IP Library Granted Patent US 11,275,156
Granted Patent B2
US 11,275,156 · App. 16/551,283 · Granted Mar 15, 2022

Sensor and distance measuring device comprising first and second quenching devices respectively connected to current output terminals of fist and second avalanche photodiodes

Inventors: Hiroshi Kubota (Fussa Tokyo, JP); Nobu Matsumoto (Ebina Kanagawa, JP)
Assignees: KABUSEIIKI KAISHA TOSHIBA; TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
G01S7/4816G01S7/4863G01S17/10H01L27/1443H01L27/1446H01L31/02027H01L31/02164H01L31/107
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Quick Facts
Patent No.
US 11,275,156
App. No.
16/551,283
Granted
Mar 15, 2022
Kind
B2
Abstract

According to one embodiment, a sensor includes a first avalanche photodiode, a first quenching element, a second avalanche photodiode, and a second quenching element. The first quenching element is connected to a current output terminal of the first avalanche photodiode at one end and is connected to an output terminal at another end. The second avalanche photodiode is arranged adjacent to the first avalanche photodiode. The second quenching element is connected to a current output terminal of the second avalanche photodiode at one end and is connected to a specific electric potential at another end.

Claims (32)

1. A sensor comprising:

a first avalanche photodiode;

a first quenching device having a first end and a second end, the first end of the first quenching device connected to a current output terminal of the first avalanche photodiode and the second end of the first quenching device connected to a pixel terminal;

a second avalanche photodiode arranged adjacent to the first avalanche photodiode; and

a second quenching device having a first end and a second end, the first end of the second quenching device connected to a current output terminal of the second avalanche photodiode and the second end of the second quenching device connected to an electric potential.

2. The sensor according to claim 1 ,

wherein the first avalanche photodiode is one of a plurality of first avalanche photodiodes that are two-dimensionally arranged over a substrate and form a sensor region over the substrate, and

the second avalanche photodiode is one of a plurality of second avalanche photodiodes that are arranged over the substrate and around an outer periphery of the sensor region.

3. The sensor according to claim 1 ,

wherein the first avalanche photodiode is one of a plurality of first avalanche photodiodes that are two-dimensionally arranged over a substrate and form a sensor region over the substrate, and

the second avalanche photodiode is not arranged around a portion of the outer periphery of the sensor region.

4. The sensor according to claim 1 ,

wherein the second avalanche photodiode is light-shielded.

5. The sensor according to claim 1 ,

wherein a breakdown voltage of the second avalanche photodiode is higher than a breakdown voltage of the first avalanche photodiode.

6. The sensor according to claim 1 ,

wherein a resistance value of the second quenching device is higher than a resistance value of the first quenching device.

7. The sensor according to claim 1 ,

wherein a reverse-bias voltage of the second avalanche photodiode is lower than a reverse-bias voltage of the first avalanche photodiode.

8. A distance measuring device comprising:

a light emitter configured to emit light toward a target object;

a sensor configured to receive light reflected from the target object; and

a distance measurement processor configured to measures a distance to the target object based on a current signal provided by the sensor, wherein the sensor includes:

a first avalanche photodiode;

a first quenching device having a first end and a second end, the first end of the first quenching device connected to a current output terminal of the first avalanche photodiode and the second end of the first quenching device connected to a pixel terminal configured to output the current signal;

a second avalanche photodiode arranged adjacent to the first avalanche photodiode; and

a second quenching device having a first end and a second end, the first end of the second quenching device connected to a current output terminal of the second avalanche photodiode and the second end of the second quenching device connected to an electric potential.

9. The sensor according to claim 1 , further comprising:

a light shielding layer, disposed over the substrate, that is configured to reduce light incidence received by the first and second avalanche photodiodes.

10. The sensor according to claim 1 , wherein the electric potential is ground.

11. The sensor according to claim 1 , wherein each of the first and second quenching devices includes at least one of a resistor or a transistor.

12. The distance measuring device according to claim 8 , wherein each of the first and second quenching devices includes at least one of a resistor or a transistor.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 12, 2019
From: KUBOTA, HIROSHI; MATSUMOTO, NOBU
To: KABUSHIKI KAISHA TOSHIBA
Reel/Frame 050986/0453 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 12, 2019
From: KUBOTA, HIROSHI; MATSUMOTO, NOBU
To: TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
Reel/Frame 050986/0494 →
Priority Claims (1)
JP JP2019-046282 · Mar 13, 2019 · national
Continuity (1)
Related Publication 20200292670A1 · Sep 17, 2020
Cited By (1)
US 12,660,359