Surface acoustic wave device having a trapezoidal electrode
A surface acoustic wave device can have a piezoelectric layer and at least one interdigital transducer electrode thereon with a trapezoidal shape. This can be useful to fill dead space or voids between nonparallel elements on the layer. For example, an array with ranks of slanted interdigital transducer electrodes may not be aligned with non-slanted elements (e.g., a surface acoustic wave filter). This can leave voids or openings with unused portions of the piezoelectric layer. Trapezoidal elements such as those described here can solve this problem and help suppress transverse modes.
1 . A surface acoustic wave device comprising:
a piezoelectric layer forming a plane with a propagation axis;
a plurality of slanted interdigital transducer electrodes arranged on the piezoelectric layer in ranks that are not aligned with the propagation axis;
arranged on the piezoelectric layer in the same plane, at least one non-slanted surface acoustic wave filter having an elongate axis that parallels the propagation axis; and
arranged on the piezoelectric layer in the same plane, at least one trapezoid interdigital transducer electrode having one side aligned with the propagation axis and one side aligned with the ranks of slanted interdigital transducer electrodes.
2 . The surface acoustic wave device of claim 1 wherein the at least one trapezoid interdigital transducer electrode includes a first bus bar having first fingers extending from the first bus bar and a second bus bar having second fingers extending from the second bus bar, the first and second bus bars being non-parallel to each other.
3 . The surface acoustic wave device of claim 2 wherein the first bus bar and first fingers are perpendicular to each other, and the second bus bar and second fingers are non-perpendicular to each other.
4 . The surface acoustic wave device of claim 3 further comprising a plurality of trapezoid interdigital transducer electrodes over the piezoelectric layer.
5 . The surface acoustic wave device of claim 4 wherein the plurality of slanted interdigital transducer electrodes and the plurality of trapezoidal interdigital transducer electrodes are arranged in a tessellating pattern.
6 . The surface acoustic wave device of claim 4 wherein the non-slanted surface acoustic wave filter is a multi-mode surface acoustic wave filter having an elongate rectangular shape.
7 . The surface acoustic wave device of claim 6 wherein the multi-mode surface acoustic wave filter is arranged such that the sides of the multi-mode surface acoustic wave filter are parallel to peripheral edges of the surface acoustic wave device.
8 . The surface acoustic wave device of claim 6 wherein the plurality of slanted interdigital transducer electrodes, the plurality of trapezoidal interdigital transducer electrodes and the multi-mode surface acoustic wave filter are arranged in a tessellating pattern.
9 . The surface acoustic wave device of claim 4 wherein at least one of the plurality of trapezoid interdigital transducer electrodes includes a first bus bar having fingers extending perpendicularly from the first bus bar, the first bus bar being arranged adjacent to a peripheral edge of the surface acoustic wave device.
10 . The surface acoustic wave device of claim 7 wherein at least one of the plurality of trapezoid interdigital transducer electrodes includes a first bus bar having fingers extending perpendicularly from the first bus bar, the first bus bar being arranged adjacent to a side of the multi-mode surface acoustic wave filter.
11 . The surface acoustic wave device of claim 1 further comprising a support substrate, the piezoelectric layer being disposed between the support substrate and the interdigital transducer electrode.
12 . The surface acoustic wave device of claim 11 further comprising a low velocity layer disposed between the support substrate and the piezoelectric layer, the low velocity layer having an acoustic velocity lower than an acoustic velocity of the piezoelectric layer.
13 . The surface acoustic wave device of claim 12 wherein the low velocity layer is a silicon dioxide layer and the piezoelectric layer is a lithium tantalate layer.
14 . A surface acoustic wave device comprising:
a multilayer piezoelectric substrate including a support substrate and a piezoelectric layer over the support substrate, the piezoelectric layer forming a planar surface; and
at least one trapezoid interdigital transducer electrode over the piezoelectric layer having a trapezoidal shape when viewed from above the planar surface and configured for positioning in a tessellating manner adjacent to but not in contact with slanted and non-slanted elements on the same planar surface.
15 . The device of claim 14 further comprising a non-slanted element forming a surface acoustic wave filter device and a slanted element forming an interdigital transducer electrode, the two elements nonparallel to each other, and the at least one trapezoid interdigital transducer electrode occupies an opening on the planar surface between the two nonparallel elements.
16 . A surface acoustic wave filter comprising:
a piezoelectric layer having a straight edge;
an array of slanted elements forming at least one rank on the piezoelectric layer that is slanted with respect to the straight edge;
at least one parallel element on the piezoelectric layer having an elongate axis that is parallel to the straight edge; and
at least one interdigital transducer electrode over the piezoelectric layer, the at least one interdigital transducer electrode being a trapezoid interdigital transducer electrode and having at least one side parallel to the straight edge and one side parallel to the at least one slanted rank such that the trapezoid interdigital transducer electrode efficiently fills space on the piezoelectric layer between the array and the parallel element.
17 . The surface acoustic wave filter of claim 16 wherein the array of slanted elements includes a plurality of slanted interdigital transducer electrodes and the at least one parallel element includes a multi-mode surface acoustic wave filter.
18 . The surface acoustic wave filter of claim 16 wherein the array of slanted elements and the trapezoid interdigital transducer electrode are all configured to suppress transverse modes while filtering acoustic signals.
19 . The surface acoustic wave filter of claim 16 further comprising a plurality of trapezoidal interdigital transducer electrodes and a plurality of slanted interdigital transducer electrodes over the piezoelectric layer, the plurality of slanted interdigital transducer electrodes and the plurality of trapezoidal interdigital transducer electrodes arranged in a tessellating pattern such that any open spaces are occupied by at least one of the electrodes.
20 . A radio frequency module comprising:
a power amplifier configured to provide a radio frequency signal; and
a surface acoustic wave filter configured to filter the radio frequency signal, the surface acoustic wave filter including a piezoelectric layer, an array of elements over the piezoelectric layer having trapezoidal voids therebetween, and at least one trapezoidal interdigital transducer electrode over the piezoelectric layer configured to efficiently occupy at least one of the trapezoidal voids.
21 . A wireless communication device comprising the radio frequency module of claim 20 , wherein the surface acoustic wave filter is further configured to suppress transverse modes.