Acoustic wave device with multi-layer interdigital transducer electrode
An acoustic wave device includes a piezoelectric layer and an interdigital transducer electrode disposed over the piezoelectric layer. The interdigital transducer electrode is thicker in a center region of the interdigital transducer electrode than in a gap region of the interdigital transducer electrode to thereby reduce a mass loading of the interdigital transducer electrode in the gap region. The interdigital transducer electrode has a layer of less dense material disposed of a layer of more dense material.
1. An acoustic wave device comprising:
a piezoelectric layer; and
an interdigital transducer electrode including a first layer disposed over the piezoelectric layer and a second layer disposed over and adjacent the first layer, the second layer being of a less dense material than the first layer, a thickness of the first layer in a gap region of the interdigital transducer electrode between a busbar and an end of a finger of the interdigital transducer electrode that extends from the busbar being smaller than a thickness of the first layer in a center region of the interdigital transducer electrode to thereby reduce a mass loading of the interdigital transducer electrode in the gap region.
2. The acoustic wave device of claim 1 wherein there is no first layer in the gap region, the second layer being adjacent the piezoelectric layer in the gap region.
3. The acoustic wave device of claim 1 wherein the interdigital transducer electrode includes the bus bar, first fingers extending from the bus bar, a second bus bar, and second fingers extending from the second bus bar, the bus bar and the second bus bar each including the first and second layers.
4. The acoustic wave device of claim 1 further comprising a temperature compensation layer disposed over the interdigital transducer electrode.
5. The acoustic wave device of claim 4 further comprising a passivation layer disposed over the temperature compensation layer.
6. The acoustic wave device of claim 1 further comprising a pair of mass loading strips disposed over the interdigital transducer electrode, an edge of the mass loading strips aligned with end regions of the interdigital transducer electrode.
7. The acoustic wave device of claim 1 wherein the piezoelectric layer is a part of a multilayer piezoelectric substrate, the multilayer piezoelectric substrate additionally including a support substrate underlying the piezoelectric layer.
8. A radio frequency module comprising:
a package substrate;
an acoustic wave filter configured to filter a radio frequency signal, the acoustic wave filter including an acoustic wave resonator that includes a piezoelectric layer and an interdigital transducer electrode including a first layer disposed over the piezoelectric layer and a second layer disposed over and adjacent the first layer, the second layer being of a less dense material than the first layer, a thickness of the first layer in a gap region of the interdigital transducer electrode between a busbar and an end of a finger of the interdigital transducer electrode that extends from the busbar being smaller than a thickness of the first layer in a center region of the interdigital transducer electrode to thereby reduce a mass loading of the interdigital transducer electrode in the gap region; and
additional circuitry, the acoustic wave filter and the additional circuitry disposed on the package substrate.
9. The radio frequency module of claim 8 wherein there is no first layer in the gap region, the second layer being adjacent the piezoelectric layer in the gap region.
10. The radio frequency module of claim 8 further comprising a temperature compensation layer disposed over the interdigital transducer electrode.
11. The radio frequency module of claim 10 further comprising a passivation layer disposed over the temperature compensation layer.
12. The radio frequency module of claim 8 further comprising a pair of mass loading strips disposed over the interdigital transducer electrode, an edge of the mass loading strips aligned with end regions of the interdigital transducer electrode.
13. The radio frequency module of claim 8 wherein the piezoelectric layer is a part of a multilayer piezoelectric substrate, the multilayer piezoelectric substrate additionally including a support substrate underlying the piezoelectric layer.
14. A wireless communication device comprising:
an antenna; and
a front end module including an acoustic wave filter configured to filter a radio frequency signal associated with the antenna, the acoustic wave filter including one or more acoustic wave devices that each include a piezoelectric layer and an interdigital transducer electrode including a first layer disposed over the piezoelectric layer and a second layer disposed over and adjacent the first layer, the second layer being of a less dense material than the first layer, a thickness of the first layer in a gap region of the interdigital transducer electrode between a busbar and an end of a finger of the interdigital transducer electrode that extends from the busbar being smaller than a thickness of the first layer in a center region of the interdigital transducer electrode to thereby reduce a mass loading of the interdigital transducer electrode in the gap region.
15. The wireless communication device of claim 14 wherein there is no first layer in the gap region, the second layer being adjacent the piezoelectric layer in the gap region.
16. The wireless communication device of claim 14 further comprising a temperature compensation layer disposed over the interdigital transducer electrode.
17. The wireless communication device of claim 16 further comprising a passivation layer disposed over the temperature compensation layer.
18. The wireless communication device of claim 14 further comprising a pair of mass loading strips disposed over the interdigital transducer electrode, an edge of the mass loading strips aligned with end regions of the interdigital transducer electrode.
19. The wireless communication device of claim 14 wherein the piezoelectric layer is a part of a multilayer piezoelectric substrate, the multilayer piezoelectric substrate additionally including a support substrate underlying the piezoelectric layer.