Piezoelectric MEMS microphone
View Patent ↗The invention provides a piezoelectric micro-electromechanical system (MEMS) microphone includes a base with a cavity and a piezoelectric diaphragm arranged on the base. The base has a ring base and a support column. The piezoelectric diaphragm includes a plurality of diaphragm sheets. Each diaphragm sheet has a fixing end connected with the support column and a free end suspended above the cavity. The widths of the diaphragm sheets are gradually increased from the fixing ends to the free ends. According to the piezoelectric MEMS microphone provided by the invention, under sound pressure, the free ends vibrate, wide free ends drive short fixing ends, and the diaphragm sheets close the fixing ends generate greater deformation to generate more charge. Therefore, the sensitivity can be further improved.
1. A piezoelectric micro-electromechanical system (MEMS) microphone, comprising:
a base with a cavity, comprising a ring base and a support column arranged at an inner side of the ring base and arranged apart from the ring base;
a piezoelectric diaphragm arranged on the base, comprising a plurality of diaphragm sheets arranged spaced from each other along a circumferential direction of the support column; wherein
each diaphragm sheet includes a fixing end connected with the support column and a free end suspended above the cavity; and the widths of the diaphragm sheets are gradually increased from the fixing ends to the free ends;
the base further comprises a plurality of support beams arranged apart from each other; one ends of the support beams are connected with the support column and the other ends are connected with the ring base to divide the cavity into a plurality of sub-cavities along the circumferential direction of the support column; and the free ends are suspended above the sub-cavities.
2. The piezoelectric MEMS microphone as described in claim 1 , wherein one free end is suspended above each sub-cavity.
3. The piezoelectric MEMS microphone as described in claim 2 , wherein projection profiles of the free ends in a vibration direction are positioned within the projection profiles of the sub-cavities in the vibration direction.
4. The piezoelectric MEMS microphone as described in claim 3 , wherein the projection profile of each free end in the vibration direction is the same as the projection profile of the corresponding sub-cavity in the vibration direction in shape.
5. The piezoelectric MEMS microphone as described in claim 4 , including a first wall body arranged at one side of the ring base toward the support column, and a second wall body arranged at one side of the support column toward the ring base; wherein the projection profiles of the first wall body and the second wall body in the vibration direction both are circular.
6. The piezoelectric MEMS microphone as described in claim 5 , wherein the projection profiles of the diaphragm sheets in the vibration direction are fan-shaped.
7. The piezoelectric MEMS microphone as described in claim 5 , wherein the projection profiles of the first wall body and the second wall body in the vibration direction both are polygonal.
8. The piezoelectric MEMS microphone as described in claim 7 , wherein the projection profiles of the diaphragm sheets in the vibration direction are trapezoidal.
9. The piezoelectric MEMS microphone as described in claim 5 , wherein one of the projection profile of the first wall body in the vibration direction and the projection profile of the second wall body in the vibration direction is circular and the other one is polygonal.