Acoustic wave resonator with rotated and tilted interdigital transducer electrode
Acoustic wave resonators are disclosed that include a piezoelectric layer and an interdigital transducer electrode over the piezoelectric layer. The interdigital transducer electrode has a rotation angle and a tilt angle. The rotation angle and the tilt angle can together increase a figure of merit of the acoustic wave device. The rotation angle and the tilt angle can both be non-zero.
1. An acoustic wave resonator with increased figure of merit, the acoustic wave resonator comprising:
a piezoelectric layer; and
an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode having a rotation angle and a tilt angle, the rotation angle and the tilt angle both being non-zero, and the rotation angle and the tilt angle together configured to cause an increase in a figure of merit of the acoustic wave resonator relative to a configuration having a zero rotation angle and a zero tilt angle, a sum of the rotation angle and the tilt angle being in a range from 2° to 14°.
2. The acoustic wave resonator of claim 1 wherein a magnitude of the rotation angle is greater than 1°.
3. The acoustic wave resonator of claim 1 wherein the rotation angle is in a range from 1° to 15°.
4. The acoustic wave resonator of claim 1 wherein the rotation angle is greater than the tilt angle.
5. The acoustic wave resonator of claim 1 wherein a magnitude of the rotation angle is greater than 1°.
6. The acoustic wave resonator of claim 5 wherein the rotation angle is no greater than 15°.
7. The acoustic wave resonator of claim 1 wherein the tilt angle is at least 6°.
8. The acoustic wave resonator of claim 1 wherein the figure of merit of acoustic wave resonator is above 140.
9. The acoustic wave resonator of claim 1 further comprising a support substrate, the piezoelectric layer positioned between the support substrate and the interdigital transducer electrode.
10. The acoustic wave resonator of claim 9 further comprising a low velocity layer positioned between the support substrate and the piezoelectric layer, the low velocity layer having an acoustic velocity lower than an acoustic velocity of the piezoelectric layer.
11. The acoustic wave resonator of claim 10 wherein the low velocity layer is a silicon dioxide layer.
12. The acoustic wave resonator of claim 9 wherein the acoustic wave resonator is a surface acoustic wave resonator configured to generate a surface acoustic wave.
13. The acoustic wave resonator of claim 1 wherein the interdigital transducer electrode includes a bus bar and fingers that extend from the bus bar, the bus bar and the fingers are non-perpendicular to each other.
14. The acoustic wave resonator of claim 13 further wherein the interdigital transducer electrode includes a second bus bar and second fingers extending from the second bus bar, the bus bar and the second bus bar extend approximately parallel to each other.
15. The acoustic wave resonator of claim 1 wherein the piezoelectric layer is a lithium tantalate layer.
16. An acoustic wave resonator comprising:
a multilayer piezoelectric substrate including a support substrate and a piezoelectric layer over the support substrate; and
an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode having a rotation angle and a tilt angle, the rotation angle and the tilt angle both being non-zero, and the rotation angle and the tilt angle together configured to cause a transverse mode to be suppressed, a sum of the rotation angle and the tilt angle being in a range from 2° to 14°.
17. The acoustic wave resonator of claim 16 wherein the rotation angle is no greater than 15°.
18. The acoustic wave resonator of claim 16 wherein a magnitude of the rotation angle is greater than 1°, and a magnitude of the tilt angle is greater than 1°.
19. An acoustic wave filter comprising:
a first acoustic wave resonator including a piezoelectric layer and an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode having a rotation angle and a tilt angle, the rotation angle and the tilt angle both being non-zero, and the rotation angle and the tilt angle together configured to cause an increase in a figure of merit of the acoustic wave resonator relative to a configuration having a zero rotation angle and a zero tilt angle, a sum of the rotation angle and the tilt angle being in a range from 2° to 14°; and
a plurality of other acoustic wave resonators, the first acoustic wave resonator and the plurality of other acoustic wave resonators together arranged to filter a radio frequency signal.
20. The acoustic wave filter of claim 19 wherein the rotation angle is in a range from 1° to 15°.