Low loss temperature compensated surface acoustic wave filter and duplexer
A surface acoustic wave resonator comprises at least one set of interdigital transducer (IDT) electrodes disposed on an upper surface of a piezoelectric substrate between first and second reflector gratings, a layer of silicon nitride disposed over the at least one set of IDT electrodes and the first and second reflector gratings, and a continuous trench formed in the layer of silicon nitride over portions of bus bar electrodes and tips of electrode fingers of the at least one set of IDT electrodes and over portions of bus bar electrodes and electrode fingers of the first and second reflector gratings to reduce acoustic leakage at electrode fingers of the first and second reflector gratings proximate the at least one set of IDT electrodes.
1. A surface acoustic wave (SAW) resonator comprising:
at least one set of interdigital transducer (IDT) electrodes disposed on an upper surface of a piezoelectric substrate between first and second reflector gratings;
a layer of silicon nitride disposed over the at least one set of IDT electrodes and the first and second reflector gratings; and
a continuous trench formed in the layer of silicon nitride over portions of bus bar electrodes and tips of electrode fingers of the at least one set of IDT electrodes and over portions of bus bar electrodes and electrode fingers of the first and second reflector gratings to reduce acoustic leakage at electrode fingers of the first and second reflector gratings proximate the at least one set of IDT electrodes.
2. The SAW resonator of claim 1 wherein the first and second reflector gratings each include reduced length electrode fingers with lengths less than a length between the bus bar electrodes of the first and second reflector gratings and full-length electrode fingers extending between the bus bar electrodes of the first and second reflector gratings.
3. The SAW resonator of claim 2 wherein the reduced length electrode fingers are positioned on sides of the first and second reflector gratings closest to the at least one set of IDT electrodes.
4. The SAW resonator of claim 3 wherein the reduced length electrode fingers closest to the at least one set of IDT electrodes include tip portions spaced from one of the bus bar electrodes of the first and second reflector gratings on an opposite side of the resonator than tip portions of outermost electrode fingers of the at least one set of IDT electrodes.
5. The SAW resonator of claim 2 wherein the reduced length electrode fingers include about 25% of a total number of electrode fingers in the reflector gratings.
6. The SAW resonator of claim 1 further comprising a layer of silicon oxynitride disposed on an upper surface of the layer of silicon nitride.
7. The SAW resonator of claim 1 configured as a single port resonator.
8. The SAW resonator of claim 1 configured as a longitudinal mode coupled resonator.
9. The SAW resonator of claim 8 wherein each set of IDT electrodes includes electrodes with varying pitches.
10. The SAW resonator of claim 8 wherein each of the reflector gratings includes electrodes with varying pitches.
11. The SAW resonator of claim 1 wherein no electrode fingers in the at least one set of IDT electrodes are apodized.
12. The SAW resonator of claim 1 wherein the trench extends beyond outer sides of the first and second reflector gratings on opposite sides of the first and second reflector gratings from the at least one set of IDT electrodes.
13. An electronic device with an electronics module having at least one radio frequency filter including at least one surface acoustic wave (SAW) resonator comprising:
at least one set of interdigital transducer (IDT) electrodes disposed on an upper surface of a piezoelectric substrate between first and second reflector gratings;
a layer of silicon nitride disposed over the at least one set of IDT electrodes and first and second reflector gratings; and
a continuous trench formed in the layer of silicon nitride over portions of bus bar electrodes and tips of electrode fingers of the at least one set of IDT electrodes and over portions of bus bar electrodes and electrode fingers of the first and second reflector gratings to reduce acoustic leakage at electrode fingers of the first and second reflector gratings proximate the at least one set of IDT electrodes.
14. A surface acoustic wave (SAW) resonator comprising:
at least one set of interdigital transducer (IDT) electrodes disposed on an upper surface of a piezoelectric substrate between first and second reflector gratings, the first and second reflector gratings each including reduced length electrode fingers with lengths less than a length between bus bar electrodes of the first and second reflector gratings;
a layer of silicon nitride disposed over the at least one set of IDT electrodes and first and second reflector gratings; and
a trench formed in the layer of silicon nitride over portions of bus bar electrodes and tips of electrode fingers of the at least one set of IDT electrodes and over portions of the bus bar electrodes and electrode fingers of the first and second reflector gratings to reduce acoustic leakage at electrode fingers of the first and second reflector gratings proximate the at least one set of IDT electrodes.
15. The SAW resonator of claim 14 wherein the reduced length electrode fingers are positioned on sides of the first and second reflector gratings closest to the at least one set of IDT electrodes.