layer and exposing a portion of the first surface of the metal layer;

a recess adjacent to a boundary between the metal layer and the first insulating layer; and

a transparent conductive layer disposed on the second insulating layer and electrically connecting with the metal layer,

wherein a ratio of a length of the recess to a thickness of the transparent conductive layer is in a range from 0.01 to 0.2.

2. The electronic device of claim 1 , wherein the length of the recess is in a range from 0.01 nm to 100 nm.

3. The electronic device of claim 1 , wherein the thickness of the transparent conductive layer is in a range from 400 nm to 2000 nm.

4. The electronic device of claim 1 , wherein a depth of the recess is in a range from 20 nm to 100 nm.

5. The electronic device of claim 1 , wherein the second insulating layer includes an organic layer.

6. The electronic device of claim 1 , wherein the metal layer comprises Cu or Cu alloy.

7. The electronic device of claim 1 , wherein the first insulating layer comprises silicon nitride.

8. The electronic device of claim 1 , wherein a refractive index of the second insulating layer is substantially the same as a refractive index of the first insulating layer.

Priority Claims (1)
CN 201810876651.5 · Aug 3, 2018 · national
Continuity (2)
Division 16504884 · Jul 8, 2019
Related Publication 20210176861A1 · Jun 10, 2021