Acoustic wave device with spinel layer and temperature compensation layer
An acoustic wave device that includes a spinel layer, a piezoelectric layer, a temperature compensating layer between the spinel layer and the piezoelectric layer and an interdigital transducer electrode on the piezoelectric layer is disclosed. The piezoelectric layer is disposed between the interdigital transducer electrode and the spinel layer. The acoustic wave device is configured to generate an acoustic wave having a wavelength of λ. The piezoelectric layer can have a thickness that is less than λ. In some embodiments, the spinel layer can be a polycrystalline spinel layer.
1. An acoustic wave device comprising:
a polycrystalline spinel layer;
a piezoelectric layer having a thickness than is less than λ, the acoustic wave device being configured to generate an acoustic wave having a wavelength of λ; and
an interdigital transducer electrode on the piezoelectric layer, the piezoelectric layer being disposed between the interdigital transducer electrode and the polycrystalline spinel layer.
2. The acoustic wave device of claim 1 further comprising a temperature compensating layer disposed between the polycrystalline spinel layer and the piezoelectric layer.
3. The acoustic wave device of claim 2 wherein the temperature compensating layer includes silicon dioxide.
4. The acoustic wave device of claim 2 further comprising a high impedance layer disposed between the temperature compensating layer and the polycrystalline spinel layer, the high impedance layer having a higher acoustic impedance than the polycrystalline spinel layer.
5. The acoustic wave device of claim 2 wherein the temperature compensating layer is in physical contact with the piezoelectric layer.
6. The acoustic wave device of claim 5 wherein the temperature compensating layer is in physical contact with the polycrystalline spinel layer opposite to the piezoelectric layer.
7. The acoustic wave device of claim 1 wherein the polycrystalline spinel layer is in physical contact with the piezoelectric layer.
8. The acoustic wave device of claim 1 wherein the piezoelectric layer is a lithium tantalate layer.
9. The acoustic wave device of claim 1 wherein the piezoelectric layer is a lithium niobate layer.
10. The acoustic wave device of claim 1 further comprising a substrate layer, the polycrystalline spinel layer being disposed between the substrate layer and the piezoelectric layer.
11. The acoustic wave device of claim 10 wherein the substrate layer is a silicon layer.
12. The acoustic wave device of claim 10 wherein the substrate layer is in physical contact with the polycrystalline spinel layer.
13. The acoustic wave device of claim 10 further comprising an adhesive layer attaching the substrate layer and the polycrystalline spinel layer.
14. The acoustic wave device of claim 1 wherein the acoustic wave device is a surface acoustic wave device, and the acoustic wave is a surface acoustic wave.
15. The acoustic wave device of claim 1 wherein the polycrystalline spinel layer includes spinel having a chemical formula of MgAl 2 O 4 .
16. A radio frequency module comprising:
an acoustic wave filter configured to filter a radio frequency signal, the acoustic wave filter including an acoustic wave device configured to generate an acoustic wave having a wave length of λ, the acoustic wave device including a piezoelectric layer having a thickness of less than λ, an interdigital transducer electrode on the piezoelectric layer, and a polycrystalline spinel layer arranged such that the piezoelectric layer is disposed between the polycrystalline spinel layer and the interdigital transducer electrode; and
a package enclosing the acoustic wave filter.
17. The radio frequency module of claim 16 further comprising a second acoustic wave filter, the acoustic wave filter and the second acoustic wave filter being included in a duplexer.
18. The radio frequency module of claim 16 further comprising a power amplifier enclosed within the package, the power amplifier configured to provide the radio frequency signal.
19. The radio frequency module of claim 16 wherein the acoustic wave filter is a surface acoustic wave filter and the piezoelectric layer is a lithium-based piezoelectric layer.
20. A wireless communication device comprising:
an antenna; and
an acoustic wave filter in communication with the antenna, the acoustic wave filter being configured to filter a radio frequency signal, the acoustic wave filter including an acoustic wave device configured to generate an acoustic wave having a wave length of λ, the acoustic wave device including a piezoelectric layer having a thickness of less than λ, an interdigital transducer electrode on the piezoelectric layer, and a polycrystalline spinel layer arranged such that the piezoelectric layer is disposed between the polycrystalline spinel layer and the interdigital transducer electrode.
21. The wireless communication device of claim 20 wherein the acoustic wave filter is a surface acoustic wave filter.